Traceable In-Situ Micro- and Nano-Indentation Testing Instrument and Method under Variable Temperature Conditions

Patent metadata

Field	Value
Publication number	US-2022018748-A1
Application number	US-202117375567-A
Country	US
Kind code	A1
Filing date	Jul 14, 2021
Priority date	Jul 14, 2020
Publication date	Jan 20, 2022
Grant date	—

Abstract

The present disclosure relates to a traceable in-situ micro- and nano-indentation testing instrument and method under variable temperature conditions. A macro-micro switchable mechanical loading module, a nano mechanical loading module and an indentation position optical positioning module are fixed on a gantry beam, an optical imaging axis of an optical microscopic in-situ observation or alignment module and a loading axis of the nano mechanical loading module are coplanar, the optical microscopic in-situ observation or alignment module and the function switchable module are mounted on a table top of a marble pedestal, and a contact or ambient mixed variable temperature module is fixedly mounted on the function switchable module. A modular design is adopted, the micro- and nano-indentation testing instrument is used as a core, in combination with a multi-stage vacuum or ambient chamber, an indentation depth traceability calibration module and multiple sets of optical microscopic imaging assemblies.

First claim

1 . A traceable in-situ micro- and nano-indentation testing instrument under variable temperature conditions, comprising a vacuum or ambient chamber module, a gantry beam, a macro-micro switchable mechanical loading module, a nano mechanical loading module, an indentation position optical positioning module, an optical microscopic in-situ observation or alignment module, a metal bellows, an air floating vibration isolation platform, an optical breadboard, a marble pedestal, a function switchable module and a contact or ambient mixed variable temperature module, wherein the macro-micro switchable mechanical loading module, the nano mechanical loading module and the indentation position optical positioning module are fixed on the gantry beam, and mechanical loading axes and optical imaging axes are laterally coincided by regulating thicknesses of shims; an optical imaging axis of the optical microscopic in-situ observation or alignment module and a loading axis of the nano mechanical loading module are coplanar, the optical microscopic in-situ observation or alignment module and the function switchable module are mounted on a table top of the marble pedestal in a nonintervention manner, and the contact or ambient mixed variable temperature module is fixedly mounted on the function switchable module; and a sinking tank is milled in a lower end surface of the marble pedestal which is mounted on the optical breadboard, the optical breadboard guarantees airtightness of the vacuum or ambient chamber module through the metal bellows to be further connected with the air floating vibration isolation platform, to isolate medium-frequency and high-frequency vibration noises outside the device.

2 . The traceable in-situ micro- and nano-indentation testing instrument under variable temperature conditions according to claim 1 , wherein in the macro-micro switchable mechanical loading module, a large-stroke pre-loading piezoelectric actuator is fixedly mounted on a first direct-current servo displacement driving platform through a piezoelectric ceramic fixing seat and a direct-acting flexible hinge, and a macro mechanical loading detection unit is connected to a displacement output end of the direct-acting flexible hinge through a dovetail-shaped mounting block; a micro mechanical loading detection unit having a same assembling structure as the macro mechanical loading detection unit, as a fast-inserting replacement module, is fixed on an L-shaped connecting frame positioned at two sides of the large-stroke pre-loading piezoelectric actuator through the dovetail-shaped mounting block; and the macro mechanical loading detection unit and the micro mechanical loading detection unit which are switchable, each are equipped with a unipolar plate capacitive displacement sensor and a strain gage force measuring unit having a corresponding measuring range, and the macro mechanical loading detection unit and the micro mechanical loading detection unit cooperate with an independent manual displacement platform to regulate a space between the unipolar plate capacitive displacement sensor and an indentation displacement measuring plate to realize a mechanical loading testing function for materials with different dimensions.

3 . The traceable in-situ micro- and nano-indentation testing instrument under variable temperature conditions according to claim 2 , wherein, the macro mechanical loading detection unit and the micro mechanical loading detection unit perform micro-zone mechanical testing functions for indentations, scratches and reciprocating friction abrasion by replacing a functional indentation tip; and the functional indentation tip is fixed at a tail end of an indentation holder with an optical contact reference ring through a first set screw.

