Channel structures for optimizing the membrane function of oil-filled pressure sensors

Patent metadata

Field	Value
Publication number	US-2022011187-A1
Application number	US-202117352561-A
Country	US
Kind code	A1
Filing date	Jun 21, 2021
Priority date	Jul 10, 2020
Publication date	Jan 13, 2022
Grant date	—

Abstract

A metallic pressure measuring cell having a base body, a metallic membrane situated on the base body, wherein a membrane chamber is formed between the membrane and the base body, a pressure sensor situated in a sensor chamber of the base body, wherein a connecting channel is formed between the membrane chamber and the sensor chamber and the chambers are filled with a pressure transmitting medium for transmitting a pressure acting on the membrane, characterized in that the membrane comprises a surface structure, which, in a plan view, at least overlaps an outer contour of an inlet area of the connecting channel into the membrane chamber.

First claim

We claim:

1 . A metallic pressure measuring cell having a base body, a metallic membrane situated on the base body, wherein a membrane chamber is formed between the membrane and the base body, a pressure sensor situated in a sensor chamber of the base body, wherein a connecting channel is formed between the membrane chamber and the sensor chamber and the chambers are filled with a pressure transmitting medium for transmitting a pressure acting on the membrane, wherein the membrane comprises a surface structure, which, in a plan view, at least overlaps an outer contour of an inlet area of the connecting channel into the membrane chamber.

2 . The metallic pressure measuring cell claim 1 , wherein the membrane comprises at least one channel which, in a plan view, overlaps at least once the outer contour of the inlet area of the connecting channel into the membrane chamber.

3 . The metallic pressure measuring cell of claim 1 , wherein the membrane comprises, in a cross-sectional view, a surface contour corresponding to a wall of the base body directly opposite to the membrane.

4 . Metallic pressure measuring cell of claim 3 , wherein the surface contour comprises a cosine-shaped profile.

5 . Metallic pressure measuring cell of claim 2 , wherein the at least one channel is designed to run at least in sections in the radial direction.

6 . The metallic pressure measuring cell of claim 2 , wherein the at least one channel, in plan view of the membrane, is spiral-shaped at least in sections.

7 . The metallic pressure measuring cell of claim 2 , wherein the at least one channel is formed starting from a center point of the membrane in plan view up to at least ¼, in particular at least ⅓ of a radius of the membrane.

8 . The metallic pressure measuring cell of claim 2 , wherein
the membrane comprises at least 2 channels.

9 . The metallic pressure measuring cell of claim 1 , wherein the surface of the membrane is roughened at least in sections.

10 . The metallic pressure measuring cell of claim 1 , wherein the pressure sensor is designed as a piezo sensor.

11 . The metallic pressure measuring cell of claim 1 , wherein the connecting channel opens centrally into the membrane chamber.

12 . A method for manufacturing the metallic pressure measuring cell of claim 1 , comprising the following steps:
providing a base body comprising a membrane chamber with a predetermined surface contour, a sensor chamber and a connecting channel between the membrane chamber and the sensor chamber, providing a metallic membrane comprising at least one surface structure which, in a plan view, at least overlaps an outer contour of an inlet area of the connecting channel into the membrane chamber, attaching the metallic membrane to the base body, molding of the surface contour of the base body onto the membrane and filling of at least membrane chamber, sensor chamber and connecting channel with a pressure transmitting medium.

13 . The method of claim 12 , wherein the surface structure comprises at least one channel, which is introduced into the membrane.

14 . The method of claim 13 , wherein the at least one channel is introduced into the membrane by a machining method, in particular by milling, turning or engraving.

15 . The method according to claim 13 , wherein the at least one channel is introduced into the membrane by a remodeling process, in particular by stamping.

16 . The method of claim 12 , characterized in that the membrane is welded to the base body.

17 . The method of claim 12 , wherein the surface structure is produced at least partially by roughening, in particular sandblasting or laser machining.

Assignees

• Grieshaber Vega Kg

Inventors

• Huber Jochen
• Epting Julian

Classifications

• G01L1/16

  using properties of piezoelectric devices · CPC title

• G01L1/02 Primary

  by hydraulic or pneumatic means · CPC title

• G01L19/00

  Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges · CPC title

• G01L9/08

  by making use of piezoelectric devices {, i.e. electric circuits therefor} · CPC title

• G01L7/182

  constructional details, e.g. mounting · CPC title