Flexible sensor

Patent metadata

Field	Value
Publication number	US-2022082458-A1
Application number	US-202117533293-A
Country	US
Kind code	A1
Filing date	Nov 23, 2021
Priority date	May 30, 2019
Publication date	Mar 17, 2022
Grant date	—

Abstract

A flexible sensor includes a substrate having flexibility; and a sensor element provided on the substrate, wherein the sensor element includes a transistor having a gate electrode, a source electrode, and a drain electrode; and a variable resistance portion connected to either of the gate electrode, the source electrode, and the drain electrode, and the variable resistance portion has a resistance value changeable due to a strain, and wherein the variable resistance portion includes an extension portion extending in a direction.

First claim

What is claimed is:

1 . A flexible sensor, comprising:
a substrate having flexibility; and a sensor element provided on the substrate, wherein the sensor element comprising:
a transistor having a gate electrode, a source electrode, and a drain electrode; and
a variable resistance portion connected to either of the gate electrode, the source electrode, and the drain electrode, and the variable resistance portion has a resistance value changeable due to a strain, and
wherein the variable resistance portion includes an extension portion extending in a direction.

2 . The flexible sensor according to claim 1 , wherein the source electrode and the drain electrode are arranged in a direction intersecting with the direction in which the extension portion extends.

3 . The flexible sensor according to claim 2 , wherein the source electrode and the drain electrode are arranged in a direction orthogonal to the direction in which the extension portion extends.

4 . The flexible sensor according to claim 1 , wherein a plurality of the sensor elements are provided.

5 . The flexible sensor according to claim 4 , wherein an active-matrix type sensor portion in which the plurality of sensor elements are arranged in a matrix shape is provided.

6 . The flexible sensor according to claim 5 , wherein the extension portions of the variable resistance portions in the plurality of sensor elements included in the sensor portion extend in the same direction with each other.

7 . The flexible sensor according to claim 6 , wherein a plurality of the sensor portions are provided, and the directions in which the extension portions extend respectively are different for each sensor portion.

8 . The flexible sensor according to claim 7 , wherein the plurality of sensor portions are arranged along a direction orthogonal to a plane in which the plurality of sensor elements are arranged in the matrix shape.

9 . The flexible sensor according to claim 5 ,
wherein the plurality of sensor elements included in the sensor portion comprises
a first sensor element including the variable resistance portion with the extension portion extending in a first direction; and
a second sensor element including the variable resistance portion with the extension portion extending in a second direction different from the first direction.

10 . The flexible sensor according to claim 9 , wherein the first sensor element and the second sensor element are alternatively arranged in the first direction and the second direction.

11 . The flexible sensor according to claim 9 , wherein the second direction is orthogonal to the first direction.

12 . The flexible sensor according to claim 5 , wherein the transistor includes a P-type channel, the variable resistance portion is connected to the source electrode, and the sensor portion includes a signal line to which at least two or more drain electrodes of the sensor element are connected.

13 . The flexible sensor according to claim 12 , wherein a fixed resistance portion to which at least two or more drain electrodes are connected via the signal line.

14 . The flexible sensor according to claim 4 , wherein at least one or more sensor elements are provided in each surface at two sides of the substrate.

15 . The flexible sensor according to claim 1 , wherein the variable resistance portion includes a plurality of the extension portions.

16 . The flexible sensor according to claim 15 ,
wherein the plurality of extension portions in the variable resistance portion extend in the same direction and are arranged at intervals therebetween in a direction orthogonal to the extending direction, and the variable resistance portion is configured in a rectangle wavy shape in which the adjacent extension portions are connected to each other.

17 . The flexible sensor according to claim 16 , wherein the interval is shorter than a length of the extension portion.

18 . The flexible sensor according to claim 16 , wherein the plurality of extension portions in the variable resistance portion are arranged at equal intervals.

19 . The flexible sensor according to claim 1 , wherein the variable resistance portion includes an insulator and a plurality of conductive particles dispersed in the insulator.

20 . The flexible sensor according to claim 19 , wherein a material of the insulator is an energy curable resin.

21 . The flexible sensor according to claim 20 , wherein the energy curable resin is a thermosetting resin.

22 . The flexible sensor according to claim 20 , wherein the energy curable resin is a photocurable resin.

23 . The flexible sensor according to claim 1 , wherein the transistor is a thin film transistor.

24 . The flexible sensor according to claim 23 , wherein the transistor is an organic thin film transistor.

Assignees

• Nikon Corp

Inventors

• Koizumi Shohei
• Kito Yoshiaki
• Shimoyama Takachika
• Hatayama Katsuhiro
• Yamada Kentaro
• Kiuchi Tohru
• Fukawa Yasuteru

Classifications

• H10D86/441

  Interconnections, e.g. scanning lines · CPC title

• H10D86/60

  wherein the TFTs are in active matrices · CPC title

• H10D30/6755

  Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate · CPC title

• H10D30/6729

  characterised by the electrodes · CPC title

• H10D30/673

  characterised by the shapes, relative sizes or dispositions of the gate electrodes · CPC title