Pressure Sensor on Ceramic Pressure Connections

Patent metadata

Field	Value
Publication number	US-2020256751-A1
Application number	US-201816629663-A
Country	US
Kind code	A1
Filing date	Sep 27, 2018
Priority date	Sep 28, 2017
Publication date	Aug 13, 2020
Grant date	—

Abstract

A pressure sensor is disclosed. In an embodiment a pressure sensor includes a housing having a housing wall, a sensor element arranged in the housing, a ceramic substrate configured to serve as a support for the sensor element and an electrical connection thereof and a first heating element arranged in an interior of the housing or in the housing wall.

First claim

1 - 18 . (canceled)

19 . A pressure sensor comprising:
a housing comprising a housing wall; a sensor element arranged in the housing; a ceramic substrate configured to serve as a support for the sensor element and an electrical connection thereof; and a first heating element arranged in an interior of the housing or in the housing wall.

20 . The pressure sensor according to claim 19 , wherein the first heating element is arranged in a position on or in a position in the ceramic substrate.

21 . The pressure sensor according to claim 19 , wherein the first heating element is arranged in the interior of the housing.

22 . The pressure sensor according to claim 19 , further comprising a small glass/ceramic tube configured to supply a medium, wherein the small tube is mounted on a lower side of the sensor element.

23 . The pressure sensor according to claim 19 , wherein the sensor element is connected to the ceramic substrate so that different media lie in contact with an upper side and a lower side of the sensor element in each case.

24 . The pressure sensor according to claim 19 , wherein the first heating element is arranged in or on a small glass/ceramic tube which is located on a lower side of the sensor element.

25 . The pressure sensor according to claim 19 , further comprising a gel filling having a gel delimitation as a protection of a membrane on an upper side of the sensor element, wherein the first heating element is arranged on the gel delimitation.

26 . The pressure sensor according to claim 19 , wherein the first heating element comprises an electrically conductive plastic.

27 . The pressure sensor according to claim 19 , wherein the first heating element comprises a resistance element having a positive temperature coefficient.

28 . The pressure sensor according to claim 19 , wherein the first heating element is integrated into parts of the housing wall and is suitable for producing microwave radiation.

29 . The pressure sensor according to claim 19 , wherein the first heating element is equipped with a power supply which is separated from the pressure sensor.

30 . The pressure sensor according to claim 19 , wherein the sensor element is a MEMS component.

31 . The pressure sensor according to claim 19 , further comprising a second heating element arranged at a different location from the first heating element.

32 . The pressure sensor according to claim 19 , wherein the pressure sensor is configured to measure a pressure when starting an engine in a motor vehicle from cold, wherein the first heating element is configured to warm the pressure sensor up to a fixed operating temperature, at which a first pressure measurement is effected.

33 . The pressure sensor according to claim 19 , wherein the first heating element is configured to warm up to a temperature between 20° C. and 160° C.

34 . A method comprising:
using the pressure sensor according to claim 19 in a motor vehicle.

35 . A method for operating the pressure sensor according to claim 19 , the method comprising:
switching on the first heating element, while commissioning the pressure sensor, in order to heat up the pressure sensor until a fixed operating temperature is attained.

36 . The method according to claim 35 , further comprising switching off the first heating element when the operating temperature is attained.

Assignees

• Tdk Electronics Ag

Inventors

• Bohl Benjamin
• Ihle Jan
• Hundertmark Bert
• Polder Bernd
• Wohlgemuth Christian

Classifications

• H05B1/0236

  for vehicles · CPC title

• B81B7/02

  containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] (B81B7/04 takes precedence) · CPC title

• B81B2201/0264

  Pressure sensors · CPC title

• G01L19/04 Primary

  Means for compensating for effects of changes of temperature {, i.e. other than electric compensation} · CPC title

• G01L19/0007

  Fluidic connecting means · CPC title