Porous Solid Materials and Methods for Fabrication

Patent metadata

Field	Value
Publication number	US-2021174982-A1
Application number	US-201816616804-A
Country	US
Kind code	A1
Filing date	Jul 10, 2018
Priority date	Jul 18, 2017
Publication date	Jun 10, 2021
Grant date	—

Abstract

Porous solid materials are provided. The porous solid materials include a plurality of interconnected wires forming an ordered network. The porous solid materials may have a predetermined volumetric surface area ranging between 2 m 2 /cm 3 and 90 m 2 /cm 3 , a predetermined porosity ranging between 3% and 90% and an electrical conductivity higher than 100 S/cm. The porous solid materials may have a predetermined volumetric surface area ranging between 3 m 2 /cm 3 and 72 m 2 /cm 3 , a predetermined porosity ranging between 80% and 95% and an electrical conductivity higher than 100 S/cm. The porous solid materials ( 100 ) may have a predetermined volumetric surface area ranging between 3 m 2 /cm 3 and 85 m 2 /cm 3 , a predetermined porosity ranging between 65% and 90% and an electrical conductivity higher than 2000 S/cm. Methods for the fabrication of such porous solid materials and devices including such porous solid material are also disclosed.

First claim

1 . A porous solid material comprising a plurality of interconnected wires, the plurality of interconnected wires forming an ordered network, wherein the porous solid material has any of:
a predetermined volumetric surface area ranging between 2 m 2 /cm 3 and 90 m 2 /cm 3 , a predetermined porosity ranging between 3% and 90% and an electrical conductivity higher than 100 S/cm; or a predetermined volumetric surface area ranging between 3 m 2 /cm 3 and 72 m 2 /cm 3 , a predetermined porosity ranging between 80% and 95% and an electrical conductivity higher than 100 S/cm; or a predetermined volumetric surface area ranging between 3 m 2 /cm 3 and 85 m 2 /cm 3 , a predetermined porosity ranging between 65% and 90% and an electrical conductivity higher than 2000 S/cm.

2 . The porous solid material according to claim 1 , wherein the porous solid material has any of:
a predetermined volumetric surface area ranging between 2 m 2 /cm 3 and 90 m 2 /cm 3 , a predetermined porosity ranging between 3% and 90% and an electrical conductivity higher than 100 S/cm an electrical conductivity higher than 1000 S/cm; or a predetermined volumetric surface area ranging between 3 m 2 /cm 3 and 72 m 2 /cm 3 , a predetermined porosity ranging between 80% and 95% and an electrical conductivity higher than 1000 S/cm.

3 . The porous solid material according to claim 1 , wherein the porous solid material has an electrical conductivity higher than 5000 S/cm.

4 . The porous solid material according to claim 1 , wherein the plurality of interconnected wires comprises a metal, a metal alloy or a semiconductor material.

5 . The porous solid material according to claim 1 , wherein the plurality of interconnected wires comprises Ni, Cu, Au or Pt.

6 . The porous solid material according to claim 1 , wherein the porous solid material comprises a plurality of pores having a pore size ranging between 2 nm and 450 nm, wherein the porous solid material has a pore size distribution with a standard deviation a that is smaller than 30% of an average pore size of the porous solid material.

7 . The porous solid material according to claim 1 , wherein the plurality of interconnected wires form an ordered network comprising a plurality of first wires having a first longitudinal direction and a plurality of second wires having a second longitudinal direction different from the first longitudinal direction, wherein the plurality of first wires and the plurality of second wires are arranged according to a regular pattern with a predetermined average interwire distance between adjacent wires and wherein the plurality of first wires and the plurality of second wires have a predetermined average wire diameter.

8 . The porous solid material according to claim 7 , wherein the predetermined average wire diameter is in the ranges between 20 nm and 500 nm and wherein the predetermined average interwire distance ranges between 40 nm and 500 nm.

