Roll stamp for imprint device, and manufacturing method therefor

Patent metadata

Field	Value
Publication number	US-2020355998-A1
Application number	US-201816764483-A
Country	US
Kind code	A1
Filing date	Nov 15, 2018
Priority date	Nov 20, 2017
Publication date	Nov 12, 2020
Grant date	—

Abstract

The present invention relates to a roll stamp and a method of manufacturing the same, the roll stamp including a cylindrical metal mold including a debossed pattern formed on an outer side and a hollow portion formed on an inner side, and a dummy roller inserted into the hollow portion. Because a joining portion is not formed on the entire area of the cylindrical metal mold, a problem in which edge regions are separated does not occur. Also, due to the absence of the joining portion, it is possible to perform a patterning process continuously.

First claim

1 . A method of manufacturing a roll stamp, the method comprising:
manufacturing a second resin mold including a third embossed pattern; manufacturing a cylindrical resin mold by rolling the second resin mold so that the third embossed pattern is placed on an inner circumference side; forming a third electroplating layer having a cylindrical shape on an inner circumference of the cylindrical resin mold; manufacturing a cylindrical metal mold including a third debossed pattern formed on an outer side and a hollow portion formed on an inner side by separating the third electroplating layer having a cylindrical shape from the cylindrical resin mold; and inserting a dummy roller into the hollow portion of the cylindrical metal mold.

2 . The method of claim 1 , wherein the inserting of the dummy roller into the hollow portion of the cylindrical metal mold is performed by a shrink-fitting process.

3 . The method of claim 1 , wherein the manufacturing of the second resin mold including the third embossed pattern includes:
providing an object including a first embossed pattern; placing a first resin layer on an upper surface of the object including the first embossed pattern and pressing the first resin layer; manufacturing a first resin mold including a first debossed pattern by separating the first resin layer from the object; forming a first electroplating layer on an upper portion of the first resin mold including the first debossed pattern; manufacturing a first metal mold including a second embossed pattern by separating the first electroplating layer from the first resin mold; forming a second electroplating layer on an upper portion of the first metal mold including the second embossed pattern; manufacturing a second metal mold including a second debossed pattern by separating the second electroplating layer from the first metal mold; and placing a second resin layer on an upper surface of the second metal mold including the second debossed pattern and pressing the second resin layer, wherein the manufacturing of the second resin mold including the third embossed pattern is performed by separating the second resin layer from the second metal mold.

4 . The method of claim 3 , wherein each of the first resin mold and the second resin mold is formed of thermoplastic resin such as polymethyl methacrylate (PMMA) or acrylate-based photocurable resin.

5 . The method of claim 3 , wherein:
the first electroplating layer is formed by performing an electroless plating method in which at least one or more of copper (Cu), nickel (Ni), silver (Ag), chromium (Cr), iron (Fe), and cobalt (Co) is plated; the second electroplating layer is formed by performing an electroless plating method or an electroplating method in which at least one or more of Cu, Ni, Ag, Cr, Fe, and Co is plated; and the third electroplating layer is formed by performing an electroless plating method in which at least one or more of Cu, Ni, Ag, Cr, Fe, and Co is plated.

6 . The method of claim 3 , wherein the forming of the second electroplating layer on the upper portion of the first metal mold including the second embossed pattern includes forming a release layer on the upper portion of the first metal mold including the second embossed pattern and then forming the second electroplating layer on an upper portion of the release layer.

7 - 10 . (canceled)

11 . A method of manufacturing a roll stamp, the method comprising:
providing an object including a first embossed pattern; placing a first resin layer on an upper surface of the object including the first embossed pattern and pressing the first resin layer; manufacturing a first resin mold including a first debossed pattern by separating the first resin layer from the object; forming a first electroplating layer on an upper portion of the first resin mold including the first debossed pattern; manufacturing a first metal mold including a second embossed pattern by separating the first electroplating layer from the first resin mold; forming a second electroplating layer on an upper portion of the first metal mold including the second embossed pattern; manufacturing a second metal mold including a second debossed pattern by separating the second electroplating layer from the first metal mold; placing a second resin layer on an upper surface of the second metal mold including the second debossed pattern and pressing the second resin layer manufacturing a second resin mold including a third embossed pattern by separating the second resin layer from the second metal mold; manufacturing a cylindrical resin mold by rolling the second resin mold so that the third embossed pattern is placed on an inner circumference side; forming a third electroplating layer having a cylindrical shape on an inner circumference of the cylindrical resin mold; manufacturing a cylindrical metal mold including a third debossed pattern formed on an outer side and a hollow portion formed on an inner side by separating the third electroplating layer having a cylindrical shape from the cylindrical resin mold; arranging dies at a predetermined distance from the cylindrical metal mold; filling a space between the cylindrical metal mold and the dies with a filler; manufacturing a cylindrical filler mold including a fourth embossed pattern formed on an inner circumference and a hollow portion formed on an inner side by separating the dies and the cylindrical metal mold from the filler; filling the hollow portion of the cylindrical filler mold with a metal material; and separating the cylindrical filler mold from the filled metal material.

12 . The method of claim 11 , wherein each of the first resin mold and the second resin mold is formed of thermoplastic resin such as polymethyl methacrylate (PMMA) or acrylate-based photocurable resin.

13 . The method of claim 11 , wherein:
the first electroplating layer is formed by performing an electroless plating method in which at least one or more of copper (Cu), nickel (Ni), silver (Ag), chromium (Cr), iron (Fe), and cobalt (Co) is plated; the second electroplating layer is formed by performing an electroless plating method or an electroplating method in which at least one or more of Cu, Ni, Ag, Cr, Fe, and Co is plated; and the third electroplating layer is formed by performing an electroless plating method in which at least one or more of Cu, Ni, Ag, Cr, Fe, and Co is plated.

14 . The method of claim 11 , wherein the forming of the second electroplating layer on the upper portion of the first metal mold including the second embossed pattern includes forming a release layer on the upper portion of the first metal mold including the second embossed pattern and then forming the second electroplating layer on an upper portion of the release layer.

15 . The method of claim 14 , wherein the release layer is a chromate layer.

16 . A method of manufacturing a roll stamp, the method comprising:
manufacturing a cylindrical metal mold including a first debossed pattern formed on an outer side and a first hollow portion formed on an inner side; arranging dies at a predetermined distance from the cylindrical metal mold; filling a space between the cylindrical metal mold and the dies with a filler; manufacturing a cylindrical filler mold including a first embossed pattern formed on an inner circumference and a second hollow portion formed on an inner side by separating the dies and the cylindrical metal mold from the filler; filling the second hollow portion of the cylindrical filler mold with a metal material; and separating the cylindrical filler mold from the filled metal material.

Assignees

• Korea Inst Mach & Materials

Inventors

• Kim Man
• Lee Joo Yul
• Lee Sang Yeoul
• Lee Ju Yeong

Classifications

• C25D3/46

  of silver · CPC title

• C25D3/38

  of copper · CPC title

• C25D3/20

  of iron · CPC title

• C25D3/12

  of nickel or cobalt · CPC title

• C25D3/04

  of chromium · CPC title