Vapor deposition apparatus, method of forming thin film by using vapor deposition apparatus, and method of manufacturing organic light emitting display apparatus
US-9224612-B2 · Dec 29, 2015 · US
US2021062332A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2021062332-A1 |
| Application number | US-201915733779-A |
| Country | US |
| Kind code | A1 |
| Filing date | Apr 18, 2019 |
| Priority date | Apr 25, 2018 |
| Publication date | Mar 4, 2021 |
| Grant date | — |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
A permanently curved component consists of a coated substrate. The substrate is deformable, and the coating consists of multiple layers which are deposited one over another and each of which has layer elements lying adjacent to one another on a plane. The layer elements from adjacent layers are weakly connected together such that the layer elements can move relative to each other upon deforming the coated substrate. In order to produce such a component, the layer elements which lie one over another and which can consist of graphene are first deposited, and then the coated component is deformed such that a closed layer remains.
Opening claim text (preview).
What is claimed is: 1 . A permanently curved component comprising: a substrate ( 5 ) that is coated with a coating and is deformable; and the coating, wherein the coating comprises multiple layers ( 1 , 2 , 3 , 4 ) which are deposited one over another, wherein each of the layers includes layer elements ( 11 , 12 , 13 , 14 ) that lie adjacent to one another in a plane, wherein the layer elements ( 11 , 12 , 13 , 14 ) from adjacent ones of the layers ( 1 , 2 , 3 , 4 ) weakly connected together such that the layer elements ( 11 , 12 , 13 , 14 ) from the adjacent layers are able to move relative to each other when the coated substrate ( 5 ) is deformed. 2 . A method for producing deformed, coated components, the method comprising: depositing a coating on a substrate ( 5 ), wherein the coating comprises multiple layers ( 1 , 2 , 3 , 4 ) which are arranged one over another and each has layer elements ( 11 , 12 , 13 , 14 ) that lie adjacent to one another in a plane, and wherein the layer elements ( 11 , 12 , 13 , 14 ) from adjacent ones of the layers ( 1 , 2 , 3 , 4 ) are weakly connected together such that the layer elements ( 11 , 12 , 13 , 14 ) from the adjacent layers are able to move relative to each other when the substrate ( 5 ) is deformed; and deforming the coated substrate ( 5 ) to produce a permanently deformed component. 3 . The permanently curved component of claim 1 , wherein at least one of: the substrate ( 5 ) is a thin metal sheet or a wire, the substrate ( 5 ) consists of Fe, Ni, Co or Cu, the substrate ( 5 ) consists of an alloy with at least Fe, Ni, Co or Cu, or the substrate ( 5 ) is a coated metal. 4 . The permanently curved component of claim 1 , wherein the layers ( 1 , 2 , 3 , 4 ) and/or the layer elements ( 11 , 12 , 13 , 14 ) consist of two-dimensional crystals. 5 . The permanently curved component of claim 1 , wherein a lateral surface extension of each of the layer elements ( 11 , 12 , 13 , 14 ) is larger than a layer thickness thereof. 6 . The permanently curved component of claim 1 , wherein the layer elements ( 11 , 12 , 13 , 14 ) of ones of the layers ( 1 , 2 , 3 , 4 ) that are different from each other are slidably superposed on each other and/or overlap such that even after bending, a surface of the substrate ( 5 ) is completely coated with the layer elements ( 11 , 12 , 13 , 14 ). 7 . The permanently curved component of claim 1 , further comprising distance zones ( 21 , 22 , 23 , 24 ) arranged between the layer elements ( 11 , 12 , 13 , 14 ) of a respective one of the layers ( 1 , 2 , 3 , 4 ), wherein the distance zones ( 21 ) of a first one of the layers ( 1 ) deposited directly on the substrate ( 5 ) are covered by each of at least one layer element ( 12 , 13 , 14 ) of one of the layers ( 4 ) deposited over the first layer ( 1 ). 8 . The permanently curved component of claim 1 , wherein the layers ( 1 , 2 , 3 , 4 ) are composed of graphene, a group IV element, BN, or a compound with chemical composition MX 2 wherein M is a transition metal and X is a group-VI element. 