Single crystal, die for efg apparatus, efg apparatus, method for manufacturing single crystal, and method for manufacturing single crystal member

Patent metadata

Field	Value
Publication number	US-2021017667-A1
Application number	US-201816769745-A
Country	US
Kind code	A1
Filing date	Dec 6, 2018
Priority date	Dec 7, 2017
Publication date	Jan 21, 2021
Grant date	—

Abstract

A single crystal of the present disclosure is a plate-shaped body having two main surfaces that are opposite to each other, and has bubbles arranged in a plurality of line shapes parallel to the main surface in a region within a depth of 0.5 mm from either one of the main surfaces. Additionally, a single crystal of the present disclosure is a plate-shaped body having two main surfaces that are opposite to each other, and has bubbles arranged in a plurality of line shapes parallel to the main surface within a region from either one of the main surfaces to ¼ of the thickness which is a distance between the main surfaces.

First claim

1 . A single crystal comprising a plate-shaped body having two main surfaces opposite to each other, wherein
the plate-shaped body comprises bubbles arranged in a plurality of line shapes parallel to the main surface in a region within a depth of 0.5 mm from either one of the main surfaces.

2 . The single crystal according to claim 1 , wherein a bubble density in the region within a depth of 0.5 mm from either one of the main surfaces is larger than that in a region apart from a depth of 0.5 mm or more from the main surface.

3 . The single crystal according to claim 1 , wherein the bubbles are arranged in each of the regions within a depth of 0.5 mm from the two main surfaces.

4 . The single crystal according to claim 1 , wherein the bubbles are arranged in a region within a depth of 0.3 mm from the two main surfaces.

5 . The single crystal according to claim 1 , wherein the bubbles are arranged within a region from the main surfaces to ¼ of the thickness which is a distance between the main surfaces.

6 . A single crystal comprising a plate-shaped body having two main surfaces opposite to each other, wherein
the plate-shaped body comprises bubbles arranged in a plurality of line shapes parallel to the main surface within a region from either one of the main surfaces to ¼ of the thickness which is a distance between the main surfaces.

7 . The single crystal according to claim 6 , wherein a bubble density within a region from either one of the main surfaces to ¼ of the thickness which is a distance between the main surfaces is larger than a bubble density in a region that is more than ¼ of the thickness, which is a distance between the main surfaces, away from either one of the main surfaces.

8 . The single crystal according to claim 6 , wherein the bubbles are arranged in each of the regions from the two main surfaces to ¼ of the thickness which is a distance between the main surfaces.

9 . The single crystal according to claim 1 , wherein the material is sapphire.

10 . A die for an EFG apparatus comprising:
two outer surfaces, at least one slit disposed between the outer surfaces and providing a melt, and two upper surfaces connecting an inner surface of the slit and the outer surfaces, wherein an angle θ formed by the upper surface and a virtual surface perpendicular to the outer surfaces is 60° or more and 85° or less.

11 . The die for the EFG apparatus according to claim 10 , wherein the angle θ of the upper surface is fixed.

12 . A die for an EFG apparatus comprising:
two outer surfaces, at least one slit disposed between the outer surfaces and providing a melt, and two upper surfaces connecting an inner surface of the slit and the outer surfaces, wherein the upper surface comprises a first region connecting to the inner surface of the slit, and a second region connecting to the outer surface, wherein an angle θ 1 formed by the first region and a virtual surface perpendicular to the outer surface is smaller than an angle θ 2 formed by the second region and a virtual surface perpendicular to the outer surface.

13 . The die for the EFG apparatus according to claim 12 , wherein the angle θ 1 is 0° or more and 30° or less.

14 . The die for the EFG apparatus according to claim 12 , wherein the angle θ 1 is fixed in the first region.

15 . The die for the EFG apparatus according to claim 12 , wherein the angle θ 2 is 60° or more and 85° or less.

16 . The die for the EFG apparatus according to claim 12 , wherein the angle θ 2 is fixed in the second region.

17 . The die for the EFG apparatus according to claim 12 , wherein a thickness of the first region is larger than a thickness of the second region.

18 . The die for the EFG apparatus according to claim 12 , further comprising a third region, which has an angle θ 3 formed with the virtual surface, between the first region and the second region, wherein the angle θ 3 is larger than the angle θ 2 .

19 . The die for the EFG apparatus according to claim 18 , wherein the angle θ 3 is 70° or more and 90° or less.

20 . The die for the EFG apparatus according to claim 18 , wherein the angle θ 3 is fixed in the third region.

21 . The die for the EFG apparatus according to claim 18 , wherein a thickness of the third region is smaller than a thickness of the second region.

22 . The die for the EFG apparatus according to claim 10 for growing sapphire.

23 . An EFG apparatus comprising:
the die for the EFG apparatus according to claim 10 .

24 . A method of manufacturing a single crystal comprising:
a step for growing a single crystal by using the EFG apparatus according to claim 23 .

25 . A method of manufacturing a single crystal member comprising:
a step for removing at least a part of a surface region having bubbles of the single crystal according to claim 1 .

Assignees

• Kyocera Corp

Inventors

• Fukui Akeo
• Harada Masatoshi

Classifications

• C01P2004/60

  Particles characterised by their size · CPC title

• C01P2004/24

  Nanoplates, i.e. plate-like particles with a thickness from 1-100 nanometer · CPC title

• C01F7/02

  Aluminium oxide; Aluminium hydroxide; Aluminates · CPC title

• C01P2006/80

  Compositional purity · CPC title

• C30B29/64

  Flat crystals, e.g. plates, strips or discs · CPC title