Substrate heating device

Patent metadata

Field	Value
Publication number	US-2020413493-A1
Application number	US-202016892552-A
Country	US
Kind code	A1
Filing date	Jun 4, 2020
Priority date	Jun 28, 2019
Publication date	Dec 31, 2020
Grant date	—

Abstract

A substrate heating device is provided. The substrate heating device includes a vacuum chamber and a heater. The vacuum chamber receives a substrate. The heater includes a body, a heating wire, and a terminal part. The body penetrates through a wall of the vacuum chamber such that a portion of the body is in a vacuum atmosphere of the vacuum chamber. The heating wire is provided inside the body and partly disposed inside the vacuum chamber. The terminal part is connected to the heating wire and is disposed outside the vacuum chamber.

First claim

What is claimed is:

1 . A substrate heating device comprising:
a vacuum chamber that receives a substrate; and a heater comprising:
a body that penetrates through a wall of the vacuum chamber such that a portion of the body is in a vacuum atmosphere of the vacuum chamber;
a heating wire provided inside the body and partly disposed inside the vacuum chamber; and
a terminal part to which the heating wire is connected, the terminal part being disposed outside the vacuum chamber.

2 . The substrate heating device as recited in claim 1 , wherein the body is disposed to penetrate through a through-hole formed in the wall, and provided with a sealing member around an outer peripheral surface thereof, and
wherein the heating wire is configured such that an amount of heat generated by the heating wire at a first portion of the body penetrating through the through-hole is less than that at a second portion of the body disposed inside the vacuum chamber.

3 . The substrate heating device as recited in claim 2 , wherein the heating wire is configured such that an electrical resistance of the first portion is less than that of the second portion.

4 . The substrate heating device as recited in claim 3 , further comprising a light leakage suppressing member that is provided inside the body and that blocks light rays emitted from the heating wire.

5 . The substrate heating device as recited in claim 1 , further comprising a light leakage suppressing member that is provided inside the body and that blocks light rays emitted from the heating wire.

6 . The substrate heating device as recited in claim 4 , wherein a position of the light leakage suppressing member inside the body lies in a range from a height position of an inner wall surface of the wall to a height position at which the sealing member is provided.

7 . The substrate heating device as recited in claim 1 , wherein the body is provided with a protrusion protruding inwardly from an inner peripheral surface of a portion thereof that penetrates through the wall, and
wherein the substrate heating device further comprises a support member that is provided inside the body and that is attached to the heating wire while being supported by the protrusion.

8 . The substrate heating device as recited in claim 1 , wherein the body comprises a first end portion and a second end portion each penetrating through the wall, and an elongated portion that connects the first end portion to the second end portion and is bent from the first end portion and the second end portion and disposed inside the vacuum chamber.

9 . The substrate heating device as recited in claim 1 , wherein the body is a tube-shaped body.

10 . The substrate heating device as recited in claim 2 , wherein the body is a tube-shaped body and the sealing member is a ring-shaped sealing member.

11 . A substrate heating device comprising:
a vacuum chamber that receives a substrate; and a heater comprising:
a body that penetrates a wall of the vacuum chamber, a first portion of the body being disposed in the vacuum chamber;
a heating wire provided inside the body; and
a terminal part to which the heating wire is connected, the terminal part being disposed outside the vacuum chamber.

12 . The substrate heating device as recited in claim 11 , wherein the body comprises a second portion disposed outside the wall.

13 . The substrate heating device as recited in claim 12 , wherein the terminal part is provided at a distal end of the second portion.

14 . The substrate heating device as recited in claim 11 , further comprising a sealing member provided around an outer periphery of the body that seals the first portion to maintain the first portion in a vacuum atmosphere of the vacuum chamber.

15 . The substrate heating device as recited in claim 11 , further comprising a metal plate that is provided inside the body and that blocks light rays emitted from the heating wire.

16 . The substrate heating device as recited in claim 11 , further comprising a plurality of support members that support the heating wire within the body to space the heating wire away from a wall of the body.

17 . A substrate heating device comprising:
a vacuum chamber that receives a substrate; and a heating device including a plurality of heaters, each comprising:
a body that penetrates a wall of the vacuum chamber, a first portion of the body being disposed in the vacuum chamber;
a heating wire provided inside the body; and
a terminal part to which the heating wire is connected, the terminal part being disposed outside the vacuum chamber.

Assignees

• Nissin Ion Equipment Co Ltd
• Himeji Rika Co Ltd

Inventors

• Onoda Masatoshi
• Goto Ryosuke
• Shimizu Kazuo
• Kishimoto Yasuhiro

Classifications

• H10P72/0436 Primary

  mainly by radiation · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/0471

  comprising at least one ion or electron beam chamber · CPC title

• H05B3/02

  Details · CPC title

• H01J37/3002

  Details · CPC title