Ultra-thin ceramic coating on separator for batteries

Patent metadata

Field	Value
Publication number	US-11588209-B2
Application number	US-201816479988-A
Country	US
Kind code	B2
Filing date	Aug 21, 2018
Priority date	Aug 21, 2018
Publication date	Feb 21, 2023
Grant date	Feb 21, 2023

Abstract

Separators, high performance electrochemical devices, such as, batteries and capacitors, including the aforementioned separators, systems and methods for fabricating the same. In one implementation, a separator is provided. The separator comprises a polymer substrate (131), capable of conducting ions, having a first surface and a second surface opposing the first surface. The separator further comprises a first ceramic-containing layer (136), capable of conducting ions, formed on the first surface. The first ceramic-containing layer (136) has a thickness in arrange from about 1,000 nanometers to about 5000 nanometers. The separator further comprises a second ceramic-containing layer (138), capable of conducting ions, formed on the second surface. The second ceramic-containing layer (138) is a binder-free ceramic-containing layer and has a thickness in arrange from about 1 nanometer to about 1,000 nanometers.

First claim

The invention claimed is:

1. A method of forming a separator for a battery, comprising:
exposing a first material to be deposited on a microporous ion-conducting polymeric layer positioned in a processing region to an evaporation process, wherein the microporous ion-conducting polymeric layer has:
a first surface;
a second surface opposing the first surface; and
a first ceramic-containing layer, capable of conducting ions, formed on the first surface, wherein the first ceramic-containing layer is prepared by a slot-die technique or a doctor blade technique and has a thickness in a range from about 1,000 nanometers to about 5,000 nanometers;

reacting the evaporated first material with a reactive gas and/or plasma to deposit a second ceramic-containing layer, capable of conducting ions, on the second surface of the microporous ion-conducting polymeric layer, wherein the second ceramic-containing layer consists essentially of aluminum oxide and/or lithium aluminum oxide, is a binder-free ceramic-containing layer, and has a thickness in a range from about 1 nanometer to about 1,000 nanometers; and then
reacting an evaporated second material with a second reactive gas and/or plasma to deposit a third ceramic-containing layer, capable of conducting ions, on the second ceramic-containing layer, wherein the third ceramic-containing layer comprises silicon oxide, is binder-free and has a thickness in a range from about 1 nanometer to about 100 nanometers.

2. The method of claim 1 , wherein the first ceramic-containing layer comprises a material selected from porous aluminum oxide, porous-ZrO 2 , porous-HfO 2 , porous-SiO 2 , porous-MgO, porous-TiO 2 , porous-Ta 2 O 5 , porous-Nb 2 O 5 , porous-LiAlO 2 , porous-BaTiO 3 , ion-conducting garnet, anti-ion-conducting perovskites, or combinations thereof.

3. The method of claim 1 , wherein the first ceramic-containing layer comprises a binder.

4. The method of claim 1 , wherein the first material to be deposited is a metallic material comprising aluminum.

5. The method of claim 1 , wherein the first material to be evaporated is a metal oxide comprising lithium aluminum oxide.

6. The method of claim 1 , further comprising reacting an evaporated third material with a third reactive gas and/or plasma to deposit a fourth ceramic-containing layer, capable of conducting ions, on the third ceramic-containing layer, wherein the fourth ceramic-containing layer comprises zirconium oxide, is binder-free and has a thickness in a range from about 1 nanometer to about 100 nanometers.

7. The method of claim 1 , further comprising exposing the microporous ion-conducting polymeric layer to a cooling process prior to exposing the first material to the evaporation process.

8. The method of claim 7 , wherein the cooling process cools the microporous ion-conducting polymeric layer to a temperature of about −20° C. to about 22° C.

9. The method of claim 8 , wherein the cooling process cools the microporous ion-conducting polymeric layer to a temperature of about −10° C. to about 0° C.

10. The method of claim 1 , wherein the reactive gas is an oxygen-containing gas selected from oxygen (O 2 ), ozone, oxygen radicals, or combinations thereof.

11. The method of claim 1 , wherein the plasma is an oxygen-containing plasma.

12. The method of claim 1 , wherein the evaporation process is a thermal evaporation process or an electron beam evaporation process.

