Electrodes for biosensors

Patent metadata

Field	Value
Publication number	US-2021189523-A1
Application number	US-201917045364-A
Country	US
Kind code	A1
Filing date	Apr 18, 2019
Priority date	Apr 18, 2018
Publication date	Jun 24, 2021
Grant date	—

Abstract

The present disclosure relates to electrodes for biosensors. An electrode is made from a stack including (A) a layer made from ruthenium metal, a ruthenium-based alloy, nickel metal, or a nickel-based alloy; and (B) a layer made from a conductive metal or conductive metal alloy or carbon. The resulting electrode stack has physical and electrical property advantages when compared with existing pure metal electrodes.

First claim

1 . An electrode for measuring an analyte, comprising:
a first base layer comprising a conductive metal or a conductive metal alloy or carbon; and a first electrode layer upon the first base layer, the first electrode layer comprising ruthenium metal, a ruthenium based metal alloy, nickel metal, or a nickel based metal alloy.

2 . The electrode of claim 1 , wherein the ruthenium based metal alloy comprises a first alloying element selected from the group consisting of aluminum, chromium, copper, nickel, rhenium, and tungsten; or
wherein the nickel based metal alloy comprises a first alloying element selected from the group consisting of aluminum, gold, chromium, copper, molybdenum, palladium, ruthenium, tantalum, and titanium.

3 . The electrode of claim 1 , wherein the ruthenium based metal alloy comprises from about 5 at % to about 95 at %, or from about 5 at % to about 45 at %, or from about 50 at % to about 95 at %, or from about 50 at % to about 65 at %, or from about 55 at % to about 75 at %, or from about 65 at % to about 85 at %, or from about 75 at % to about 95 at %, or from about 85 at % to about 95 at %, or from about 95 at % to less than 100 at % ruthenium.

4 . The electrode of claim 3 , wherein the ruthenium based metal alloy is a binary alloy and the first alloying element is selected from the group consisting of aluminum, chromium, copper, nickel, rhenium, and tungsten.

5 . The electrode of claim 3 , wherein the ruthenium based metal alloy is a ternary alloy and consists essentially of ruthenium, the first alloying element, and a second alloying element, wherein the first alloying element and the second alloying element are each selected from the group consisting of aluminum, chromium, copper, nickel, rhenium, and tungsten.

6 . The electrode of claim 1 , wherein the ruthenium based metal alloy is a binary alloy consisting essentially of (a) about 55 at % or more ruthenium and (b) about 15 at % or more of either chromium or tungsten.

7 . The electrode of claim 1 , wherein the ruthenium based metal alloy is a binary alloy consisting essentially of (a) about 60 at % to about 70 at % ruthenium and (b) about 30 at % to about 40 at % of aluminum.

8 . The electrode of claim 1 , wherein the ruthenium based metal alloy is a binary alloy consisting essentially of (a) about 5 at % to about 25 at % ruthenium and (b) about 75 at % to about 95 at % of nickel.

9 . The electrode of claim 1 , wherein the ruthenium based metal alloy is a ternary alloy consisting essentially of (a) about 20 at % to about 55 at % ruthenium and (b) about 45 at % to about 80 at % combined of nickel and aluminum.

10 . The electrode of claim 1 , wherein the ruthenium based metal alloy is a ternary alloy consisting essentially of (a) about 20 at % to about 55 at % ruthenium and (b) about 45 at % to about 80 at % combined of chromium and tungsten.

11 . The electrode of claim 1 , wherein the nickel based metal alloy comprises from about 20 at % to about 95 at %, or from about 55 at % to about 95 at %, or from about 55 at % to about 65 at %, or from about 55 at % to about 60 at %; about 55 at % to about 75 at %, or from about 60 at % to about 70 at %; about 65 at % to about 85 at %, or from about 70 at % to about 80 at %; about 75 at % to about 95 at %, or from about 80 at % to about 90 at %; or about 85 at % to about 95 at % nickel.

