Chemically amplified positive resist composition and resist pattern forming process
US-12164231-B2 · Dec 10, 2024 · US
US2024061335A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2024061335-A1 |
| Application number | US-202218278921-A |
| Country | US |
| Kind code | A1 |
| Filing date | Feb 3, 2022 |
| Priority date | Feb 26, 2021 |
| Publication date | Feb 22, 2024 |
| Grant date | — |
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The present disclosure relates to a crosslinkable compound, a composition containing the same for formation of a solid electrolyte, a method of preparing a solid electrolyte by using the composition, a solid electrolyte, and an electronic element including the solid electrolyte.
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1 . A crosslinkable compound represented by Formula 1: wherein, in Formula 1, L 1 and L 2 are each independently a single bond, —C═O—, —C, a substituted or unsubstituted C 1 -C 30 alkylene group, a substituted or unsubstituted C 2 -C 30 alkenylene group, or a substituted or unsubstituted C 2 -C 30 alkynylene group, m1 and m2 are each independently 0, 1, 2, or 3, Ar 1 and Ar 2 are each independently a substituted or unsubstituted C 5 -C 60 carbocyclic group or a substituted or unsubstituted C 1 -C 60 heterocyclic group, Ar 1 and Ar 2 are each independently substituted with at least one crosslinkable group, n1 is an integer from 2 to 300,000, R 1 to R 4 are each independently hydrogen, deuterium, —F, —Cl, —Br, —I, a hydroxyl group, a cyano group, a substituted or unsubstituted C 1 -C 30 alkyl group, a substituted or unsubstituted C 2 -C 30 alkenyl group, a substituted or unsubstituted C 2 -C 30 alkynyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 1 -C 30 alkylthio group, —Si(Q 1 )(Q 2 )(Q 3 ), a substituted or unsubstituted C 5 -C 60 carbocyclic group, or a substituted or unsubstituted C 1 -C 60 heterocyclic group, at least one of the substituted C 1 -C 30 alkylene group, the substituted C 2 -C 30 alkenylene group, the substituted C 2 -C 30 alkynylene group, the substituted C 5 -C 60 carbocyclic group, the substituted C 1 -C 60 heterocyclic group, the substituted C 1 -C 30 alkyl group, the substituted C 2 -C 30 alkenyl group, the substituted C 2 -C 30 alkynyl group, the substituted C 1 -C 30 alkoxy group, and the substituted C 1 -C 30 alkylthio group is substituted with deuterium, —F, —Cl, —Br, —I, a hydroxyl group, a cyano group, a C 1 -C 30 alkyl group, a C 2 -C 30 alkenyl group, a C 2 -C 30 alkynyl group, a C 1 -C 3 o alkoxy group, a C 1 -C 30 alkylthio group, or —Si(Q 1 )(Q 2 )(Q 3 ), and Q 11 to Q 13 are each independently hydrogen, deuterium, —F, —Cl, —Br, —I, a hydroxyl group, a cyano group, a C 1 -C 30 alkyl group, a C 2 -C 30 alkenyl group, a C 2 -C 30 alkynyl group, a C 1 -C 3 o alkoxy group, or a C 1 -C 30 alkylthio group. 2 . The crosslinkable compound of claim 1 , wherein the crosslinkable group contains an azide group (—N 3 ), a sulfur-containing group, or an unsaturated double bond-containing group. 3 . The crosslinkable compound of claim 1 , wherein the crosslinkable compound is represented by Formula 2: wherein, in Formula 2, L 1 , L 2 , m1, m2, n1, and R 1 to R 4 are as defined in claim 1 , R 11 to R 15 and R 21 to R 25 are each independently a crosslinkable group, hydrogen, deuterium, —F, —Cl, —Br, —I, a hydroxyl group, a cyano group, a substituted or unsubstituted C 1 -C 30 alkyl group, a substituted or unsubstituted C 2 -C 30 alkenyl group, a substituted or unsubstituted C 2 -C 30 alkynyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 1 -C 30 alkylthio group, —Si(Q 1 )(Q 2 )(Q 3 ), a substituted or unsubstituted C 5 -C 6 o carbocyclic group, or a substituted or unsubstituted C 1 -C 60 heterocyclic group, at least one of R 11 to R 15 is a crosslinkable group, and at least one of R 21 to R 25 is a crosslinkable group. 