Manufacturing method of organic light-emitting display and mask assembly

Patent metadata

Field	Value
Publication number	US-2020144530-A1
Application number	US-201916425247-A
Country	US
Kind code	A1
Filing date	May 29, 2019
Priority date	Nov 2, 2018
Publication date	May 7, 2020
Grant date	—

Abstract

A method of manufacturing a display device includes preparing a pixel circuit substrate including thin-film transistors and pixel electrodes respectively electrically connected to the thin-film transistors, forming a first deposition layer on the pixel circuit substrate using a first mask assembly, and forming a second deposition layer on the pixel circuit substrate using a second mask assembly. At least one of the first mask assembly and the second mask assembly includes a mask plate including an opening portion through which a deposition material passes and a covering portion that blocks a passage of the deposition material. The mask plate includes a protruding portion that protrudes from an edge of the covering portion toward a center region of the opening portion

First claim

What is claimed is:

1 . A method of manufacturing a display device, the method comprising:
preparing a pixel circuit substrate including thin-film transistors and pixel electrodes respectively electrically connected to the thin-film transistors; forming a first deposition layer on the pixel circuit substrate using a first mask assembly; and forming a second deposition layer on the pixel circuit substrate using a second mask assembly, wherein: at least one of the first mask assembly and the second mask assembly includes a mask plate including an opening portion through which a deposition material passes and a covering portion that blocks a passage of the deposition material, and the mask plate includes a protruding portion that protrudes from an edge of the covering portion toward a center region of the opening portion.

2 . The method as claimed in claim 1 , wherein:
the first mask assembly includes a mask sheet including a plurality of holes spaced apart from each other, and the mask plate of the first mask assembly partially covers a first hole among the plurality of holes.

3 . The method as claimed in claim 2 , wherein the mask plate of the first mask assembly overlaps the mask sheet and is arranged in a direction intersecting an extending direction of the mask sheet.

4 . The method as claimed in claim 1 , wherein:
the first deposition layer includes emission layers spaced apart from each other, and a shape of each of first emission layers among the emission layers formed on the pixel circuit substrate is different from a shape of each of second emission layers among the emission layers.

5 . The method as claimed in claim 4 , wherein:
the display device includes a transmissive area through which light or sound is transmitted, a display area that partially surrounds the transmissive area, and a non-display area between the transmissive area and the display area, and the first emission layers correspond to the display area, and the second emission layers correspond to the non-display area.

6 . The method as claimed in claim 1 , wherein:
the first deposition layer includes emission layers spaced apart from each other, and an area of each of first emission-layers among the emission layers formed on the pixel circuit substrate is greater than an area of each of second emission layers among the emission layers.

7 . The method as claimed in claim 1 , wherein:
the mask plate of the second mask assembly includes an opening portion having a closed loop edge, and an edge of the protruding portion corresponds to a portion of the closed loop edge.

8 . The method as claimed in claim 7 , wherein:
the second deposition layer includes at least one of a hole transport layer, a hole injection layer, an electron transport layer, an electron injection layer, and an opposite electrode having a polarity different from that of the pixel electrodes, and a thickness of a first portion of the second deposition layer formed on the pixel circuit substrate is greater than a thickness of a second portion of the second deposition layer.

9 . The method as claimed in claim 8 , wherein:
the display device includes a transmissive area through which light or sound is transmitted, a display area that partially surrounds the transmissive area, and a non-display area between the transmissive area and the display area, and the first portion of the second deposition layer corresponds to the display area, and the second portion of the second deposition layer corresponds to the non-display area.

10 . The method as claimed in claim 9 , wherein the second deposition layer is not on the transmissive area.

11 . A mask assembly comprising:
a mask plate including an opening portion through which a deposition material passes, a covering portion that blocks a passage of the deposition material, and a protruding portion protruding from an edge of the covering portion toward a center region of the opening portion.

12 . The mask assembly as claimed in claim 11 , wherein:
the opening portion of the mask assembly includes a closed loop edge, and an edge of the protruding portion corresponds to a portion of the closed loop edge.

13 . The mask assembly as claimed in claim 12 , wherein:
the edge of the protruding portion includes a linear region, and the protruding portion protrudes from the linear region.

14 . The mask assembly as claimed in claim 12 , wherein:
the edge of the protruding portion includes a curved area, and the protruding portion protrudes from the curved area.

15 . The mask assembly as claimed in claim 12 , wherein the covering portion and the protruding portion are integrally formed.

16 . The mask assembly as claimed in claim 11 , further comprising a mask sheet overlapping the mask plate, the mask sheet including a plurality of holes spaced apart from each other.

17 . The mask assembly as claimed in claim 16 , wherein the protruding portion of the mask plate partially covers the holes of the mask sheet.

18 . The mask assembly as claimed in claim 17 , wherein the protruding portion of the mask plate partially covers a first hole among the holes of the mask sheet.

19 . The mask assembly as claimed in claim 16 , wherein the mask sheet and the mask plate overlap each other while contacting each other.

20 . The mask assembly as claimed in claim 16 , wherein the mask sheet and the mask plate are made of different materials.

Assignees

• Samsung Display Co Ltd

Inventors

• Kim Hoon
• Nam Keehyun
• Kim Junwoo
• An Hyesuk
• Ko Gyunghyun

Classifications

• H10P14/6326

  Deposition processes · CPC title

• H01L51/5056 Primary

  Electricity · mapped topic

• H01L27/1218

  Electricity · mapped topic

• H01L51/5072

  Electricity · mapped topic

• H01L51/5092

  Electricity · mapped topic