Wafer dicing from wafer backside and front side
US-9224650-B2 · Dec 29, 2015 · US
US2022093903A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2022093903-A1 |
| Application number | US-202117481697-A |
| Country | US |
| Kind code | A1 |
| Filing date | Sep 22, 2021 |
| Priority date | Sep 18, 2020 |
| Publication date | Mar 24, 2022 |
| Grant date | — |
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A process for delineating a population of electrode structures in a web is disclosed. The web has a down-web direction, a cross-web direction, an electrochemically active layer, and an electrically conductive layer. The process includes laser machining the web in at least the cross-web direction to delineate members of the electrode structure population in the web without releasing the delineated members from the web and forming an alignment feature in the web that is adapted for locating each delineated member of the electrode structure population in the web.
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What is claimed is: 1 . A process for delineating a population of electrode structures in a web, the web comprising an electrically conductive layer having opposing front and back surfaces and an electrochemically active material layer on the front surface, the back surface, or on both of the front and back surfaces, the web having a down-web direction and a cross-web direction, the down-web and cross-web directions being orthogonal to each other, the process comprising: controlling a tension of the web in the down-web direction while forming a series of weakened tear patterns in the web in the down-web direction, the cross-web direction, or each of the cross-web and down-web directions that delineate members of the electrode structure population without releasing the delineated members from the web, wherein the delineated members are individually bounded, at least in part, by a member of the series of weakened tear patterns that is adapted to facilitate separation of delineated members, individually, from the web by an application of a force, and forming a series of alignment features in the web that are disposed in the cross-web or down-web direction relative to the delineated members, the alignment features being adapted for locating delineated members of the electrode structure population, individually, in the web. 2 . The process of claim 1 , wherein the series of weakened tear patterns, the series of alignment features, or the series of weakened tear patterns and the series of alignment features are formed with a laser. 3 . The process of claim 1 , wherein the controlling the tension of the web is performed using one or more rollers. 4 . The process of claim 1 , wherein the electrochemically active material layer is on only one of the front and back surfaces of the electrically conductive layer. 5 . The process of claim 1 , wherein the electrochemically active material layer is on both of the front and back surfaces of the electrically conductive layer. 6 . The process of claim 1 , wherein the delineated members of the electrode structure population have a length, L E , a width W E , and a height, H E , wherein W E , is measured in a direction that is orthogonal to the front and back surfaces of the web and to the down-web and cross-web directions and: (i) L E is measured in the cross-web direction and H E is measured in the down-web direction or (ii) L E is measured in the down-web direction and H E is measured in the cross-web direction and wherein a ratio of L E to each of W E and H E is at least 5:1 (that is, the ratio of L E to W E is at least 5:1, respectively and the ratio of L E to H E is at least 5:1, respectively). 7 . The process of claim 6 , wherein a ratio of H E to W E is at least 0.4:1, respectively. 8 . The process of claim 1 , wherein the electrically conductive layer comprises a material suitable for use as a positive electrode current collector layer or a negative electrode current collector. 9 . The process of claim 1 , wherein the electroactive material layer comprises a cathodically active material. 10 . The process of claim 1 , wherein controlling the tension of the web comprises maintaining a tension on the web of 500 gram force or less. 11 . The process of claim 1 wherein the electrochemically active material layer(s) comprise an anodically active material. 12 . A process for delineating a population of electrode structures in a web, the web comprising an electrically conductive layer having opposing front and back surfaces and an electrochemically active material layer on the front surface, the back surface, or on both of the front and back surfaces, the web having a down-web direction and a cross-web direction, the down-web and cross-web directions being orthogonal to each other, the process comprising: supporting a portion of the web on a support surface, the support surface defining an opening; forming a series of weakened tear patterns in the web in the down-web direction, the cross-web direction, or each of the cross-web and down-web directions that delineate members of the electrode structure population without releasing the delineated members from the web, wherein the delineated members are individually bounded, at least in part, by a member of the series of weakened tear patterns that is adapted to facilitate separation of delineated members, individually, from the web by an application of a force, and forming a series of alignment features in the web that are disposed in the cross-web or down-web direction relative to the delineated members, the alignment features being adapted for locating delineated members of the electrode structure population, individually, in the web, wherein at least one of the forming the weakened tear patterns and the forming the series of alignment features is performed on the portion of the web located over the opening defined in the support surface. 13 . The process of claim 12 , wherein the at least one of the forming the weakened tear patterns and the forming the series of alignment features comprises forming a plurality of cuts and perforations through the web. 14 . The process of claim 12 , wherein the forming the weakened tear patterns and the forming the series of alignment features comprises laser machining and the machined web has a strength of 10% to 75% of a strength of unmachined web in the web direction. 15 . The process of claim 14 , wherein the machined web has a strength of 5% to 30% of the strength of unmachined web in the cross-web direction. 16 . The process of claim 14 , wherein the laser machining comprises forming a series of outer perforations and a series of inner perforations, the outer perforations having a lower rupture strength than the inner perforations. 17 . The process of claim 12 , wherein the support surface comprises aluminum. 18 . The process of claim 12 , further comprising applying a vacuum to the web during the forming the weakened tear patterns and the forming the series of alignment features. 19 . The process of claim 12 , wherein the support surface comprises a plurality of openings, and the forming the weakened tear patterns and the forming the series of alignment features is performed on respective portions of the web located over different ones of the plurality of openings. 20 . The process of claim 12 , wherein the forming the weakened tear patterns and the forming the series of alignment features comprises laser machining and wherein the process further comprises applying a tension to the web in at least one of the cross-web direction prior to the laser machining or to the web in the down-web direction during the laser machining. 21 . The process of claim 20 , further comprising leaving an unmachined portion of the web between the alignment features and an outermost edge of the web in the cross-web direction. 22 . The process of claim 20 , further comprising contacting a rotating brush against the web after the laser machining. 23 . A process for delineating a population of electrode structures or electrode separator structures in a web, the web comprising a down-web direction, a cross-web direction orthogonal to the down-web direction, and an electrically insulating layer, the process comprising: controlling a portion of the web to be laser machined to be within about +/−100 microns of a laser focal point of a laser beam, laser machining the portion of the web in at least one of the cross-web dire
Manufacturing or production processes characterised by the final manufactured product · CPC title
Construction or manufacture · CPC title
Insulating · CPC title
Conductive · CPC title
wherein at least one of the layers is non-metallic · CPC title
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