Sintering press and pressure sintering method for producing a sintered connection by means of the sintering press

Patent metadata

Field	Value
Publication number	US-2021121962-A1
Application number	US-202017021799-A
Country	US
Kind code	A1
Filing date	Sep 15, 2020
Priority date	Oct 23, 2019
Publication date	Apr 29, 2021
Grant date	—

Abstract

A sintering press for producing a sintered connection between a first connection partner and a second connection partner disposed thereabove, having a suction-fixing installation for fixing the first connection partner, having a compression piece which is disposed above the suction-fixing installation. The sintering press for producing the sintered connection is configured for converging the compression piece and the suction-fixing installation relative to one another and for mutually compressing the first connection partner and the second connection partner, wherein the suction-fixing installation on the side thereof that faces the compression piece has first suction openings, wherein the suction-fixing installation, when the first connection partner is disposed above the first suction openings, by generating a negative pressure at the first suction openings, is configured for suctioning the first connection partner and, on account thereof, for fixing the latter in relation to the suction-fixing installation. The invention furthermore relates to a pressure sintering method for producing a sintered connection by the sintering press.

First claim

What is claimed is:

1 . A sintering press for producing a sintered connection between a first connection partner ( 5 ) and a second connection partner ( 6 ) disposed thereabove, having a suction-fixing installation ( 3 ) for fixing the first connection partner ( 5 ), having a compression piece ( 10 ) which is disposed above the suction-fixing installation ( 3 ), wherein:
said sintering press ( 1 ) for producing the sintered connection, when the first connection partner ( 5 ) and the second connection partner ( 6 ) are disposed between the compression piece ( 10 ) and the suction-fixing installation ( 3 ), is configured for converging the compression piece ( 10 ) and the suction-fixing installation ( 3 ) relative to one another and, on account thereof, for mutually compressing the first connection partner ( 5 ) and the second connection partner ( 6 ); the suction-fixing installation ( 3 ) on the side ( 3 a ) thereof that faces the compression piece ( 10 ) has first suction openings ( 9 ); the suction-fixing installation ( 3 ), when the first connection partner ( 5 ) is disposed above the first suction openings ( 9 ), by means of generating a negative pressure at the first suction openings ( 9 ), is configured for suctioning the first connection partner ( 5 ) and, on account thereof, for fixing the latter in relation to the suction-fixing installation ( 3 ).

2 . The sintering press according to claim 1 , wherein:
the suction-fixing installation ( 3 ) is disposed on a compression counterpart ( 11 ) of the sintering press ( 1 ), or is an integral component part of a compression counterpart ( 11 ) of the sintering press ( 1 ).

3 . The sintering press according to claim 1 , wherein:
the respective cross-sectional area of the first suction openings ( 9 ) is 0.007 mm2 to 3.2 mm 2 , in particular 0.03 mm 2 to 1.8 mm2.

4 . The sintering press according to claim 3 , wherein:
the side ( 3 a ) of the suction-fixing installation ( 3 ) that faces the compression piece ( 10 ) has an in particular rectangular fixing region ( 14 ); and wherein the first suction openings ( 9 ) are disposed within the fixing region ( 14 ), wherein at least some ( 9 ′) of the first suction openings ( 9 ) are disposed in a peripheral region ( 14 c ) of the fixing region ( 14 ) or are disposed in a central region of the fixing region ( 14 ).

5 . The sintering press according to claim 4 , wherein:
the side ( 3 a ) of the suction-fixing installation ( 3 ) that faces the compression piece ( 10 ) has a rectangular fixing region ( 14 ); and wherein the number of first suction openings ( 9 ) in the corner regions ( 14 b ) of the fixing region ( 14 ) is increased in comparison to other regions of the fixing region ( 14 ).

6 . The sintering press according to claim 5 , wherein:
the sintering press ( 1 ) has a suction gripper ( 22 ) which, by means of generating a negative pressure at the suction openings ( 24 ) thereof, is configured for (i) thinly holding the first connection partner ( 5 ) directly or indirectly on said suction gripper ( 22 ) and, prior to the pressing procedure, for disposing the first connection partner ( 5 ) conjointly with the second connection partner ( 6 ) disposed above the first connection partner ( 5 ) in the space between the compression piece ( 10 ) and the suction-fixing installation ( 3 ) and after the pressing procedure, for (ii) removing said first connection partner ( 5 ) conjointly with said second connection partner ( 6 ) from said space again.

