Avalanche diode, and a process of manufacturing an avalanche diode

Patent metadata

Field	Value
Publication number	US-10043936-B1
Application number	US-201615336368-A
Country	US
Kind code	B1
Filing date	Oct 27, 2016
Priority date	Oct 27, 2016
Publication date	Aug 7, 2018
Grant date	Aug 7, 2018

Abstract

The present disclosure relates to an avalanche photodiode comprising a substrate having an active area. A first dopant implant in the active area forms one of an anode and the cathode of the avalanche photodiode. A second dopant implant in the active area forming the other one of the anode and the cathode of the avalanche photodiode, wherein at least one of the first and second dopant implants defines a discontinuous formation having at least one interruption.

First claim

What is claimed is:

1. An avalanche photodiode comprising;
a substrate having an active area;
a first dopant implant in the active area forming one of an anode and the cathode of the avalanche photodiode; and
a second dopant implant in the active area forming the other one of the anode and the cathode of the avalanche photodiode, wherein at least one of the first and second dopant implants defines a discontinuous formation comprising at least two regions which are spatially separated from each other with no implanted structure located in the space therebetween; wherein a lateral electric field extends from the space between the at least two regions which forces minority carriers away from the space to a non-active region thereby reducing noise caused by minority carriers.

2. An avalanche photodiode as claimed in claim 1 , wherein the other one of the first and second dopant implants defines a continuous formation.

3. An avalanche photodiode as claimed in claim 1 , where the avalanche photodiode is a single photon avalanche diode (SPAD) or a Geiger mode avalanche photodiode.

4. An avalanche photodiode as claimed in claim 1 ; wherein a space at a border of a micro-cell boundary containing an array of avalanche photodiodes generates lateral electric fields which forces minority carriers to the non-active regions thereby reducing noise caused by minority carriers.

5. An avalanche photodiode as claimed in claim 1 ; wherein the discontinuous formation in the active region in use generates lateral electric fields which forces minority carriers to the non-active regions thereby reducing noise caused by minority carriers.

6. An avalanche photodiode as claimed in claim 1 , wherein the at least two regions together form either the cathode or the anode of the avalanche diode.

7. An avalanche photodiode as claimed in claim 6 , wherein the at least two regions are formed by a deep implant.

8. An avalanche photodiode as claimed in claim 7 ; wherein the deep implant has a depth of between 500 nm and 8 microns.

9. An avalanche photodiode as claimed in claim 8 ; wherein the deep implant is a retrograde implant.

10. An avalanche photodiode as claimed in claim 8 , wherein one of the first and second dopant implant that defines the continuous formation is formed by a shallow dopant implant.

11. An avalanche photodiode as claimed in claim 8 ; wherein the shallow dopant implant has a depth of between 10 nm and less than 500 nm.

12. An avalanche photodiode as claimed in claim 1 , wherein the width of each region is in the range of 8 microns to 12 microns.

13. An avalanche photodiode as claimed in claim 12 , wherein the width of each region is approximately 10 microns.

14. An avalanche photodiode as claimed in claim 1 , wherein the interruption is provided between each spaced apart region.

15. An avalanche photodiode as claimed in claim 14 , wherein the interruption is located at a distance in the range of 8 microns to 16 microns from a micro-cell boundary.

16. An avalanche photodiode as claimed in claim 15 , wherein the interruption is located at 14 microns from the micro-cell boundary.

17. An avalanche photodiode as claimed in claim 1 , wherein the number of spaced apart regions used to form one of the cathode and the anode of the avalanche photodiode is in the range of between 2 to 8 regions.

18. An avalanche photodiode as claimed in claim 17 , wherein three spaced apart regions are provided.

19. An avalanche photodiode as claimed in claim 17 , wherein four spaced apart regions are provided.

20. An avalanche photodiode as claimed in claim 14 , wherein an optimal width of the interruption between adjacent spaced apart regions is determined by the depth of the implant and a dopant concentration of an epitaxial layer before the first and second dopant implants are implanted.

21. An avalanche photodiode as claimed in claim 20 , wherein the width of the interruption is proportional to the depth of the implant.

22. An avalanche photodiode as claimed in claim 21 , wherein the optimal width of the interruption between adjacent spaced apart regions is 1.4 μm for an implant depth of 800 nm and a dopant concentration of the epitaxial layer of between 10 14 and 10 15 atoms/cm 3 prior to the first and second dopant implants being implanted.

23. An avalanche photodiode as claimed in claim 21 , wherein the optimal width of the interruption between adjacent spaced apart regions is 2.8 μm for an implant depth of 1600 nm and a dopant concentration of the epitaxial layer of between 10 14 and 10 15 atoms/cm 3 prior to the first and second dopant implants being implanted.

24. An avalanche photodiode as claimed in claim 21 , wherein the optimal width of the interruption between adjacent spaced apart regions is 4.2 μm for an implant depth of 2400 nm and a dopant concentration of the epitaxial layer of between 10 14 and 10 15 atoms/cm 3 prior to the first and second dopant implants being implanted.

25. An avalanche photodiode as claimed in claim 1 ; wherein the substrate is one of an n-type substrate and a p-type substrate.

26. An avalanche photodiode as claimed in claim 1 ; further comprising an insulating layer through which the first and second dopants are implanted.

27. An avalanche photodiode of claim 23 , further comprising an epitaxial layer provided intermediate the insulating layer and the substrate.

28. An avalanche photodiode of claim 27 , wherein the insulating layer is formed directly on the epitaxial layer.

29. An avalanche photodiode of claim 27 , wherein the epitaxial layer comprises a PN junction.

30. An avalanche photodiode of claim 1 , wherein the substrate is highly doped for providing a low resistivity bulk region.

31. An avalanche photodiode of claim 27 , wherein the insulating layer comprises an oxide material.

32. An avalanche photodiode of claim 27 , further comprising an anti-reflective coating provided on the insulating layer.

33. An avalanche photodiode of claim 27 , wherein an optical pathway is provided for facilitating the transmission of light to the active region through the insulating layer.

34. An avalanche photodiode of claim 33 , wherein the optical pathway is formed by etching a trench into a dielectric layer.

35. An avalanche photodiode of claim 1 , wherein a quench resistor is operably coupled thereto.

36. An avalanche photodiode of claim 1 , wherein one of the first dopant implant and the second dopant implant is a P type material, and the other one of the first dopant implant and the second dopant implant is an N type material.

37. An avalanche photodiode of claim 27 , wherein the insulating layer has a thickness in the range of 10 nm to 50 nm.

38. An avalanche photodiode of claim 27 , wherein the insulating layer comprises silicon nitride.

39. An avalanche photodiode of claim 32 , wherein the anti-reflective coating comprises silicon oxide.

40. An avalanche photodiode of claim 32 ; wherein the anti-reflective coating has a thickness in the range of 10 nm to 50 nm.

41. An avalanche photodiode of claim 39 , wherein the anti-reflective coating comprises SiO with a thickness of 36 nm and SiN with a thi

Assignees

• Sensl Technologies Ltd
• Semiconductor Components Ind Llc

Inventors

• O'Neill Kevin Michael
• Jackson John Carlton
• Wall Liam

Classifications

• H01L31/022408

  Electricity · mapped topic

• H01L27/1446

  Electricity · mapped topic

• H01L31/107 Primary

  Electricity · mapped topic

• H01L31/02161

  Electricity · mapped topic

• H01L31/02027

  Electricity · mapped topic