Dielectric coated lithium metal anode

Patent metadata

Field	Value
Publication number	US-2023056566-A1
Application number	US-202217976420-A
Country	US
Kind code	A1
Filing date	Oct 28, 2022
Priority date	Oct 28, 2019
Publication date	Feb 23, 2023
Grant date	—

Abstract

Methods for forming anode structures are provided and include transferring a flexible substrate a first deposition chamber arranged downstream from a first spool chamber, the first deposition chamber containing a first coating drum capable of guiding the flexible substrate past a first plurality of deposition units, and guiding the flexible substrate past the first plurality of deposition units while depositing a lithium metal film on the flexible substrate via the first plurality of deposition units. The method also includes transferring the flexible substrate from the first deposition chamber to a second deposition chamber, the second deposition chamber containing a second coating drum capable of guiding the flexible substrate past a second deposition unit containing a crucible capable of depositing ceramic on the lithium metal film, and guiding the flexible substrate past the crucible while depositing a ceramic protective film on the lithium metal film via the evaporation crucible.

First claim

1 . A method, comprising:
transferring a flexible substrate from a storage spool in a first spool chamber to a first deposition chamber arranged downstream from the first spool chamber, the first deposition chamber comprising a first coating drum capable of guiding the flexible substrate past a first plurality of deposition units; guiding the flexible substrate past the first plurality of deposition units while depositing a lithium metal film on the flexible substrate via the first plurality of deposition units; transferring the flexible substrate from the first deposition chamber to a second deposition chamber, the second deposition chamber comprising a second coating drum capable of guiding the flexible substrate past a second deposition unit comprising an evaporation crucible capable of depositing a ceramic protective film on the lithium metal film; and guiding the flexible substrate past the evaporation crucible while depositing a ceramic protective film on the lithium metal film via the evaporation crucible.

2 . The method of claim 1 , further comprising:
transferring the flexible substrate from the second deposition chamber to a second spool chamber; and winding the flexible substrate on a second spool positioned in the second deposition chamber.

3 . The method of claim 2 , further comprising transferring the flexible substrate through a connection chamber arranged downstream from the first deposition chamber and upstream from the second deposition chamber.

4 . The method of claim 1 , wherein the first plurality of deposition units comprises evaporation units capable of depositing the lithium metal film on the flexible substrate.

5 . The method of claim 4 , wherein the evaporation units are selected from a thermal evaporation unit, an electron-beam evaporation unit, or any combination thereof.

6 . The method of claim 5 , wherein the second deposition unit comprises a plurality of evaporation crucibles aligned in a first line perpendicular to a travel direction of the flexible substrate and capable of generating a cloud of evaporated material to be deposited on the flexible substrate.

7 . The method of claim 6 , wherein the second deposition unit further comprises a gas supply pipe capable of supplying a gas supply directed into the cloud of evaporated material and positioned between the plurality of evaporation crucibles and the second coating drum.

8 . The method of claim 1 , wherein the first plurality of deposition units comprises sputter deposition units capable of depositing the lithium metal film on the flexible substrate.

9 . A method, comprising:
transferring a flexible substrate from a storage spool in a first spool chamber to a first deposition chamber arranged downstream from the first spool chamber, the first deposition chamber comprising a first coating drum capable of guiding the flexible substrate past a first plurality of deposition units, wherein the flexible substrate comprises an anode film; guiding the flexible substrate past the first plurality of deposition units while depositing a lithium metal film on the anode film via the first plurality of deposition units; transferring the flexible substrate from the first deposition chamber to a second deposition chamber through a connection chamber, the second deposition chamber comprising a second coating drum capable of guiding the flexible substrate past a second deposition unit comprising an evaporation crucible; and guiding the flexible substrate past the evaporation crucible while depositing a ceramic protective film on the lithium metal film via the evaporation crucible.

10 . The method of claim 9 , wherein the evaporation units are selected from a thermal evaporation unit, an electron-beam evaporation unit, or any combination thereof.

11 . The method of any of claim 10 , wherein the flexible substrate comprises aluminum, copper, zinc, nickel, cobalt, manganese, chromium, stainless steel, or any combination thereof.

12 . The method of any of claim 11 , wherein the ceramic protective film is selected from porous aluminum oxide, porous-ZrO 2 , porous-HfO 2 , porous-SiO 2 , porous-MgO, porous-TiO 2 , porous-Ta 2 O 5 , porous-Nb 2 O 5 , porous-LiAlO 2 , porous-BaTiO 3 , ion-conducting garnet, anti-ion-conducting perovskites, porous glass dielectric, or any combination thereof.

13 . A method, comprising:
transferring a flexible substrate from a storage spool in a first spool chamber to a first deposition chamber arranged downstream from the first spool chamber, the first deposition chamber comprising a first coating drum capable of guiding the flexible substrate past a first plurality of deposition units; guiding the flexible substrate past the first plurality of deposition units while depositing a lithium metal film on the flexible substrate via the first plurality of deposition units; transferring the flexible substrate from the first deposition chamber to a second deposition chamber, the second deposition chamber comprising a second coating drum capable of guiding the flexible substrate past a second deposition unit capable of depositing a ceramic protective film on the lithium metal film; and guiding the flexible substrate past the second deposition unit while depositing the ceramic protective film on the lithium metal film.

14 . The method of claim 13 , further comprising:
transferring the flexible substrate from the second deposition chamber to a second spool chamber; and winding the flexible substrate on a second spool positioned in the second deposition chamber.

15 . The method of claim 14 , further comprising transferring the flexible substrate through a connection chamber arranged downstream from the first deposition chamber and upstream from the second deposition chamber.

16 . The method of claim 13 , wherein the first plurality of deposition units comprises evaporation units capable of depositing the lithium metal film on the flexible substrate.

17 . The method of claim 16 , wherein the evaporation units are selected from a thermal evaporation unit, an electron-beam evaporation unit, or any combination thereof.

18 . The method of claim 17 , wherein the second deposition unit comprises a plurality of evaporation crucibles aligned in a first line perpendicular to a travel direction of the flexible substrate and capable of generating a cloud of evaporated material to be deposited on the flexible substrate.

19 . The method of claim 18 , wherein the second deposition unit further comprises a gas supply pipe capable of supplying a gas supply directed into the cloud of evaporated material and positioned between the plurality of evaporation crucibles and the second coating drum.

20 . The method of claim 13 , wherein the first plurality of deposition units comprises sputter deposition units capable of depositing the lithium metal film on the flexible substrate.

Assignees

• Applied Materials Inc

Inventors

• Herle Subramanya P
• Ishikawa David Masayuki

Classifications

• H01M4/382

  Lithium (H01M4/405 takes precedence) · CPC title

• H01M4/1395 Primary

  of electrodes based on metals, Si or alloys · CPC title

• H01M4/0426

  Sputtering · CPC title

• H01M2004/027

  Negative electrodes · CPC title

• H01M4/0423

  Physical vapour deposition · CPC title