Light detector, light detection system, lidar device, and mobile body

Patent metadata

Field	Value
Publication number	US-2023063540-A1
Application number	US-202217680251-A
Country	US
Kind code	A1
Filing date	Feb 24, 2022
Priority date	Aug 25, 2021
Publication date	Mar 2, 2023
Grant date	—

Abstract

According to one embodiment, a light detector includes a first region, a second region, and a lens group. The first region includes a plurality of elements arranged along a first direction and a second direction. The first direction and the second direction cross each other. Each of the elements includes a first semiconductor region of a first conductivity type, and a second semiconductor region located on the first semiconductor region. The second semiconductor region is of a second conductivity type. The second region is adjacent to the first region in the second direction. The second region has a different structure from the first region. The lens group is positioned on the first and second regions. The lens group includes a plurality of lenses located to correspond respectively to the elements. The first region, the second region, and the lens group are repeatedly provided in the second direction.

First claim

What is claimed is:

1 . A light detector, comprising:
a first region including a plurality of elements arranged along a first direction and a second direction, the first direction and the second direction crossing each other, each of the plurality of elements including
a first semiconductor region of a first conductivity type, and
a second semiconductor region located on the first semiconductor region, the second semiconductor region being of a second conductivity type;
a second region adjacent to the first region in the second direction, the second region having a different structure from the first region; and a lens group positioned on the first and second regions, the lens group including a plurality of lenses located to correspond respectively to the plurality of elements, the first region, the second region, and the lens group being repeatedly provided in the second direction.

2 . The light detector according to claim 1 , wherein
a length in the second direction of the lens group is greater than a length in the second direction of the first region.

3 . The light detector according to claim 1 , wherein
in one of a plurality of the lens groups, the plurality of lenses is linked to each other, and shapes of adjacent lenses of the plurality of lenses are different from each other.

4 . The light detector according to claim 1 , wherein
in one of a plurality of the lens groups, a shape of the plurality of lenses is symmetric in the second direction.

5 . The light detector according to claim 1 , wherein
in one of a plurality of the lens groups, a shape of at least one of the plurality of lenses is asymmetric in the second direction.

6 . The light detector according to claim 1 , wherein
in one of a plurality of the first regions, the plurality of elements includes a first element and a second element, the second element is adjacent to the first element, in one of a plurality of the lens groups, the plurality of lenses includes:
a first lens located to correspond to the first element; and
a second lens located to correspond to the second element, and
a distance in the second direction between a center of the first element and an apex of the first lens is greater than a distance in the second direction between a center of the second element and an apex of the second lens.

7 . The light detector according to claim 6 , wherein
a portion of the first lens is positioned on the second element, and at least a portion of the second lens is positioned on one of a plurality of the second regions adjacent to the one of the plurality of first regions.

8 . The light detector according to claim 6 , wherein
a length in the second direction of the second lens is greater than a length in the second direction of the first lens.

9 . The light detector according to claim 1 , wherein
in one of a plurality of the first regions, the plurality of elements include a first element, in one of a plurality of the lens groups, the plurality of lenses include a first lens provided corresponding to the first element, and an apex of the first lens is aligned with a center of the first element in the second direction.

10 . The light detector according to claim 1 , further comprising:
a first semiconductor layer of the first conductivity type; and a second semiconductor layer located on the first semiconductor layer, the second semiconductor layer being of the first conductivity type, a first-conductivity-type impurity concentration in the second semiconductor layer being less than a first-conductivity-type impurity concentration in the first semiconductor layer, a plurality of the first regions being located on the second semiconductor layer.

11 . The light detector according to claim 1 , wherein
each of a plurality of the second regions includes:
a third semiconductor region of the second conductivity type; and
a fourth semiconductor region located on the third semiconductor region, the fourth semiconductor region being of the first conductivity type.

12 . The light detector according to claim 10 , wherein
the second region includes a metal member and an insulating layer, the metal member is surrounded with the first and second semiconductor layers in the first and second directions, and the insulating layer is located between the first semiconductor layer and the metal member and between the second semiconductor layer and the metal member.

13 . The light detector according to claim 1 , further comprising:
a quenching part electrically connected to at least one of the plurality of second semiconductor regions.

14 . The light detector according to claim 13 , wherein
the quenching part includes an active quenching circuit, and at least a portion of the active quenching circuit is located in one of a plurality of the second regions.

15 . The light detector according to claim 1 , wherein
a surface area of an upper surface of the plurality of lenses included in one of a plurality of the lens groups is greater than 1.05 times and less than 4 times the square of a pitch in the second direction of the plurality of elements included in one of a plurality of the first regions.

16 . The light detector according to claim 1 , wherein
the first region, the second region, and the lens group also are repeatedly provided in the first direction.

17 . The light detector according to claim 1 , wherein
one of a plurality of the first regions includes an insulating part located around the plurality of elements in the first and second directions.

18 . The light detector according to claim 1 , wherein
one of the plurality of elements includes an avalanche photodiode.

19 . The light detector according to claim 18 , wherein the avalanche photodiode operates in a Geiger mode.

20 . A light detection system, comprising:
the light detector according to claim 1 ; and a distance measuring circuit calculating a time-of-flight of light by using an output signal of the light detector.

21 . A lidar device, comprising:
a light source irradiating light on an object; and the light detection system according to claim 20 detecting light reflected by the object.

22 . The lidar device according to claim 21 , further comprising:
an image recognition system generating a three-dimensional image based on an arrangement relationship of the light source and the light detector.

23 . A mobile body, comprising:
the lidar device according to claim 21 .

Assignees

• Toshiba Kk

Inventors

• Kwon Honam
• Shimizu Mariko
• Suzuki Kazuhiro

Classifications

• H10F39/8027

  Geometry of the photosensitive area · CPC title

• H10F30/225

  the potential barrier working in avalanche mode, e.g. avalanche photodiodes · CPC title

• H10F77/413

  directly associated or integrated with the devices, e.g. back reflectors (directly associated or integrated with photovoltaic cells H10F77/42) · CPC title

• H10F77/331

  for filtering or shielding light, e.g. multicolour filters for photodetectors · CPC title

• H10F39/8063 Primary

  Microlenses · CPC title