13. The method of claim 1 , wherein the evaporation process comprises exposing the first material to be deposited to a temperature of about 1,300° C. to about 1,600° C.

14. The method of claim 1 , wherein the microporous ion-conducting polymeric comprises polyethylene or polypropylene.

15. The method of claim 1 , wherein the microporous ion-conducting polymeric has a thickness of about 1 μm to about 25 μm.

16. A method of forming a separator for a battery, comprising:
exposing a microporous ion-conducting polymeric layer to a first cooling process;
exposing a first material to be deposited on the microporous ion-conducting polymeric layer positioned in a processing region to an evaporation process, wherein the microporous ion-conducting polymeric layer has:
a first surface;
a second surface opposing the first surface; and
a first ceramic-containing layer, capable of conducting ions, formed on the first surface, wherein the first ceramic-containing layer is prepared by a slot-die technique or a doctor blade technique and has a thickness in a range from about 1,000 nanometers to about 5,000 nanometers;

reacting the evaporated first material with a reactive gas and/or plasma to deposit a second ceramic-containing layer, capable of conducting ions, on the second surface of the microporous ion-conducting polymeric layer, wherein the second ceramic-containing layer consists essentially of aluminum oxide and/or lithium aluminum oxide;
exposing the microporous ion-conducting polymeric layer to a second cooling process after depositing the second ceramic-containing layer; and then reacting an evaporated second material with a second reactive gas and/or plasma to deposit a third ceramic-containing layer, capable of conducting ions, on the second ceramic-containing layer, wherein the third ceramic-containing layer comprises silicon oxide and is binder-free.

17. The method of claim 16 , wherein the second ceramic-containing layer has a thickness in a range from about 1 nanometer to about 1,000 nanometers and the third ceramic-containing layer has a thickness in a range from about 1 nanometer to about 100 nanometers.

18. The method of claim 16 , further comprising exposing the microporous ion-conducting polymeric layer to a third cooling process after depositing the third ceramic-containing layer.

19. The method of claim 18 , further comprising reacting an evaporated third material with a reactive gas and/or plasma to deposit a fourth ceramic-containing layer, capable of conducting ions, on the third ceramic-containing layer, wherein the fourth ceramic-containing layer comprises zirconium oxide, is binder-free, and has a thickness in a range from about 1 nanometer to about 100 nanometers.

20. A method of forming a separator for a battery, comprising:
exposing a first material to be deposited on a microporous ion-conducting polymeric layer positioned in a processing region to an evaporation process, wherein the microporous ion-conducting polymeric layer has:
a first surface;
a second surface opposing the first surface; and
a first ceramic-containing layer, capable of conducting ions, formed on the first surface, wherein the first ceramic-containing layer is prepared by a slot-die technique or a doctor blade technique and has a thickness in a range from about 1,000 nanometers to about 5,000 nanometers;

reacting the evaporated first material with a reactive gas and/or plasma to deposit a second ceramic-containing layer, capable of conducting ions, on the second surface of the microporous ion-conducting polymeric layer, wherein the second ceramic-containing layer comprises porous aluminum oxide, is a binder-free ceramic-containing layer, and has a thickness in a range from about 1 nanometer to about 1,000 nanometers; then
reacting an evaporated second material with a second reactive gas and/or plasma to deposit a third ceramic-containing layer, capable of conducting ions, on the second ceramic-containing layer, wherein the third ceramic-containing layer comprises porous silicon oxide, is binder-free and has a thickness in a range from about 1 nanometer to about

Assignees

• Applied Materials Inc

Inventors

• Wang Connie P
• Si Wen
• Sim Yin Let
• Dieter Torsten
• Trassl Roland
• Herle Subramanya P
• Daube Christoph
• Zhu Jian
• Cushing James

Classifications

• H01M50/409

  Separators, membranes or diaphragms characterised by the material · CPC title

• H01M50/403 Primary

  Manufacturing processes of separators, membranes or diaphragms · CPC title

• H01M10/052

  Li-accumulators · CPC title

• H01M50/451 Primary

  comprising layers of only organic material and layers containing inorganic material · CPC title

• Y02E60/10

  Energy storage using batteries · CPC title