Process cooling-water isolation

Patent metadata

Field	Value
Publication number	US-2022165549-A1
Application number	US-202017598783-A
Country	US
Kind code	A1
Filing date	Mar 26, 2020
Priority date	Mar 28, 2019
Publication date	May 26, 2022
Grant date	—

Abstract

In one embodiment, the disclosed apparatus is a process cooling-water isolation system used in a process tool. The system includes an isolation valve coupled between a water supply and an inlet of one or more components in a process-module water-cooling circuit. An open device allows cooling water to flow to the one or more components, while a close device prevents cooling water from flowing to the one or more components. At least one water-leak sensor is coupled to the close device to detect a water leak within the process tool. A check valve having an inlet port is coupled to an outlet of the one or more components, and an outlet port is coupled to a water-return reservoir. The check valve prevents water from back-flowing from the water-return reservoir into the one or more components. Other apparatuses and methods are disclosed.

First claim

What is claimed is:

1 . A process cooling-water isolation system used in a process tool, the system comprising:
an isolation valve having an inlet port and an outlet port, the inlet port is configured to be coupled to a water supply, and the outlet port is configured to be coupled to an inlet of one or more components in a process-module water-cooling circuit; an open device coupled to the isolation valve to open the isolation valve to allow cooling water to flow to the one or more components in the process-module water-cooling circuit; a close device coupled to the isolation valve to close the isolation valve to prevent cooling water from flowing to the one or more components in the process-module water-cooling circuit; at least one water-leak sensor coupled to the close device, the at least one water-leak sensor to detect a water leak within the process tool; and a check valve having an inlet port and an outlet port, the inlet port configured to be coupled to an outlet of one or more components in the process-module water-cooling circuit, the outlet port configured to be coupled to a water-return reservoir, the check valve to prevent water from back-flowing from the water-return reservoir into the one or more components in the process-module water-cooling circuit.

2 . The process cooling-water isolation system of claim 1 , further comprising a water-leak sensor input module disposed between the water-leak sensor and the close device, the water-leak sensor input module to receive a signal from the at least one water-leak sensor and transmit the signal to the close device to close the isolation valve.

3 . The process cooling-water isolation system of claim 1 , wherein the at least one water-leak sensor includes multiple instantiations in each of the one or more components in the process-module water-cooling circuit.

4 . The process cooling-water isolation system of claim 1 , wherein the at least one water-leak sensor comprises a water-sensitive cable formed in proximity to at least some of the one or more components in the process-module water-cooling circuit.

5 . The process cooling-water isolation system of claim 1 , wherein the check valve has a cracking pressure of greater than about 6.9 kPa.

6 . The process cooling-water isolation system of claim 1 , wherein the one or more components in the process-module water-cooling circuit includes at least one component selected from components including a radio-frequency generator, a remote plasma-chamber, a top plate, a spindle, a pedestal, and a chamber.

7 . The process cooling-water isolation system of claim 1 , wherein the one or more components in the process-module water-cooling circuit are arranged in series with one another.

8 . The process cooling-water isolation system of claim 1 , wherein the one or more components in the process-module water-cooling circuit are arranged in parallel with one another.

9 . The process cooling-water isolation system of claim 1 , wherein the one or more components in the process-module water-cooling circuit are arranged in a series-parallel arrangement with one another.

10 . The process cooling-water isolation system of claim 1 , wherein the open device, the close device, and the isolation valve are coupled to one another electrically.

11 . The process cooling-water isolation system of claim 1 , wherein the open device, the close device, and the isolation valve are coupled to one another pneumatically.

12 . The process cooling-water isolation system of claim 1 , wherein the open device, the close device, and the isolation valve are coupled to one another hydraulically.

13 . The process cooling-water isolation system of claim 1 , wherein the one or more components in the process-module water-cooling circuit are contained within a process module of the process tool.

14 . A method of operating a process cooling-water isolation system for a process tool, the method comprising:
monitoring for a water leak within the process tool; based on a determination that a water leak has been detected:
shutting down the process tool;
sounding an alarm; and
closing an isolation valve supplying cooling water to the process tool;
based on a determination that a water leak has not been detected:
selecting from opening the isolation valve and continuing to leave the valve open if previously opened; and
continuing to monitor for water leaks.

15 . The method of claim 14 , further comprising, based on the determination that the water leak has occurred:
determining one or more locations where the leak has occurred; and repairing the leak.

16 . The method of claim 15 , further comprising:
verifying that the leak has been repaired; and based on a determination that the leak has been repaired, continuing to monitor for water leaks within the process tool.

17 . A machine-readable storage medium storing a set of instructions that, when executed by a machine, cause the machine to perform operations for operating a process cooling-water isolation system for a process tool, the operations comprising:
monitoring for a water leak within the process tool; based on a determination that a water leak has been detected:
shutting down the process tool;
sounding an alarm; and
closing an isolation valve supplying cooling water to the process tool;
based on a determination that a water leak has not been detected:
selecting from opening the isolation valve and continuing to leave the valve open if previously opened; and
continuing to monitor for water leaks.

Assignees

• Lam Res Corp

Inventors

• Sonti Sreeram

Classifications

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0434 Primary

  mainly by convection · CPC title

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• G01M3/165

  by means of cables or similar elongated devices, e.g. tapes · CPC title

• H01J37/32357

  Generation remote from the workpiece, e.g. down-stream · CPC title