Deburring unit and cutting machine

Patent metadata

Field	Value
Publication number	US-2023398658-A1
Application number	US-202318324274-A
Country	US
Kind code	A1
Filing date	May 26, 2023
Priority date	Jun 9, 2022
Publication date	Dec 14, 2023
Grant date	—

Abstract

A deburring unit removes burrs from a workpiece, the burrs being formed along kerfs cut by a cutting blade. The deburring unit includes a chuck table that holds the workpiece on a holding surface, an ultrasonic horn that emits ultrasonic waves from a lower surface, the lower surface facing an upper surface of the workpiece, a water film forming nozzle configured to form a water film such that the upper surface of the workpiece is covered in its entirety with the water film, and a controller. The controller is configured to cause the ultrasonic horn to come into contact at its lower surface with the water film formed by supply of water from the water film forming nozzle, such that ultrasonic vibrations propagate to the water film and remove the burrs formed in the kerfs of the workpiece.

First claim

What is claimed is:

1 . A deburring unit for removing burrs from a workpiece with the burrs formed along kerfs cut by a cutting blade, comprising:
a chuck table that holds the workpiece on a holding surface thereof; an ultrasonic horn that emits ultrasonic waves from a lower surface thereof, the lower surface facing an upper surface of the workpiece held on the holding surface; a water film forming nozzle configured to supply water to the workpiece held on the holding surface and to form a water film such that the upper surface of the workpiece is covered in its entirety with the water film; and a controller, wherein the controller is configured to cause the ultrasonic horn to come into contact at the lower surface thereof with the water film formed with the water supplied from the water film forming nozzle and to cause ultrasonic vibrations to propagate to the water film, to thereby remove the burrs formed along the kerfs.

2 . The deburring unit according to claim 1 , wherein the ultrasonic horn is configured with a plurality of circular cylindrical horns integrally arranged in a direction parallel to the holding surface as seen in plan.

3 . A cutting machine comprising:
a cutting unit that cuts with a cutting blade a workpiece held on a holding surface of a chuck table; a moving mechanism that moves the chuck table in a cutting feed direction of the cutting blade; an ultrasonic horn having a lower surface that is facing an upper surface of the workpiece held on the holding surface of the chuck table, with a clearance therebetween; and a water film forming nozzle configured to supply water to the workpiece held on the holding surface and to form a water film such that the upper surface of the workpiece is covered in its entirety with the water film.

4 . The cutting machine according to claim 3 , wherein the ultrasonic horn is arranged beside the cutting blade in the cutting feed direction, and the water film forming nozzle is configured to also function as a cutting water nozzle that supplies cutting water to the cutting blade.

5 . The cutting machine according to claim 3 , further comprising:
a cleaning unit including a cleaning table that holds the workpiece obtained after cutting processing and a cleaning water nozzle that ejects cleaning water toward the workpiece held on the cleaning table, wherein the water film forming nozzle is configured to also function as the cleaning water nozzle.

6 . The cutting machine according to claim 3 , further comprising:
a transfer unit that loads and unloads the workpiece onto and from the chuck table, wherein the ultrasonic horn is disposed on the transfer unit.

Assignees

• Disco Corp

Inventors

• Qiu Xiaoming
• Tashino Fumiteru
• Kaneko Tomohiro

Classifications

• H10P72/33

  into and out of processing chamber · CPC title

• H10P72/0411

  for wet cleaning or washing · CPC title

• H10P52/00 Primary

  Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title

• B24C1/083 Primary

  Deburring · CPC title

• B08B3/12

  by sonic or ultrasonic vibrations · CPC title