12 . The electrode of claim 11 , wherein the nickel based metal alloy is a binary alloy and comprises from about 5 at % to about 80 at % of the first alloying element, and the first alloying element is selected from the group consisting of aluminum, ruthenium, tantalum, and titanium.

13 . The electrode of claim 11 , wherein the nickel based metal alloy is a ternary alloy and consists essentially of nickel, the first alloying element, and a second alloying element, wherein the first alloying element and the second alloying element are each selected from the group consisting of aluminum, ruthenium, tantalum, and titanium, and together the first alloying element and the second alloying element comprise from about 5 at % to about 80 at % of the alloy.

14 . The electrode of claim 11 , wherein the nickel based metal alloy is a binary alloy consisting essentially of (a) about 55 at % to about 95 at % nickel and (b) about 5 at % to about 45 at % of either aluminum, copper, chromium, tantalum, ruthenium, or titanium.

15 . The electrode of claim 11 , wherein the nickel based metal alloy is a binary alloy consisting essentially of (a) about 45 at % to about 95 at % nickel and (b) about 5 at % to about 55 at % of ruthenium.

16 . The electrode of claim 11 , wherein the nickel based metal alloy is a ternary alloy consisting essentially of (a) about 20 at % to about 55 at % nickel; and either (b) (i) about 20 at % to about 30 at % titanium, and about 20 at % to about 30 at % tantalum; or (ii) about 20 at % to about 30 at % aluminum, and about 20 at % to about 30 at % ruthenium.

17 . The electrode of claim 1 , wherein the first base layer comprises aluminum, silver, chromium, molybdenum, zinc, cobalt, nickel, or tungsten.

18 . The electrode of claim 1 , wherein the first base layer has a thickness of from about 100 angstroms to about 100 nanometers, and wherein the first electrode layer has a thickness of from about 10 nanometers to about 100 nanometers.

19 . The electrode of claim 1 , wherein the first base layer is more conductive than the first electrode layer.

20 . The electrode of claim 1 , wherein the first base layer is formed from a plurality of sublayers.

21 . The electrode of claim 1 , further comprising a second base layer, wherein the first electrode layer is located between the first base layer and the second base layer.

22 . The electrode of claim 1 , further comprising a second electrode layer, wherein the first base layer is located between the first electrode layer and the second electrode layer.

23 . An article comprising the electrode of claim 1 .

24 . A biosensor comprising an electrode, the electrode comprising:
a base layer made of a conductive metal or a conductive metal alloy or carbon; and an electrode layer formed adjacent to the base layer, the electrode layer comprising ruthenium metal, a ruthenium based metal alloy, nickel metal, or a nickel based metal alloy.

25 . A method of making a biosensor for measuring an analyte in a biological fluid, comprising:
producing a first electrode by:
forming an electrode base layer on the surface of a substrate, the base layer being formed from a conductive metal or a conductive metal alloy or carbon; and
forming an electrode layer on a surface of the electrode base layer, the electrode layer comprising ruthenium metal or a ruthenium based metal alloy or nickel metal or a nickel based metal alloy.

26 . The method of claim 25 , wherein the electrode base layer or the electrode top layer is formed by co-sputtering.

27 . The method of claim 25 , further comprising forming a reaction chamber in the substrate, the reaction chamber contacting the first electrode.

28 . The method of claim 25 , further comprising forming a reagent layer on the first electrode to form a working electrode.

29 . The method of claim 25 , wherein the first electrode operates as a reference electrode, and further comprising forming a second electrode on the substrate, and placing a

Assignees

• Materion Corp

Inventors

• Fontaine Ethan
• Farquharson Jerome

Classifications

• C23C14/205 Primary

  by cathodic sputtering · CPC title

• G01N27/308

  at least partially made of carbon · CPC title

• C22C30/00

  Alloys containing less than 50% by weight of each constituent · CPC title

• C22C19/03

  based on nickel · CPC title

• C22C5/04 Primary

  Alloys based on a platinum group metal · CPC title