Light detector, light detection system, lidar device, and vehicle

Patent metadata

Field	Value
Publication number	US-2021293937-A1
Application number	US-202017015325-A
Country	US
Kind code	A1
Filing date	Sep 9, 2020
Priority date	Mar 19, 2020
Publication date	Sep 23, 2021
Grant date	—

Abstract

According to one embodiment, a light detector includes a first semiconductor region of a first conductivity type, a first element, a second element, an insulating body, a first interconnect, and a second interconnect. The second semiconductor region of the first element is provided on the first semiconductor region. The third semiconductor region of the first element is provided on the second semiconductor region. The fourth semiconductor region of the second element is provided on the first semiconductor region, and has an impurity concentration of a first conductivity type less than in the second semiconductor region. The fifth semiconductor region of the second element is provided on the fourth semiconductor region. The insulating body is provided between the first element and the second element. The first interconnect is electrically connected to the third semiconductor region. The second interconnect is electrically connected to the fifth semiconductor region.

First claim

What is claimed is:

1 . A light detector, comprising:
a first semiconductor region of a first conductivity type; a first element including
a second semiconductor region provided on the first semiconductor region, the second semiconductor region being of the first conductivity type, and
a third semiconductor region provided on the second semiconductor region, the third semiconductor region being of a second conductivity type and contacting the second semiconductor region;
a second element arranged with the first element in a direction perpendicular to a first direction, the first direction being from the first semiconductor region toward the first element, the second element including
a fourth semiconductor region provided on the first semiconductor region, the fourth semiconductor region being of the first conductivity type, an impurity concentration of the first conductivity type in the fourth semiconductor region being less than an impurity concentration of the first conductivity type in the second semiconductor region, and
a fifth semiconductor region provided on the fourth semiconductor region, the fifth semiconductor region being of the second conductivity type and contacting the fourth semiconductor region;
an insulating body provided between the first element and the second element; a first interconnect electrically connected to the third semiconductor region; and a second interconnect electrically connected to the fifth semiconductor region.

2 . The light detector according to claim 1 , wherein
the insulating body is provided around the first element along a first plane perpendicular to the first direction.

3 . The light detector according to claim 1 , wherein
a plurality of the first elements is provided in a second direction and a third direction, the second direction is perpendicular to the first direction, the third direction is perpendicular to the first and second directions, the second element is provided between the first elements in a fourth direction, and the fourth direction is perpendicular to the first direction and oblique to the second and third directions.

4 . The light detector according to claim 1 , wherein
a plurality of the first elements and a plurality of the second elements are provided, the plurality of first elements is arranged along a second direction and a third direction, the second direction is perpendicular to the first direction, the third direction is perpendicular to the first and second directions, a portion of the plurality of second elements is provided between the first elements in a fourth direction, the fourth direction is perpendicular to the first direction and oblique to the second and third directions, and an other portion of the plurality of second elements is provided around the plurality of first elements along a first plane perpendicular to the first direction.

5 . The light detector according to claim 3 , wherein
the insulating body includes a plurality of first insulating portions provided respectively around the plurality of first elements along a first plane perpendicular to the first direction, and the plurality of first insulating portions is separated from each other.

6 . The light detector according to claim 5 , wherein
at least a portion of the plurality of first insulating portions includes:
a first extension portion extending along the second direction;
a second extension portion extending along the third direction; and
a link portion linking the first extension portion and the second extension portion, and
the first element is arranged with the first extension portion in the third direction and arranged with the second extension portion in the second direction.

7 . The light detector according to claim 6 , wherein
an angle between the first extension portion and the link portion and an angle between the second extension portion and the link portion are 135 degrees or more for the at least a portion of the plurality of first insulating portions.

8 . The light detector according to claim 6 , wherein
the at least a portion of the plurality of first insulating portions is octagonal when viewed along the first direction.

9 . The light detector according to claim 6 , wherein
the link portion is curved when viewed along the first direction.

10 . The light detector according to claim 6 , wherein
a length in the first direction of the link portion and a length in the second direction of the link portion are 1 μm or more.

11 . The light detector according to claim 1 , further comprising:
a first quenching part electrically connected between the third semiconductor region and the first interconnect.

12 . The light detector according to claim 1 , further comprising:
a first pad electrically connected to the first interconnect; and a second pad electrically connected to the second interconnect and separated from the first pad.

13 . A light detector, comprising:
a first semiconductor region being of a first conductivity type; a first element including a second semiconductor region provided on the first semiconductor region, and a third semiconductor region provided on the second semiconductor region, the second semiconductor region being of a first conductivity type, the third semiconductor region being of a second conductivity type and contacting the second semiconductor region, a plurality of the first elements being provided in a second direction and a third direction, the second direction being perpendicular to a first direction from the first semiconductor region toward the first element, the third direction being perpendicular to the first and second directions; a second element including a fourth semiconductor region and a fifth semiconductor region, the fourth semiconductor region being provided on the first semiconductor region, being of the first conductivity type, and having a lower first-conductivity-type impurity concentration than the second semiconductor region, the fifth semiconductor region being provided on the fourth semiconductor region, being of the second conductivity type, and contacting the fourth semiconductor region, a plurality of the second elements being provided around the plurality of first elements along a first plane perpendicular to the first direction; an insulating body provided between the first elements and between the first element and the second element; a first interconnect electrically connected to at least a portion of a plurality of the third semiconductor regions; and a second interconnect electrically connected to at least a portion of a plurality of the fifth semiconductor regions.

14 . The light detector according to claim 1 , wherein
the first element includes an avalanche photodiode operating in a Geiger mode.

15 . A light detection system, comprising:
the light detector according to claim 1 ; and a distance measuring circuit calculating a time-of-flight of light from an output signal of the light detector.

16 . A lidar device, comprising:
a light source irradiating light on an object; and the light detection system according to claim 15 detecting light reflected by the object.

17 . The lidar device according to claim 16 , further comprising:
an image recognition system generating a three-dimensional image based on an arrangement relationship of the light source and the light detector.

18 . A vehicle, comprising:
the lidar device according to claim 16 .

19 . A vehicle, comprising:
the lidar device accordin

Assignees

• Toshiba Kk

Inventors

• Fujiwara Ikuo
• Kwon Honam
• Sasaki Keita
• Suzuki Kazuhiro
• Atsuta Masaki
• Shimizu Mariko
• Okamoto Kazuaki

Classifications

• H10W90/00

  Package configurations · CPC title

• H10F77/959

  for devices working in avalanche mode · CPC title

• H10F77/147

  Shapes of bodies · CPC title

• H10F77/206

  for devices having potential barriers · CPC title

• H10F39/803

  Pixels having integrated switching, control, storage or amplification elements · CPC title