Anisotropic conductive sheet, electrical inspection apparatus, and electrical inspection method

Patent metadata

Field	Value
Publication number	US-2022151069-A1
Application number	US-202017434458-A
Country	US
Kind code	A1
Filing date	Feb 28, 2020
Priority date	Feb 28, 2019
Publication date	May 12, 2022
Grant date	—

Abstract

This anisotropic conductive sheet has: an insulation layer that has a first surface and a second surface and that is formed of a first resin composition; a plurality of resinous columns that are formed of a second resin composition and that are disposed so as to extend in the thickness direction within the insulation layer; and a plurality of conductive layers that are disposed between the insulation layer and the plurality of resinous columns and that are exposed outside the second surface and the first surface.

First claim

1 . An anisotropic conductive sheet, comprising:
an insulation layer including a first surface and a second surface, and comprising a first resin composition; a plurality of columnar resins disposed to extend in a thickness direction in the insulation layer, and comprising a second resin composition; and a plurality of conductive layers disposed between the plurality of columnar resins and the insulation layer, and exposed to outside of the first surface and the second surface.

2 . The anisotropic conductive sheet according to claim 1 , wherein each of the plurality of conductive layers is disposed to surround a side surface of each of the plurality of columnar resins.

3 . The anisotropic conductive sheet according to claim 1 , wherein each of the plurality of conductive layers is further disposed on an end surface of each of the plurality of columnar resins on a first surface side.

4 . The anisotropic conductive sheet according to claim 3 , wherein each of the plurality of conductive layers is further disposed on an end surface of each of the plurality of columnar resins on a second surface side.

5 . The anisotropic conductive sheet according to claim 3 , further comprising an electrolyte layer disposed on each of the plurality of conductive layers on the end surface on the first surface side.

6 . The anisotropic conductive sheet according to claim 5 , wherein the electrolyte layer includes a lubricant.

7 . The anisotropic conductive sheet according to claim 6 , wherein the lubricant includes alkyl sulfonate metal salt.

8 . The anisotropic conductive sheet according to claim 1 , wherein a glass transition temperature of the second resin composition is 120° C. or above.

9 . The anisotropic conductive sheet according to claim 1 , wherein a storage modulus of the second resin composition at 25° C. is 1.0×10 6 to 1.0×10 10 Pa.

10 . The anisotropic conductive sheet according to claim 9 , wherein the storage modulus of the second resin composition at 25° C. is 1.0×10 8 to 1.0×10 10 Pa.

11 . The anisotropic conductive sheet according to claim 1 , wherein a storage modulus of the first resin composition at 25° C. is lower than a storage modulus of the second resin composition at 25° C.

12 . The anisotropic conductive sheet according to claim 1 , wherein the second resin composition is a conductive resin composition.

13 . The anisotropic conductive sheet according to claim 1 , further comprising a plurality of bonding layers, each of which is disposed at least at a part between the plurality of conductive layers and the insulation layer.

14 . The anisotropic conductive sheet according to claim 13 , wherein a thickness of the bonding layer is smaller than a thickness of each of the plurality of conductive layers.

15 . The anisotropic conductive sheet according to claim 13 , wherein the bonding layer is disposed to surround each of the plurality of conductive layers.

16 . The anisotropic conductive sheet according to claim 13 , wherein the bonding layer includes a polycondensation product of alkoxysilane or its oligomer.

17 . The anisotropic conductive sheet according to claim 13 ,
wherein the bonding layer comprises a third resin composition; and wherein a glass transition temperature of the third resin composition is higher than a glass transition temperature of the first resin composition.

18 . The anisotropic conductive sheet according to claim 17 , wherein the glass transition temperature of the third resin composition is 150° C. or above.

19 . The anisotropic conductive sheet according to claim 1 ,
wherein the insulation layer includes: a first insulation layer including the first surface, and comprising the first resin composition, and a second insulation layer including the second surface, and comprising a fourth resin composition; wherein a probe tack value at 25° C. of the second surface of the second insulation layer is higher than a probe tack value of the first surface of the first insulation layer, the probe tack value being a value that is measured in accordance with ASTM D2979:2016; and wherein the probe tack value of the second insulation layer is 3N/5 mmφ or greater.

20 . The anisotropic conductive sheet according to claim 19 , wherein a storage modulus of the fourth resin composition at 25° C. is lower than a storage modulus of the first resin composition at 25° C.

21 . The anisotropic conductive sheet according to claim 19 , wherein a storage modulus of the fourth resin composition is 1.0×10 4 to 1.0×10 6 Pa.

22 . The anisotropic conductive sheet according to claim 19 , wherein a glass transition temperature of the fourth resin composition is lower than a glass transition temperature of the first resin composition.

23 . The anisotropic conductive sheet according to claim 22 , wherein the glass transition temperature of the fourth resin composition is −40° C. or below.

24 . The anisotropic conductive sheet according to claim 19 , wherein a ratio T1/T2 of a thickness T1 of the first insulation layer and a thickness T2 of the second insulation layer is 4/6 to 9/1.

25 . The anisotropic conductive sheet according to claim 19 , wherein G2/(G1+G4) is 9.0 to 9.0×10 4 , where G1 is a storage modulus of the first resin composition at 25° C., G2 a storage modulus of the second resin composition at 25° C., and G4 a storage modulus of the fourth resin composition at 25° C.

26 . The anisotropic conductive sheet according to claim 19 , wherein G2/G1 is 10.0 to 1.0×10 5 , and/or G2/G4 is 1.0×10 2 to 1.0×10 6 , where G1 is a storage modulus of the first resin composition at 25° C., G2 a storage modulus of the second resin composition at 25° C., and G4 a storage modulus of the fourth resin composition at 25° C.

27 . The anisotropic conductive sheet according to claim 1 , wherein an area of an end surface of each of the plurality of columnar resins on a first surface side is smaller than an area of an end surface of each of the plurality of columnar resins on a second surface side.

28 . The anisotropic conductive sheet according to claim 1 , wherein a center-to-center distance of the plurality of columnar resins on a first surface side is 5 to 55 μm.

29 . The anisotropic conductive sheet according to claim 1 ,
wherein the anisotropic conductive sheet is configured to be used for an electrical testing of an inspection object; and the inspection object is disposed on the first surface.

30 . An electrical testing apparatus, comprising:
an inspection substrate including a plurality of electrodes; and the anisotropic conductive sheet according to claim 1 disposed on a surface of the inspection substrate where the plurality of electrodes is disposed.

31 . An electrical testing method, comprising:
stacking an inspection substrate including a plurality of electrodes and an inspection object including a terminal through the anisotropic conductive sheet according to claim 1 to electrically connect the plurality of electrodes of the inspection substrate and the terminal of the inspection object through the anisotropic conductive sheet.

Assignees

• Mitsui Chemicals Inc

Inventors

• Koyama Taichi
• Nishiura Katsunori
• Yamada Daisuke

Classifications

• G01R1/07314

  the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support (on an elastic support, e.g. a film, G01R1/0735) · CPC title

• H05K2201/0162

  Silicon containing polymer, e.g. silicone · CPC title

• H05K1/036

  Multilayers with layers of different types · CPC title

• H05K3/386

  by the use of an organic polymeric bonding layer, e.g. adhesive · CPC title

• H05K2201/0116

  Porous, e.g. foam · CPC title