Electrochemical deposition apparatus set and electrochemical deposition method

Patent metadata

Field	Value
Publication number	US-2022170152-A1
Application number	US-202117488234-A
Country	US
Kind code	A1
Filing date	Sep 28, 2021
Priority date	Nov 27, 2020
Publication date	Jun 2, 2022
Grant date	—

Abstract

The present disclosure provides an electrochemical deposition apparatus set. The electrochemical deposition apparatus set includes: an electrochemical deposition device configured to form an electrochemical deposition film layer on an area to be coated of a substrate; an antioxidation treatment device located on a side of the electrochemical deposition device and configured to performing antioxidation treatment on the substrate formed with the electrochemical deposition film layer; a transmission device configured to carry the substrate and drive the substrate to move at least from the electrochemical deposition device to the antioxidation treatment device.

First claim

What is claimed is:

1 . An electrochemical deposition apparatus set, comprising:
an electrochemical deposition device configured to form an electrochemical deposition film layer on an area to be coated of a substrate; an antioxidation treatment device located on a side of the electrochemical deposition device and configured to perform antioxidation treatment on the substrate formed with the electrochemical deposition film layer; and a transmission device configured to carry the substrate and drive the substrate to move at least from the electrochemical deposition device to the antioxidation treatment device.

2 . The electrochemical deposition apparatus set according to claim 1 , wherein the antioxidation treatment device comprises:
an antioxidation tank; a first liquid collection tank having a first liquid inlet in communication with a supply device supplying an antioxidant solution, and a second liquid inlet in communication with a liquid outlet of the antioxidation tank; a first filtering mechanism having a liquid inlet in communication with the liquid outlet of the first liquid collection tank, wherein the first filtering mechanism is configured to filter the received antioxidant solution; and a plurality of first sprayers arranged in the antioxidation tank, the first sprayers being in communication with the liquid outlet of the first filtering mechanism, and configured to spray the filtered antioxidant solution toward the substrate formed with the electrochemical deposition film layer; wherein the antioxidant solution chemically reacts with the electrochemical deposition film layer to form a protective layer on a surface of the electrochemical deposition film layer.

3 . The electrochemical deposition apparatus set according to claim 1 , further comprising a pickling device configured to spray a pickling solution toward the area to be coated of the substrate; and
wherein the transmission device is further configured to drive the substrate to move from the pickling device to the electrochemical deposition device.

4 . The electrochemical deposition apparatus set according to claim 3 , wherein the pickling device comprises:
a pickling tank; a second liquid collection tank having a first liquid inlet in communication with a supply device supplying a pickling solution, and a second liquid inlet in communication with a liquid outlet of the pickling device; a second filtering mechanism having a liquid inlet in communication with the liquid outlet of the second liquid collection tank, and configured to filter the received pickling solution; and a plurality of second sprayers arranged in the pickling tank, the second sprayers being in communication with the liquid outlet of the second filtering mechanism, and configured to spray the filtered pickling solution toward the substrate.

5 . The electrochemical deposition apparatus set according to claim 1 , further comprising: a first cleaning device located on a side of the antioxidation treatment device close to the electrochemical deposition device and configured to spray a first cleaning liquid toward the substrate formed with the electrochemical deposition film layer; and
wherein the transmission device is configured to drive the substrate to move from the electrochemical deposition device to the first cleaning device, and from the first cleaning device to the antioxidation treatment device.

6 . The electrochemical deposition apparatus set according to claim 5 , further comprising: a second cleaning device and a drying device;
wherein the second cleaning device is located on a side of the antioxidation treatment device away from the first cleaning device, and is configured to spray a second cleaning liquid toward the substrate that has been subjected to the antioxidation treatment; wherein the drying device is configured to dry the substrate that has been cleaned by the second cleaning liquid; and wherein the transmission device is further configured to drive the substrate to move from the antioxidation treatment device to the second cleaning device and the drying device in sequence.

7 . The electrochemical deposition apparatus set according to claim 1 ,
wherein the electrochemical deposition device and the antioxidation treatment device are arranged along a first direction; wherein the transmission device comprises: guide rails, a bracket, a grasping mechanism, and a driving mechanism; and wherein the guide rails are arranged on opposite sides of the electrochemical deposition device and extend along the first direction; the bracket is slidably arranged on the guide rails; the grasping mechanism is arranged on the bracket and configured to pick and place the substrate; and the driving mechanism is connected to the bracket and configured to drive the bracket to move along the guide rails so as to drive the substrate to move at least from the electrochemical deposition device to the antioxidation treatment device.

8 . The electrochemical deposition apparatus set according to claim 7 ,
wherein the transmission device further comprises a carrier configured to carry the substrate; and wherein the grasping mechanism is configured to pick and place the carrier to realize the pick and place of the substrate.

9 . The electrochemical deposition apparatus set according to claim 7 ,
wherein the bracket comprises: a first upright portion, a second upright portion, and a lifting beam connected between the first upright portion and the second upright portion; wherein the first upright portion and the second upright portion are respectively arranged on the guide rails on opposite sides of the electrochemical deposition device, and the grasping mechanism is arranged on the lifting beam.

10 . The electrochemical deposition apparatus set according to claim 8 , further comprising: a feeding device and a loading device;
wherein the feeding device is configured to receive the substrate to be electrochemically deposited, turn the received substrate from a horizontal state to an upright state, and deliver the substrate to the loading device; and wherein the loading device is located between the feeding device and the electrochemical deposition device, and configured to fix the substrate in the upright state onto the carrier.

11 . The electrochemical deposition apparatus set according to claim 8 , further comprising: a storage rack located on a side of the electrochemical deposition device away from the antioxidation treatment device, and configured to store the carrier.

12 . An electrochemical deposition method, comprising:
performing electrochemical deposition on a substrate to be electrochemically deposited, so as to form an electrochemical deposition film layer on an area to be coated of the substrate; and performing antioxidation treatment on the substrate formed with the electrochemical deposition film layer.

13 . The electrochemical deposition method according to claim 12 ,
wherein the step of performing electrochemical deposition on the substrate to be electrochemically deposited, and the step of performing antioxidation treatment on the substrate formed with the electrochemical deposition film layer are implemented when the substrate is in an upright state.

14 . An electrochemical deposition method, the method comprising:
spraying a pickling solution toward a substrate to be electrochemically deposited; performing electrochemical deposition on the substrate sprayed with the pickling solution, so as to form an electrochemical deposition film layer on an area to be coated of the substrate; cleaning the substrate formed with the electrochemic

Assignees

• Boe Technology Group Co Ltd

Inventors

• Yuan Guangcai
• Yan Junwei
• Wang Chengfei
• Zhang Guocai
• Dong Shihao
• Sun Shaodong
• Qi Qi
• Cao Zhanfeng

Classifications

• H10P72/3304

  characterised by movements or sequence of movements of transfer devices · CPC title

• H10P72/3211

  Changing orientation of the substrate, e.g. from a horizontal position to a vertical position · CPC title

• H10P72/3202

  Mechanical details, e.g. rollers or belts · CPC title

• H10P72/32

  between different workstations · CPC title

• C25D17/00 Primary

  Constructional parts, or assemblies thereof, of cells for electrolytic coating · CPC title