9 . The permanently curved component of claim 1 , wherein at least one of: a layer thickness of each of the layers ( 1 , 2 , 3 , 4 ) is less than 2 nm, a circle-equivalent diameter of each of the layer elements ( 11 , 12 , 13 , 14 ) is between 1 μm and 10 mm, or a total number of the layers is between 2 to 200 inclusive. 10 . The method of claim 2 , wherein at least one of: a chemical gas phase coating chemical vapor deposition (CVD) is used for depositing the layers, two different process gases are used in a vapor deposition, or heat is supplied to the substrate ( 5 ). 11 . The permanently curved component of claim 1 , wherein the deformation is at least one of a three-dimensional deformation, a bending, a stretching or a compression. 12 . The permanently curved component of claim 1 , wherein at least one of: the coating increases an electrical conductivity of the substrate ( 5 ), the coating increases a chemical resistance of the substrate ( 5 ), the coating changes a tribological property of a surface of the substrate ( 5 ), the coating is electrically conductive or electrically insulating, or a bending radius of bending lines of the coated substrate ( 5 ) lies in a range between 0.1 to 5 mm. 13 . The permanently curved component of claim 1 , wherein the permanently curved component is at least one of: a housing, an electrode of a battery, or an electrode of a rechargeable battery. 14 . A method for producing a coated component, the method comprising: depositing a coating on a deformable substrate ( 5 ), wherein the coating comprises multiple layers ( 1 , 2 , 3 , 4 ) arranged one over another, each of the layers having multiple unconnected layer elements ( 11 , 12 , 13 , 14 ) that lie adjacent to each other in a plane and have a two-dimensional character, and wherein the layer elements ( 11 , 12 , 13 , 14 ) of adjacent ones of the layers are connected to each other via Van der Waals forces; and deforming the coated substrate ( 5 ) to produce a permanently deformed component, wherein a total number of the layers ( 1 , 2 , 3 , 4 ) is selected such that after the deformation, during which the layer elements ( 11 , 12 , 13 , 14 ) move relative to each other, no open areas of the substrate ( 5 ) are left, wherein deforming the coated substrate ( 5 ) comprises bending the coated substrate ( 5 ) with a bending radii between 0.1 mm and 5 mm. 15 . (canceled) 16 . The method of claim 2 , wherein the layers ( 1 , 2 , 3 , 4 ) and/or the layer elements ( 11 , 12 , 13 , 14 ) consist of two-dimensional crystals. 17 . The method of claim 2 , wherein a lateral surface extension of each of the layer elements ( 11 , 12 , 13 , 14 ) is larger than a layer thickness thereof. 18 . The method of claim 2 , wherein the layers ( 1 , 2 , 3 , 4 ) are composed of graphene, a group-IV element, BN, or a compound with chemical composition MX 2 , wherein M is a transition metal and X is a group-VI element. 19 . The method of claim 2 , wherein at least one of: a layer thickness of each of the layers ( 1 , 2 , 3 , 4 ) is less than 2 nm, a circle-equivalent diameter of each of the layer elements ( 11 , 12 , 13 , 14 ) is between 1 μm and 10 mm, or a total number of the layers is between 2 to 200 inclusive. 20 . The method of claim 2 , wherein the deformation is at least one of a three-dimensional deformation, a bending, a stretching or a compression. 21 . The method of claim 2 , wherein at least one of: the coating increases an electrical conductivity of the substrate ( 5 ), the coating increases a chemical resistance of the substrate ( 5 ), the coating changes a tribological property of a surface of the substrate ( 5 ), the coating is electrically conductive or electrically insulating, or a bending radius of bending lines of the coated substrate ( 5 ) lies in a range between 0.1 to 5 mm.
Composite material consisting of a mixture of organic and inorganic materials · CPC title
Energy storage using batteries · CPC title
Sulfides, selenides, or tellurides · CPC title
Boron nitride · CPC title
Sputtering · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.