4 . The crosslinkable compound of claim 3 , wherein one of R 11 to R 15 is an azide group, and the others are each —F or —Cl, and one of R 21 to R 25 is an azide group, and the others are each —F or —Cl. 5 . The crosslinkable compound of claim 1 , wherein the crosslinkable compound is selected from Compounds 1 to 5: 6 . A composition for forming a solid electrolyte, comprising: an ionic elastomer; an ionic liquid; and a photo-crosslinking agent, wherein the photo-crosslinking agent contains the crosslinkable compound of claim 1 . 7 . The composition of claim 6 , wherein the ionic elastomer is a thermoplastic polyurethane (TPU) polymer. 8 . The composition of claim 7 , wherein the TPU polymer contains a repeating unit represented by Formula 10: wherein, in Formula 10, n11 is an integer from 1 to 5,000, and R 101 to R 122 are each independently hydrogen, deuterium, —F, —Cl, —Br, —I, a hydroxyl group, a cyano group, a substituted or unsubstituted C 1 -C 30 alkyl group, a substituted or unsubstituted C 2 -C 30 alkenyl group, a substituted or unsubstituted C 2 -C 30 alkynyl group, a substituted or unsubstituted C 1 -C 30 alkoxy group, a substituted or unsubstituted C 1 -C 30 alkylthio group, —Si(Q 1 )(Q 2 )(Q 3 ), a substituted or unsubstituted C 5 -C 60 carbocyclic group, or a substituted or unsubstituted C 1 -C 60 heterocyclic group. 9 . The composition of claim 6 , wherein the ionic liquid is a nitrogen-containing ionic liquid, a phosphorus (P)-containing ionic liquid, or any combination thereof. 10 . The composition of claim 6 , wherein the ionic liquid contains a cation and an anion, the cation is an ammonium ion, an imidazolium ion, a piperidinium ion, a pyrrolidinium ion, a phosphonium ion, or any combination thereof, and the anion is a halogen ion, an acetate ion, a nitrate ion (NO 3 − ), a tetrafluoroborate ion (BF 4 − ), a hexafluorophosphate ion (PF 6 − ), a trifluoromethane sulfonate ion (Tf − ), a bis((trifluoromethyl)sulfonyl)imide ion (TFSI − ), or any combination thereof 11 . The composition of claim 6 , wherein a weight ratio of the photo-crosslinking agent to the ionic elastomer is 1:0.01 to 1:0.1. 12 . A method of preparing a solid electrolyte, the method comprising exposing the composition of claim 6 to ultraviolet (UV) rays. 13 . The method of claim 12 , further comprising forming a pattern by developing the UV-exposed composition for forming a solid electrolyte. 14 . A solid electrolyte prepared by using the composition of claim 6 . 15 . The solid electrolyte of claim 14 , wherein the solid electrolyte is stretchable. 16 . An electronic element comprising the solid electrolyte of claim 15 . 17 . The electronic element of claim 16 , wherein the electronic element is any one of an organic solar cell (OSC), an organic thin-film transistor (OTFT), an organic light-emitting diode (OLED), an organic photodiode sensor (OPD), a perovskite solar cell, a perovskite light-emitting diode, and a thermoelectric device.
Macromolecular compounds which are photodegradable, e.g. positive electron resists (G03F7/075 takes precedence; macromolecular quinonediazides G03F7/023) · CPC title
Azides · CPC title
Polyurethanes · CPC title
Exposure with X-ray radiation or corpuscular radiation, through a mask with a pattern opaque to that radiation · CPC title
Manufacturing or production processes characterised by the final manufactured product · CPC title
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