9 . The porous solid material according to claim 7 , wherein a ratio between the predetermined average interwire distance and the predetermined average wire diameter ranges between 1.1 and 10.

10 . The porous solid material according to claim 7 , wherein a ratio between the predetermined average interwire distance and the predetermined average wire diameter ranges between 1.2 and 3.

11 . The porous solid material according to claim 7 , wherein a ratio between the predetermined average interwire distance and the predetermined average wire diameter ranges between 1.4 and 2.

12 . A method for fabricating a porous solid material comprising a plurality of interconnected wires, the plurality of interconnected wires forming an ordered network comprising a plurality of first wires having a first longitudinal direction and a plurality of second wires having a second longitudinal direction different from the first longitudinal direction, wherein the plurality of first wires and the plurality of second wires are arranged according to a regular pattern with a predetermined average interwire distance between adjacent wires, and wherein the plurality of first wires and the plurality of second wires have a predetermined average wire diameter, wherein the method comprises:
(a) fabricating a template comprising a plurality of interconnected channels, the fabricating the template comprising: (i) performing a first anodization step of a doped valve metal layer at a predetermined anodization voltage, thereby anodizing at least part of the valve metal layer in a thickness direction and thereby forming a porous layer of valve metal oxide comprising a plurality of interconnected channels, the plurality of interconnected channels forming an ordered network comprising a plurality of first channels having the first longitudinal direction and a plurality of second channels having the second longitudinal direction, wherein the plurality of first channels and the plurality of second channels are arranged according to a regular pattern having the predetermined average interwire distance between adjacent channels, and wherein the plurality of first channels and the plurality of second channels have an average channel width, each channel having channel walls, the plurality of first channels having a channel bottom, the channel bottoms being coated with a first insulating metal oxide barrier layer as a result of the first anodization step; (ii) performing a protective treatment of the porous layer of valve metal oxide, thereby inducing hydrophobic surfaces to the channel walls and channel bottoms; (iii) performing a second anodization step at the predetermined anodization voltage after the protective treatment, thereby substantially removing the first insulating metal oxide barrier layer from the channel bottoms, inducing anodization only at the bottoms of the plurality of first channels and creating a second insulating metal oxide barrier layer at the channel bottoms; and (iv) performing an etching step in an etching solution, thereby removing the second insulating metal oxide barrier layer from the channel bottoms without thereby substantially increasing the average channel width; (b) afterward depositing a solid material within the plurality of interconnected channels of the template; and (c) afterward removing the template to thereby obtain the porous solid material.

13 . The method for fabricating a porous solid material according to claim 12 , wherein fabricating the template further comprises, if the average channel width is smaller than the predetermined average wire diameter: before depositing the solid material, performing an etching step in a diluted acid solution to thereby increase the average channel width of the plurality of channels to an increased average channel width substantially equal to the predetermined average wire diameter.

14 . The method for fabricating a porous solid material according claim 12 , further comprising, if the average channel width is larger than the predetermined average wire diameter: after removing the template, performing a chemical etching step or an electropolishing step to thereby reduce an average diameter of the plurality of wires to the predetermined average wire diameter.

15 . A device comprising a porous solid material according to claim 1 .

16 . The device according to claim 15 , wherein the porous solid material has any of:
a predetermined volumetric surface area ranging between 2 m 2 /cm 3 and 90 m 2 /cm 3 , a predetermined porosity ranging between 3% and 90% and an electrical conductivity higher than 100 S/cm; or a predetermined volumetric surface area ranging between 3 m 2

Assignees

• Imec Vzw
• Univ Leuven Kath

Inventors

• Zankowski Stanislaw Piotr
• Vereecken Philippe M

Classifications

• C25D1/006 Primary

  Nanostructures, e.g. using aluminium anodic oxidation templates [AAO] · CPC title

• C25D11/24

  Chemical after-treatment · CPC title

• Y02E60/10

  Energy storage using batteries · CPC title

• C25D3/12

  of nickel or cobalt · CPC title

• B82Y30/00

  Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title