7 . The sintering press according to claim 6 , wherein:
the sintering press ( 1 ) for producing the sintered connection, when the first connection partner ( 5 ) and the second connection partner ( 6 ) are disposed between the compression piece ( 10 ) and the suction-fixing installation ( 3 ) and the first connection partner ( 5 ) is disposed directly on the suction-fixing installation ( 3 ), and is configured for converging the compression piece ( 10 ) and the suction-fixing installation ( 3 ) relative to one another and, on account thereof, for mutually compressing the first connection partner ( 5 ) and the second connection partner ( 6 ); wherein the suction-fixing installation ( 3 ) on the side ( 3 a ) thereof that faces the compression piece ( 10 ) has first suction openings ( 9 ); and wherein the suction-fixing installation ( 3 ), when the first connection partner ( 5 ) is disposed above the first suction openings ( 9 ) so as to be directly on the suction-fixing installation ( 3 ), by means of generating a negative pressure at the first suction openings ( 9 ), is configured for suctioning the first connection partner ( 5 ) and, on account thereof, for fixing the latter in relation to the suction-fixing installation ( 3 ).

8 . The sintering press according to claim 7 , wherein:
the suction-fixing installation ( 3 ) on the side ( 3 a ) thereof that faces the compression piece ( 10 ) has at least one second suction opening ( 15 ) for suctioning a film portion ( 4 a ) of a film ( 4 ) when the film portion ( 4 a ) is disposed above the first connection partner ( 5 ) and the second connection partner ( 6 ) and above the at least one second suction opening ( 15 ); wherein the at least one second suction opening ( 15 ) is disposed in such a manner that the first connection partner ( 5 ), when the first connection partner ( 5 ) is disposed above the first suction openings ( 9 ), is not disposed above the at least one second suction opening ( 15 ); and wherein the suction-fixing installation ( 3 ), when the film portion ( 4 a) is disposed above the at least one second suction opening ( 15 ), by means of generating a negative pressure at the at least one second suction opening ( 15 ), is configured for suctioning the film portion ( 4 a ) and, on account thereof, for fixing the first connection partner ( 5 ) in relation to the suction-fixing installation ( 3 ) by way of the film portion ( 4 a ).

9 . The sintering press according to claim 8 , wherein:
a plurality of elastic delimitation elements ( 13 ) are disposed on the side ( 3 a ) of the suction-fixing installation ( 3 ) that faces the compression piece ( 10 ); said delimitation elements ( 13 ), when the first connection partner ( 5 ) is disposed directly on the suction-fixing installation ( 3 ), delimit or prevent a movement of the first connection partner ( 5 ) in a direction perpendicular to the normal direction (N 1 ) of the side ( 3 a ) of the suction-fixing installation ( 3 ) that faces the compression piece ( 10 ).

10 . The sintering press according to claim 6 , wherein:
when the first connection partner ( 5 ) and the second connection partner ( 6 ) are disposed between the compression piece ( 10 ) and the suction-fixing installation ( 3 ) and the first connection partner ( 5 ) is disposed directly on a workpiece carrier ( 17 ) and has a plurality of passage openings ( 16 ) so as to be above the passage openings ( 16 ) and the workpiece carrier ( 17 ) is disposed directly on the suction-fixing installation ( 3 ), is configured for converging the compression piece ( 10 ) and the suction-fixing installation ( 3 ) relative to one another for mutually compressing the first connection partner ( 5 ) and the second connection partner ( 6 ); wherein the suction-fixing installation ( 3 ) on the side ( 3 a ) thereof that faces the compression piece ( 10 ) has first suction openings ( 9 ); and wherein the suction-fixing installation ( 3 ), when the first connection partner ( 5 ) is disposed directly on a workpiece carrier ( 17 ) has a plurality of passage ducts ( 16 ) so as to be above the passage ducts ( 16 ) and the workpiece carrier ( 17 ) is disposed directly on the suction-fix

Assignees

• Semikron Elektronik Gmbh & Kg
• Semikron Elektronik Gmbh & Co Kg

Inventors

• Birkicht Dominic
• Heinrich Juri
• Franz Thomas
• Ludwig Rudi
• Kraft Silke
• Michaelsen Erik
• Weickmann Johannes

Classifications

• H10W72/07141

  Means for applying energy, e.g. ovens or lasers · CPC title

• H10W72/07331

  Connecting techniques · CPC title

• H10W72/07332

  Compression bonding, e.g. thermocompression bonding · CPC title

• H10W72/07188

  Apparatus chuck · CPC title

• H10W72/07178

  Means for aligning · CPC title