4 . The traceable in-situ micro- and nano-indentation testing instrument under variable temperature conditions according to claim 2 , wherein, the strain gage force measuring unit is connected with a force measuring unit connecting block through threads, and is limited through a force measuring unit lead pressing sheet, and the force measuring unit connecting block is fixedly connected to the dovetail-shaped mounting block through a second set screw.

5 . The traceable in-situ micro- and nano-indentation testing instrument under variable temperature conditions according to claim 1 , wherein in the nano mechanical loading module, an MEMS micro force sensor is fixedly mounted at a tail end of a rigid connecting bar through a screw, and is connected to a displacement output end of a bridge amplification flexible hinge through a dovetail-shaped mounting block, wherein a closed-loop pre-loading piezoelectric actuator is mounted in the bridge amplification flexible hinge which is fixedly connected to a movement table top of a second direct-current servo displacement driving platform.

6 . The traceable in-situ micro- and nano-indentation testing instrument under variable temperature conditions according to claim 1 , wherein in the indentation position optical positioning module, a microscopic imaging assembly is mounted on a focusing platform through a connecting plate to locate a micro-zone mechanical property testing position, the optical microscopic imaging assembly comprises a CCD image collector, a low-power-consumption LED light source and a long-working-distance objective lens connected to an electric objective lens rotary table, to realize optical imaging of a micro-zone mechanical property testing zone at a room temperature or low temperature; and the CCD image collector is mounted at an optical microscopic imaging body through a standard C-shaped interface.

7 . The traceable in-situ micro- and nano-indentation testing instrument under variable temperature conditions according to claim 1 , wherein in the optical microscopic in-situ observation or alignment module, a monocular optical microscopic imaging assembly regulates three degrees of freedom of an optical imaging zone through a monocular optical microscopic imaging assembly angle regulating frame, a first manual focusing platform and a second manual focusing platform, and is fixedly mounted on the marble pedestal through a first connecting plate, wherein the monocular optical microscopic imaging assembly angle regulating frame regulates an angle between an imaging axis of the monocular optical microscopic imaging assembly and a loading axis of the nano mechanical loading module through an arc waist shaped tank, and provides an additional degree of freedom for the monocular optical microscopic imaging assembly through a closed-loop large-stroke function switchable platform in the function switchable module, to perform in-situ observation imaging of testing objects in micro-zone mechanical property testing zones.

8 . The traceable in-situ micro- and nano-indentation testing instrument under variable temperature conditions according to claim 1 , wherein in the contact or ambient mixed variable temperature module, testing samples are in clearance fit with a thermal insulation framework, and are fixed through a negative pressure adsorption tank substrate, and the negative pressure adsorption tank substrate is fixedly connected with a lower refrigerating unit and communicated with a negative pressure adsorption opening; a sinking tank is milled in the lower refrigerating unit, and Rb—Fe—B permanent magnets are fixed on two sides of the thermal insulation framework; a lower refrigerating unit X-shaped supporting plate cooperates with four sets of disc springs to guarantee surface stiffness of testing samples, and is fixedly connected with a lower cavity body; an upper refrigerating unit and a replaceable gas outlet cover plate form an inert gas storage chamber and an annular gas outlet tank, the upper refrigerating unit

Assignees

• Univ Jilin

Inventors

• Zhao Hongwei
• Wang Zhaoxin
• Zhang Jianhai
• Liu Peng
• Wang Shunbo
• Li Cong
• Zong Xiangyu
• Zhou Shuilong
• Li Honglong
• Wang Jiru
• Zhang Meng
• Wang Wenyang

Classifications

• G01N2203/0238

  Inert · CPC title

• G01N2203/0075

  Strain-stress relations or elastic constants · CPC title

• G01N2203/0617

  Electrical or magnetic indicating, recording or sensing means · CPC title

• G01N3/42 Primary

  by performing impressions under a steady load by indentors, e.g. sphere, pyramid (G01N3/54 takes precedence) · CPC title

• G01N2203/0051

  Piezoelectric means · CPC title