Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus
US-2024234132-A1 · Jul 11, 2024 · US
Method for manufacturing an environmental barrier
US2023287563A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2023287563-A1 |
| Application number | US-202118246118-A |
| Country | US |
| Kind code | A1 |
| Filing date | Sep 20, 2021 |
| Priority date | Sep 29, 2020 |
| Publication date | Sep 14, 2023 |
| Grant date | — |
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- Title
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Abstract
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A method for producing a part having improved resistance to oxidation and high temperature-corrosion, includes the formation of an environmental barrier coating on an at least partially ceramic matrix composite material, the environmental barrier coating being formed by direct liquid injection-metal organic chemical vapor deposition.
First claim
Opening claim text (preview).
1 . A method for producing a part having improved resistance to oxidation and high temperature-corrosion, comprising forming an environmental barrier coating on an at least partially ceramic matrix composite material, said environmental barrier coating being formed by direct liquid injection-metal organic chemical vapor deposition. 2 . The method according to claim 1 , wherein the environmental barrier coating comprises a rare earth silicate and is formed at least from an alkoxysilane silicon oxide precursor and a rare earth beta-diketonate rare earth oxide precursor in the presence of an oxygen-supplying gas source. 3 . The method according to claim 1 , wherein the nature and/or the relative proportions of molecular precursors are modified during the formation of the environmental barrier coating so as to give it the environmental barrier coating a changing composition. 4 . The method according to claim 3 , wherein forming the environmental barrier coating comprises at least forming a first portion comprising a rare earth disilicate, and forming a second portion comprising a rare earth monosilicate over the first portion. 5 . The method according to claim 3 , wherein forming the environmental barrier coating comprises at least forming a first portion comprising a rare earth monosilicate, and forming a second portion comprising a rare earth disilicate over the first portion. 6 . The method according to claim 3 , wherein forming the environmental barrier coating comprises at least forming a first portion comprising a first rare earth silicate, and forming a second portion comprising a second rare earth silicate, different from the first rare earth, the first and second portions being superimposed. 7 . The method according to claim 1 , wherein a thickness of the environmental barrier coating is less than or equal to 1000 μm. 8 . The method according to claim 1 , wherein the method further comprises depositing a bonding coating comprising silicon on an external surface of the at least partially ceramic matrix composite material, and wherein the environmental barrier coating is deposited on said bonding coating. 9 . The method according to claim 8 , wherein the bonding coating is deposited by chemical vapor deposition. 10 . The method according to claim 1 , wherein a thermal crystallization treatment of the environmental barrier coating formed is also carried out. 11 . The method according to claim 1 , wherein the part is a turbomachine part.
Assignees
Inventors
Classifications
Coating · CPC title
Ceramic matrix composites [CMC] · CPC title
Coating; Surface treatment · CPC title
by chemical vapour deposition · CPC title
Protective coatings for blades · CPC title
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Frequently asked questions
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- What does patent US2023287563A1 cover?
- A method for producing a part having improved resistance to oxidation and high temperature-corrosion, includes the formation of an environmental barrier coating on an at least partially ceramic matrix composite material, the environmental barrier coating being formed by direct liquid injection-metal organic chemical vapor deposition.
- Who is the assignee on this patent?
- Safran Ceram, Centre Nat Rech Scient, Univ Bordeaux
- What technology area does this patent fall under?
- Primary CPC classification C23C16/401. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Thu Sep 14 2023 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).