Structured grating component, imaging system and manufacturing method

Patent metadata

Field	Value
Publication number	US-2021313086-A1
Application number	US-201915734238-A
Country	US
Kind code	A1
Filing date	Nov 11, 2019
Priority date	Nov 13, 2018
Publication date	Oct 7, 2021
Grant date	—

Abstract

The invention relates to a method of manufacturing a structured grating, a corresponding structured grating component ( 1 ) and an imaging system. The method comprising the steps of: providing ( 110, 120, 130 ) a catalyst ( 30 ) on a substrate ( 20 ), the catalyst ( 20 ) having a grating pattern; growing ( 140 ) nanostructures ( 50 ) on the catalyst ( 30 ) so as to form walls ( 52 ) and trenches ( 54 ) based on the grating pattern; and filling ( 160 ) the trenches ( 54 ) between the walls ( 52 ) of nanostructures ( 50 ) using an X-ray absorbing material ( 70 ). The invention provides an improved method for manufacturing a structured grating and such structured grating component ( 1 ), which is particularly suitable for dark-field X-ray imaging or phase-contrast imaging.

First claim

1 . A method of manufacturing a structured grating, the method comprising:
providing a catalyst on a substrate, the catalyst having a grating pattern; growing nanostructures on the catalyst to form walls and trenches based on the grating pattern; and filling the trenches between the walls of nanostructures using an X-ray absorbing material.

2 . The method according to claim 1 , wherein the nanostructures are grown using a material having a lower X-ray absorbance than the X-ray absorbing material.

3 . The method according to claim 1 , wherein the nanostructures comprise carbon nanotubes.

4 . The method according to claim 1 , further including applying a passivation layer prior to filling the trenches using the X-ray absorbing material.

5 . The method according to claim 4 , wherein applying the passivation layer includes a chemical vapor deposition.

6 . The method according to claim 4 , wherein the passivation layer is applied to a defined distance from the substrate, wherein the defined distance is less than 2 μm.

7 . The method according to claim 4 , wherein filling the trenches comprises electroplating.

8 . The method according to claim 1 , wherein filling the trenches comprises at least one of:
mechanical filling using mechanical stress, high temperature and underpressure; filling the trenches with a metal powder embedded in a binder substance and baking the binder substance to achieve solid filling of the trenches; and imprinting the grating structures using the grown nanostructures.

9 . The method according to claim 1 , further comprising bending the grating structure to adjust the grating structure to a cone beam of an X-ray source.

10 . A structured grating component, comprising:
a substrate; a catalyst on the substrate, the catalyst having a grating pattern; nanostructures on the substrate forming walls and trenches based on the grating pattern; and X-ray absorbing material filling the trenches between the walls of nanostructures, wherein the nanostructures include carbon nanotubes.

11 . The structured grating component according to claim 10 , further comprising:
a passivation layer arranged between the X-ray absorbing material and the nanostructures.

12 . The structured grating component according to claim 10 , wherein the substrate is in direct contact with the X-ray absorbing material.

13 . The structured grating component according to claim 10 , wherein the nanostructures comprise support elements joining two adjacent walls, wherein the support elements are provided at different positions in a longitudinal direction on two opposite sides of a wall, respectively.

14 . An imaging system, comprising a structured grating component according to claim 10 .

Assignees

• Koninklijke Philips Nv
• TNO

Inventors

• Vogtmeier Gereon
• Hermes Dorothee
• Liu Bo
• Yaroshenko Andre
• Unnikrishnan Sandeep
• Jacobs Johannes Wilhelmus Maria

Classifications

• B81B2207/056

  of static structures · CPC title

• G21K2207/005

  Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast · CPC title

• G21K2201/067

  Construction details · CPC title

• G21K1/025

  using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation · CPC title

• G02B5/1838

  for use with ultraviolet radiation or X-rays · CPC title