Ultrasound horn

Patent metadata

Field	Value
Publication number	US-2023125043-A1
Application number	US-202117503343-A
Country	US
Kind code	A1
Filing date	Oct 17, 2021
Priority date	Oct 17, 2021
Publication date	Apr 20, 2023
Grant date	—

Abstract

An ultrasound horn is provided which vibrates a bonding tool, attached at a tip, in a plurality of directions with a simple structure. There is provided an ultrasound horn having: a longitudinal vibration generator; a horn portion; and a torsional vibration generator. The torsional vibration generator includes a body including a polygonal pillar portion, second layered elements in which a plurality of second piezoelectric elements are layered, and which are attached to side surfaces of the polygonal pillar portion, weights, and a pressure application ring which applies a pressure by pressing the second piezoelectric elements against the polygonal pillar portion via the weights.

First claim

1 . An ultrasound horn that is used for a bonding apparatus, the ultrasound horn comprising:
a longitudinal vibration generator inside of which a first layered element is attached, in which a plurality of first piezoelectric elements of a plate form which deform in a thickness direction when a voltage is applied are layered, and that generates an ultrasound vibration in a front-and-rear direction; a horn portion that extends from the longitudinal vibration generator toward a front side and on a front tip of which a bonding tool is attached; and a torsional vibration generator that extends from the longitudinal vibration generator toward a rear side, wherein the torsional vibration generator comprises: a body that extends from the longitudinal vibration generator toward the rear side, and that includes a polygonal pillar portion; two second layered elements in each of which a plurality of second piezoelectric elements of a plate form which shear-deform when a voltage is applied are layered, and that are respectively attached to respective side surfaces of the polygonal pillar portion in such a manner that a direction of layering is along a width direction orthogonal to the front-and-rear direction; weights that are respectively layered at outer sides in the width direction of the second layered elements; and a pressure application ring that surrounds the weights, the second layered elements, and the polygonal pillar portion, and that presses the plurality of second piezoelectric elements via the weights onto the polygonal pillar portion, to thereby apply a pressure in the thickness direction to the second piezoelectric elements.

2 . The ultrasound horn according to claim 1 , wherein
the second layered elements are attached to respective side surfaces of the polygonal pillar portion in such a manner that, when a high-frequency power is applied from a high-frequency power supply, the second layered elements shear-deform in an up-and-down direction orthogonal to the front-and-rear direction and to the width direction, and directions of the shear deformation are opposite from each other, and the second layered elements are also connected to the high-frequency power supply.

3 . The ultrasound horn according to claim 2 , wherein
in the second layered element, electrode plates are layered at respective ends and between the second piezoelectric elements, a plurality of the electrode plates are alternately connected to an output terminal and a ground terminal of the high-frequency power supply toward the direction of layering, the second piezoelectric elements are layered in such a manner that directions of polarization are alternately reversed, and the second layered elements are attached to respective side surfaces of the polygonal pillar portion in such a manner that the directions of polarization of the second piezoelectric elements placed at symmetric positions in the width direction with respect to the polygonal pillar portion are opposite in the up-and-down direction, and the electrode plates placed at symmetric positions in the width direction with respect to the polygonal pillar portion are connected to a same terminal of the high-frequency power supply.

4 . The ultrasound horn according to claim 2 , wherein
in the second layered element, electrode plates are layered at respective ends and between the second piezoelectric elements, a plurality of the electrode plates are alternately connected to an output terminal and a ground terminal of the high-frequency power supply toward the direction of layering, the second piezoelectric elements are layered in such a manner that directions of polarization are alternately reversed, and the second layered elements are attached to respective side surfaces of the polygonal pillar portion in such a manner that the directions of polarization of the second piezoelectric elements placed at symmetric positions in the width direction with respect to the polygonal pillar portion are identical to each other, and the electrode plates placed at symmetric positions in the width direction with respect to the polygonal pillar portion are connected to different terminals of the high-frequency power supply.

5 . The ultrasound horn according to claim 1 , wherein
the pressure application ring is formed from a shape memory alloy which contracts when heat is applied.

6 . The ultrasound horn according to claim 2 , wherein
the pressure application ring is formed from a shape memory alloy which contracts when heat is applied.

7 . The ultrasound horn according to claim 3 , wherein
the pressure application ring is formed from a shape memory alloy which contracts when heat is applied.

8 . The ultrasound horn according to claim 4 , wherein
the pressure application ring is formed from a shape memory alloy which contracts when heat is applied.

9 . The ultrasound horn according to claim 1 , wherein
the longitudinal vibration generator comprises: a casing which is a quadrangular frame element extending in the front-and-rear direction, and which has an opening which penetrates through in an up-and-down direction, which extends in the front-and-rear direction, and to which the first layered element is attached such that the direction of layering is along the front-and-rear direction; and a pressure application wedge which is attached between an end surface, in the front-and-rear direction, of the opening and the first layered element, and which applies a pressure in the thickness direction to the plurality of first piezoelectric elements.

10 . The ultrasound horn according to claim 9 , wherein
in the first layered element, other electrode plates are layered at respective ends and between the first piezoelectric elements, a plurality of the other electrode plates are alternately connected to an output terminal and a ground terminal of another high-frequency power supply toward a direction of layering, and the first piezoelectric elements are layered in such a manner that directions of polarization are alternately reversed.

11 . The ultrasound horn according to claim 9 , wherein
the pressure application ring is formed from a shape memory alloy which contracts when heat is applied.

12 . The ultrasound horn according to claim 10 , wherein
the pressure application ring is formed from a shape memory alloy which contracts when heat is applied.

13 . The ultrasound horn according to claim 2 , wherein
the longitudinal vibration generator comprises: a casing which is a quadrangular frame element extending in the front-and-rear direction, and which has an opening which penetrates through in the up-and-down direction, which extends in the front-and-rear direction, and to which the first layered element is attached such that the direction of layering is along the front-and-rear direction; and a pressure application wedge which is attached between an end surface, in the front-and-rear direction, of the opening and the first layered element, and which applies a pressure in the thickness direction to the plurality of first piezoelectric elements, in the first layered element, other electrode plates are layered at respective ends and between the first piezoelectric elements, a plurality of the other electrode plates are alternately connected to an output terminal and a ground terminal of another high-frequency power supply toward a direction of layering, and the first piezoelectric elements are layered in such a manner that directions of polarization are alternately reversed.

14 . The ultrasound horn according to claim 3 , wherein
the longitudinal vibration generator comprises: a cas

Assignees

• Shinkawa Kk

Inventors

• Munakata Hiroshi
• Ito Yuhei
• Ditri John
• TEHRANI Moe

Classifications

• H10W72/0711 Primary

  Apparatus therefor · CPC title

• H10W72/075

  of bond wires · CPC title

• B23K20/233

  without ferrous layer · CPC title

• B23K20/005 Primary

  Capillary welding · CPC title

• B23K2101/40

  Semiconductor devices · CPC title