Method for etching high aspect ratio structures
US-12463053-B2 · Nov 4, 2025 · US
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Park Sangjun patents
Park Sangjun is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Park Sangjun |
| Total patents | 7 |
| First publication | Dec 14, 2017 |
| Latest publication | Nov 4, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Plasma etching in semiconductor processing
US-2025062131-A1 · Feb 20, 2025 · US
Method for etching high aspect ratio structures
US-2024332031-A1 · Oct 3, 2024 · US
Directional deposition in etch chamber
US-11742212-B2 · Aug 29, 2023 · US
Directional deposition in etch chamber
US-2022028697-A1 · Jan 27, 2022 · US
Line edge roughness improvement with photon-assisted plasma process
US-9859127-B1 · Jan 2, 2018 · US
Line edge roughness improvement with photon-assisted plasma process
US-2017358456-A1 · Dec 14, 2017 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 4 |
| Applied Materials Inc | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P50/242 | 7 |
| H10P50/283 | 5 |
| H01L21/3065 | 5 |
| H10P50/73 | 5 |
| H10P50/71 | 3 |