Method of manufacturing a sensor set-up for determining at least one pressure of a fluid medium

Patent metadata

Field	Value
Publication number	US-2022018726-A1
Application number	US-201917311213-A
Country	US
Kind code	A1
Filing date	Oct 22, 2019
Priority date	Dec 17, 2018
Publication date	Jan 20, 2022
Grant date	—

Abstract

A method of manufacturing a sensor set-up for determining at least one pressure of a fluid medium. The method includes: a) providing a blank of a sensor set-up including at least one pressure connection, the pressure connection including at least one pressure deformation element made up of at least one material suitable for induction; b) positioning at least one glass element onto a surface of the pressure deformation element; c) measuring at least one temperature of the pressure deformation element using at least one pyrometer; d) inducing a voltage in the pressure deformation element using at least one inductor in such a manner, that the glass element melts and a glass layer forms on the pressure deformation element; e) positioning a sensor element onto the glass layer in such a manner, that an integral bond forms between the sensor element and the glass layer.

First claim

1 - 10 . (canceled)

11 . A method of manufacturing a sensor set-up for determining at least one pressure of a fluid medium, the method comprising the following steps:
a) providing a blank of the sensor set-up, the blank of the sensor set-up including at least one pressure connection, the pressure connection including at least one pressure deformation element, the pressure deformation element being made up of at least one material suitable for induction; b) positioning at least one glass element onto a surface of the pressure deformation element; c) measuring at least one temperature of the pressure deformation element using at least one pyrometer; d) inducing a voltage in the pressure deformation element using at least one inductor in such a manner that the glass element melts and a glass layer forms on the pressure deformation element; and e) positioning a sensor element onto the glass layer in such a manner that an integral bond forms between the sensor element and the glass layer.

12 . The method as recited in claim 11 , wherein prior to step b), at least one surface profile is produced on at least the surface of the pressure deformation element.

13 . The method as recited in claim 12 , wherein the surface profile is at least profiling selected from the group made up of: microprofiling, nanoprofiling.

14 . The method as recited in claim 12 , wherein at least part of the surface profile is substantially periodic surface profiling.

15 . The method as recited in claim 11 , wherein the method further comprises:
inserting the pressure connection into a holding fixture capable of being cooled and cooling the pressure connection using the holding fixture capable of being cooled.

16 . The method as recited in claim 15 , wherein a lower end of the pressure connection is cooled to a temperature of 5° C. to 25° C. using the holding fixture capable of being cooled.

17 . The method as recited in claim 11 , wherein the glass element has a cylindrical basic shape having a thickness of 5 μm to 100 μm.

18 . The method as recited in claim 11 , wherein step d) includes a heating phase, a holding phase, and a cooling phase, and the holding phase takes place over a time frame of 2 s to 50 s.

19 . The method as recited in claim 11 , wherein in step d), the pressure deformation element is heated to a temperature of 200° C. to 900° C.

20 . A sensor set-up for determining at least one pressure of a fluid medium, the sensor set-up being manufactured by:
a) providing a blank of the sensor set-up, the blank of the sensor set-up including at least one pressure connection, the pressure connection including at least one pressure deformation element, the pressure deformation element being made up of at least one material suitable for induction; b) positioning at least one glass element onto a surface of the pressure deformation element; c) measuring at least one temperature of the pressure deformation element using at least one pyrometer; d) inducing a voltage in the pressure deformation element using at least one inductor in such a manner that the glass element melts and a glass layer forms on the pressure deformation element; and e) positioning a sensor element onto the glass layer in such a manner that an integral bond forms between the sensor element and the glass layer.

Assignees

• Bosch Gmbh Robert

Inventors

• Goldhahn Clemens
• Baetzold Lutz
• Reinhardt Marcel
• Wolf Ronny
• Stark Tilman
• Wenk Ralf

Classifications

• G01L9/0048 Primary

  Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief · CPC title

• C03C27/02

  by fusing glass directly to metal · CPC title

• B81C3/00

  Assembling of devices or systems from individually processed components · CPC title

• G01L9/0008

  using vibrations · CPC title

• G01L9/0016

  of a diaphragm · CPC title