Hydrogen co-gas when using a chlorine-based ion source material

Patent metadata

Field	Value
Publication number	US-2022013323-A1
Application number	US-202117339025-A
Country	US
Kind code	A1
Filing date	Jun 4, 2021
Priority date	Jul 10, 2020
Publication date	Jan 13, 2022
Grant date	—

Abstract

An ion implantation system has an aluminum trichloride source material. An ion source is configured to ionize the aluminum trichloride source material and form an ion beam. The ionization of the aluminum trichloride source material further forms a by-product having a non-conducting material containing chlorine. A hydrogen introduction apparatus is configured to introduce a reducing agent including hydrogen to the ion source. The reducing agent is configured to alter a chemistry of the non-conducting material to produce a volatile gas by-product. A beamline assembly is configured to selectively transport the ion beam, and an end station is configured to accept the ion beam for implantation of ions into a workpiece.

First claim

1 . An ion implantation system, comprising:
an aluminum trichloride source material; an ion source configured to ionize the aluminum trichloride source material and form an ion beam therefrom, and whereby the ionization of the aluminum trichloride source material further forms a by-product comprising a non-conducting material containing chlorine; a hydrogen introduction apparatus configured to introduce a reducing agent comprising hydrogen to the ion source, wherein the reducing agent is configured to alter a chemistry of the non-conducting material to produce a volatile gas by-product; a beamline assembly configured to selectively transport the ion beam; and an end station configured to accept the ion beam for implantation of ions into a workpiece.

2 . The ion implantation system of claim 1 , wherein the hydrogen introduction apparatus comprises a hydrogen co-gas source, wherein the hydrogen from the reducing agent alters the chemistry of the non-conducting material to produce hydrogen chloride.

3 . The ion implantation system of claim 1 , wherein the hydrogen introduction apparatus comprises a pressurized gas source.

4 . The ion implantation system of claim 3 , wherein the pressurized gas source comprises one or more of hydrogen gas and phosphine.

5 . The ion implantation system of claim 1 , wherein the non-conducting material containing chlorine comprises a molecule in the form of AlCl x , where x is a positive integer.

6 . The ion implantation system of claim 1 , further comprising a vacuum system configured to substantially evacuate one or more enclosed portions of the ion implantation system.

7 . The ion implantation system of claim 6 , wherein the one or more enclosed portions of the ion implantation system comprise the ion source.

8 . The ion implantation system of claim 1 , wherein the aluminum trichloride source material is in one of a solid form or a powder form.

9 . The ion implantation system of claim 8 , further comprising a source material vaporizer operably coupled to the ion source, wherein the source material vaporizer is configured to vaporize the aluminum trichloride source material.

10 . An ion implantation system, comprising:
a chlorine-based source material; an ion source configured to ionize the chlorine-based source material and form an ion beam therefrom, and whereby the ionization of the chlorine-based source material further forms a by-product comprising a non-conducting material containing chlorine; a hydrogen introduction apparatus configured to introduce a reducing agent comprising hydrogen to the ion source, wherein the reducing agent is configured to alter a chemistry of the non-conducting material to produce a volatile gas by-product; a beamline assembly configured to selectively transport the ion beam; and an end station configured to accept the ion beam for implantation of ions into a workpiece.

11 . The ion implantation system of claim 10 , wherein the hydrogen introduction apparatus comprises a hydrogen co-gas source, wherein the hydrogen from the reducing agent alters the chemistry of the non-conducting material to produce hydrogen chloride.

12 . The ion implantation system of claim 10 , wherein the hydrogen introduction apparatus comprises a pressurized gas source.

13 . The ion implantation system of claim 12 , wherein the pressurized gas source comprises one or more of hydrogen gas and phosphine.

14 . The ion implantation system of claim 10 , wherein the non-conducting material containing chlorine comprises a molecule in the form of AlCl x , where x is a positive integer.

15 . The ion implantation system of claim 10 , further comprising a vacuum system configured to substantially evacuate one or more enclosed portions of the ion implantation system.

16 . The ion implantation system of claim 15 , wherein the one or more enclosed portions of the ion implantation system comprise the ion source.

17 . The ion implantation system of claim 10 , wherein the chlorine-based source material is in one of a solid form or a powder form.

18 . The ion implantation system of claim 17 , further comprising a source material vaporizer operably coupled to the ion source, wherein the source material vaporizer is configured to vaporize the chlorine-based source material.

19 . The ion implantation system of claim 10 , wherein the chlorine-based source material comprises one of aluminum trichloride, germanium (iv) chloride, indium (i) chloride, indium (iii) chloride, gallium (ii) chloride, and gallium (iii) chloride.

20 . A method for implanting aluminum ions into a workpiece, the method comprising:
vaporizing an aluminum trichloride source material; providing the vaporized aluminum trichloride source material to an ion source of an ion implantation system; providing a hydrogen co-gas to the ion source; ionizing the aluminum trichloride source material in the ion source, wherein the hydrogen co-gas reacts with the vaporized aluminum trichloride source material within the ion source to produce volatile hydrogen chloride gas; removing the volatile hydrogen chloride gas via a vacuum system; and implanting aluminum ions from the ionized aluminum trichloride source material into a workpiece.

21 . The method of claim 20 , wherein the aluminum trichloride source material is initially in one of a solid form or a powder form.

22 . The method of claim 20 , wherein providing the hydrogen co-gas to the ion source comprises providing one or more of hydrogen gas and phosphine to the ion source.

23 . A method for implanting ions into a workpiece, the method comprising:
vaporizing a chlorine-based source material; providing the vaporized chlorine-based source material to an ion source of an ion implantation system; providing a hydrogen co-gas to the ion source; ionizing the chlorine-based source material in the ion source, wherein the hydrogen co-gas reacts with the vaporized chlorine-based source material within the ion source to produce volatile hydrogen chloride gas; removing the volatile hydrogen chloride gas via a vacuum system; and implanting ions from the chlorine-based source material into a workpiece.

24 . The method of claim 23 , wherein the chlorine-based source material is initially in one of a solid or a powder form.

25 . The method of claim 23 , wherein the chlorine-based source material comprises one of aluminum trichloride, germanium (iv) chloride, indium (i) chloride, indium (iii) chloride, gallium (ii) chloride, and gallium (iii) chloride.

26 . The method of claim 23 , wherein providing the hydrogen co-gas to the ion source comprises providing one or more of hydrogen gas and phosphine to the ion source.

Assignees

• Axcelis Tech Inc

Inventors

• Colvin Neil K
• Bassom Neil
• Wu Xiangyang

Classifications

• H01J37/08 Primary

  Ion sources; Ion guns · CPC title

• C23C14/48

  Ion implantation · CPC title

• H01J2237/0815

  Methods of ionisation · CPC title

• H01J37/3171 Primary

  for ion implantation · CPC title