Method of manufacture of single crystal synthetic diamond material
US-11643750-B2 · May 9, 2023 · US
US2023272551A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2023272551-A1 |
| Application number | US-202318143557-A |
| Country | US |
| Kind code | A1 |
| Filing date | May 4, 2023 |
| Priority date | Jul 6, 2018 |
| Publication date | Aug 31, 2023 |
| Grant date | — |
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A method of manufacturing synthetic diamond material using a chemical vapour deposition process, and a diamond obtained by such a method are described. The method comprises providing a freestanding synthetic single crystal diamond substrate wafer having a dislocation density of at least 107cm−2. The synthetic single crystal diamond substrate wafer is located over a substrate holder within a chemical vapour deposition reactor. Process gases are fed into the reactor, the process gases including a gas comprising carbon. Crack-free synthetic diamond material is grown on a surface of the single crystal diamond substrate wafer at a temperature of at least 900° C. to a thickness of at least 0.5 mm and with lateral dimensions of at least 4 mm by 4 mm.
Opening claim text (preview).
What is claimed is: 1 . A method of manufacturing synthetic single crystal diamond material using a chemical vapour deposition process, the method comprising: providing a freestanding synthetic single crystal diamond substrate wafer having a dislocation density of at least 10 7 cm −2 ; locating the synthetic single crystal diamond substrate wafer over a substrate holder within a chemical vapour deposition reactor; feeding process gases into the reactor, the process gases including a gas comprising carbon; growing synthetic diamond material on a surface of the single crystal diamond substrate wafer at a growth temperature of at least 900° C. to a thickness of at least 0.5 mm and with lateral dimensions of at least 4 mm by 4 mm such that the grown synthetic diamond material is crack free.
the substrate being of insulating material · CPC title
by irradiation or electric discharge · CPC title
Controlling or regulating (controlling or regulating in general G05) · CPC title
Diamond · CPC title
Diamond only · CPC title
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