Devices and methods to measure small displacements

Patent metadata

Field	Value
Publication number	US-2020378752-A1
Application number	US-201716071089-A
Country	US
Kind code	A1
Filing date	Jan 19, 2017
Priority date	Jan 20, 2016
Publication date	Dec 3, 2020
Grant date	—

Abstract

Methods, devices and apparatus for measuring expansion/contraction properties of a material are described. According to an embodiment a method comprises: providing a device, said device comprising a sample comprising said material, said sample comprising a first surface and a second surface, a first substrate and a second substrate connected to said first surface and to said second surface of said sample, respectively, a reflective material attached to said second substrate, and two electrical contacts each independently in contact with said sample; applying voltage to said sample using said electrical contacts; illuminating said reflective material using a light source, such that said illumination comprises light having known and controllable polarization; collecting light reflected off said reflective material; measuring amplitude and phase of an oscillating change in polarization of the reflected light; and extracting parameters related to expansion/contraction from said reflected light measurement, thus evaluating said expansion/contraction properties of said material.

First claim

What is claimed is:

1 . A device for the measurement of expansion/contraction properties of a material, said device comprising:
a first sample comprising a first material, said sample comprising a first surface and a second surface; a first substrate and a second substrate, connected to said first surface and to said second surface of said first sample respectively; a second sample comprising a second material in contact with said second substrate; a third substrate connected to said second sample; a reflective material in contact with said third substrate.

2 . The device of claim 1 , further comprising an adhesive in contact with said third substrate and in contact with said reflective material such that said reflective material is attached to said third substrate via said adhesive material.

3 . The device of claim 1 , further comprising a first set of two electrical contacts each independently is in contact with said first sample and a second set of two electrical contacts each independently is in contact with said second sample.

4 . The device of claim 1 , further comprising a heating source for heating said first sample, said second sample or a combination thereof.

5 . The device of claim 4 , wherein said heating source comprises IR laser.

6 . The device of claim 1 , wherein one of said first material and said second material possesses known expansion/contraction properties and another of said first material and said second material possesses un-known expansion/contraction properties.

7 . The device of claim 1 , wherein said first material and said second material possess piezoelectric properties, electrostriction properties, thermal expansion properties or a combination thereof.

8 . The device of claim 1 , wherein said reflective material is reflective at a wavelength of 632.8 nm.

9 . (canceled)

10 . The device of claim 1 , wherein the thickness of said sample ranges between 1 nanometer to 100 millimeters.

11 . The device of claim 1 , wherein the thickness of said substrate ranges between 10 micrometers to 100 millimeter.

12 . The device of claim 2 , wherein the thickness of said adhesive ranges between from 1 nanometer to 1 millimeter.

13 . The device of claim 3 , wherein the thickness of said electrical contacts ranges between from 1 nanometer to 10 millimeters.

14 . The device of claim 2 , wherein said adhesive material comprises modeling clay.

15 . The device of claim 1 , wherein said first substrate, second substrate or a combination thereof comprises alumina.

16 . The device of claim 3 , wherein said electrical contacts comprise Ag, Au, Cu, Pd, Pt, Sn or a combination thereof.

17 . The device of claim 16 , wherein said electrical contacts comprise conductive paint such as silver paint.

18 . A method of measuring expansion/contraction properties of a material, said method comprising:
providing a device comprising:
a sample comprising said material, said sample comprising a first surface and a second surface;
a first substrate and a second substrate, connected to said first surface and to said second surface of said sample respectively;
a reflective material attached to said second substrate;
optionally two electrical contacts, each independently is in contact with said sample;
optionally a heating source for heating said sample;
optionally applying voltage to said sample using said electrical contacts; optionally heating said sample; illuminating said reflective material using a light source, such that said illumination comprises light having known and controllable polarization; collecting light reflected off said reflective material; measuring amplitude and phase of the oscillating change in polarization of the reflected light; extracting parameters related to expansion/contraction from said reflected light measurement, thus evaluating said expansion/contraction properties of said material.

19 . The method of claim 18 , wherein said device further comprising an adhesive in contact with said second substrate and in contact with said reflective material such that said reflective material is attached to said second substrate via said adhesive material.

20 . The method of claim 18 , wherein said light source is a He—Ne laser.

21 . The method of claim 18 , wherein said collecting said reflected light is done using a detector.

22 . The method of claim 18 , wherein said method allows qualitative evaluation of said expansion/contraction properties.

23 . A method of measuring expansion/contraction properties of a material, said method comprising:
providing a device comprising:
a first sample comprising a first material, said sample comprising a first surface and a second surface;
a first substrate and a second substrate, connected to said first surface and to said second surface of said sample respectively;
a second sample comprising a second material in contact with said second substrate;
a third substrate connected to said second sample;
a reflective material in contact with said third substrate;
optionally, a first set of two electrical contacts each independently is in contact with said first sample and a second set of two electrical contacts each independently is in contact with said second sample;
optionally a heating source for heating said first sample, said second sample or a combination thereof,
measuring said first sample, said measurement comprising:
optionally applying voltage to said first sample using said electrical contacts;
optionally heating said first sample using said heating source;
illuminating said reflective material with a light source, such that said illumination comprises light having known and controllable polarization;
collecting light reflected off said reflective material;
measuring amplitude and phase of the oscillating change in polarization of the reflected light;
extracting parameters related to expansion/contraction from said reflected light measurement, thus evaluating said expansion/contraction properties of said first material.
measuring said second sample, said measurement comprising:
optionally applying voltage to said second sample using said electrical contacts;
optionally heating said second sample using said heating source;
illuminating said reflective material with a light source;
collecting light reflected off said reflective material;
measuring amplitude and phase of the oscillating change in polarization of the reflected light;
extracting parameters related to expansion/contraction from said reflected light measurement, thus evaluating said expansion/contraction properties of said second material.
comparing parameters extracted from said first sample measurement to parameters extracted from said second sample measurement, thus evaluating said expansion/contraction properties of said first material, said second material or a combination thereof.

24 . The method of claim 23 , wherein said device further comprising an adhesive in contact with said third substrate and in contact with said reflective material such that said reflective material is attached to said third substrate via said adhesive material.

25 . The method of claim 23 , wherein said step of measuring said second sample is conducted prior to the step of measuring said first sample.

26 . The method of claim 23 , wherein one of said first material and said second material posse

Assignees

• Yeda Res & Dev

Inventors

• Lubomirsky Igor
• Lazovski Guy

Classifications

• G01B11/168 Primary

  by means of polarisation · CPC title

• G01N2021/1729

  Piezomodulation · CPC title

• G01N21/211 Primary

  Ellipsometry (optical thickness measurement G01B11/06) · CPC title

• G01N25/16

  by investigating thermal coefficient of expansion · CPC title

• G01R29/22

  Measuring piezoelectric properties · CPC title