Mems cryocooler systems and methods

Patent metadata

Field	Value
Publication number	US-2020102216-A1
Application number	US-201916691499-A
Country	US
Kind code	A1
Filing date	Nov 21, 2019
Priority date	Jun 23, 2017
Publication date	Apr 2, 2020
Grant date	—

Abstract

Techniques are disclosed for systems and methods using microelectromechanical systems MEMS techniques to provide cryogenic and/or general cooling of a device or sensor system. In one embodiment, a system includes a compressor assembly and MEMS expander assembly in fluid communication with the compressor assembly via a gas transfer line configured to physically separate and thermally decouple the MEMS expander assembly from the compressor assembly. The MEMS expander assembly includes a plurality of expander cells each including a MEMS displacer, a cell regenerator, and an expansion volume disposed between the MEMS displacer and the cell regenerator, and the plurality of cell regenerators are configured to combine to form a contiguous shared regenerator for the MEMS expander assembly.

First claim

What is claimed is:

1 . A system comprising:
a compressor assembly; and a microelectromechanical systems (MEMS) expander assembly in fluid communication with the compressor assembly via a gas transfer line configured to physically separate and thermally decouple the MEMS expander assembly from the compressor assembly, wherein:
the MEMS expander assembly comprises a plurality of expander cells each comprising a MEMS displacer, a cell regenerator, and an expansion volume disposed between the MEMS displacer and the cell regenerator, and
the plurality of cell regenerators are configured to combine to form a contiguous shared regenerator for the MEMS expander assembly.

2 . The system of claim 1 , wherein:
at least one of the plurality of expander cells comprises an expander buffer volume assembly; and the expander buffer volume assembly comprises an expander cell buffer volume, a buffer volume valve disposed between the expander cell buffer volume and the expansion volume of the at least one expander cell, and an expander valve disposed between the expansion volume and the cell regenerator of the at least one expander cell.

3 . The system of claim 2 , wherein:
the expander cell buffer volume is disposed within the cell regenerator of the at least one expander cell; and the expander cell buffer volume comprises an elongate cross sectional profile aligned with a direction of gas flow through the cell regenerator.

4 . The system of claim 2 , wherein:
the MEMS displacer, the expander valve, or the buffer volume valve comprises a MEMS actuator.

5 . The system of claim 1 , wherein:
the cell regenerator comprises a plurality of regenerator matrix elements; and each regenerator matrix element comprises an elongate cross sectional profile aligned with a direction of gas flow through the at least one expander cell.

6 . The system of claim 1 , wherein:
the compressor assembly comprises a MEMS compressor assembly; and the MEMS compressor assembly comprises a plurality of compressor cells each comprising a MEMS compressor, a cell heat exchanger, and a compression volume disposed between the MEMS compressor and the cell heat exchanger.

7 . The system of claim 6 , wherein:
at least one of the plurality of compressor cells comprises a compressor buffer volume assembly; and the compressor buffer volume assembly comprises a compressor cell buffer volume, a buffer volume valve disposed between the compressor cell buffer volume and the compressor volume of the at least one compressor cell, and a compressor valve disposed between the compressor volume and the cell heat exchanger of the at least one compressor cell.

8 . The system of claim 6 , wherein:
the compressor cell buffer volume is disposed within a cell gas channel of the at least one compressor cell; and the compressor cell buffer volume comprises an elongate cross sectional profile aligned with a direction of gas flow through the cell gas channel.

9 . The system of claim 1 , further comprising a controller configured to control operation of the compressor assembly and/or the MEMS expander assembly, wherein:
the MEMS expander assembly comprises a symmetric, trapezoidal, or spiral expander cell arrangement.

10 . The system of claim 9 , wherein:
the compressor assembly comprises a linear compressor; and at least one of the plurality of expander cells comprises two or more expander cell buffer volumes disposed within the cell regenerator of the at least one expander cell with staggered relative positions along a direction of gas flow within the cell regenerator.

11 . The system of claim 1 , further comprising an electronic device, wherein:
the electronic device is coupled to the MEMS expander assembly; and the electronic device comprises at least a part of a sensor system or an infrared camera.

12 . A method comprising:
forming a microelectromechanical systems (MEMS) expander assembly, wherein the MEMS expander assembly comprises a plurality of expander cells each comprising a MEMS displacer, a cell regenerator, and an expansion volume disposed between the MEMS displacer and the cell regenerator, and wherein the plurality of cell regenerators are configured to combine to form a contiguous shared regenerator for the MEMS expander assembly; placing the MEMS expander assembly in fluid communication with a compressor assembly via a gas transfer line, wherein the gas transfer line is configured to physically separate and thermally decouple the MEMS expander assembly from the compressor assembly.

13 . The method of claim 12 , wherein:
at least one of the plurality of expander cells comprises an expander buffer volume assembly; and the forming the MEMS expander assembly comprises forming an expander cell buffer volume in the regenerator cell, forming a buffer volume valve disposed between the expander cell buffer volume and the expansion volume of the at least one expander cell, and forming an expander valve disposed between the expansion volume and the cell regenerator of the at least one expander cell.

14 . The method of claim 12 , wherein:
the cell regenerator comprises a plurality of regenerator matrix elements; and each regenerator matrix element comprises an elongate cross sectional profile aligned with a direction of gas flow through the at least one expander cell.

15 . The method of claim 12 , wherein the compressor assembly comprises a MEMS compressor assembly, the method further comprising:
forming the MEMS compressor assembly, wherein the MEMS compressor assembly comprises a plurality of compressor cells each comprising a MEMS compressor, a cell heat exchanger, and a compression volume disposed between the MEMS compressor and the cell heat exchanger.

16 . The method of claim 15 , wherein:
at least one of the plurality of compressor cells comprises a compressor buffer volume assembly; and the forming the MEMS compressor assembly comprises forming a compressor cell buffer volume, forming a buffer volume valve disposed between the compressor cell buffer volume and the compressor volume of the at least one compressor cell, and forming a compressor valve disposed between the compressor volume and the cell heat exchanger of the at least one compressor cell.

17 . The method of claim 12 , wherein the MEMS expander assembly, gas transfer line, and compressor assembly are coupled to form a MEMS refrigerator, the method further comprising:
compressing a working gas within the MEMS refrigerator using the compressor assembly; displacing at least a first portion of the working gas into the MEMS expander assembly using the compressor assembly and the MEMS expander assembly; expanding the working gas within the MEMS refrigerator using the MEMS expander assembly; and displacing at least a second portion of the working gas into the compressor assembly using the compressor assembly and the MEMS expander assembly to transfer heat from the MEMS expander assembly to the compressor assembly.

18 . A method comprising:
displacing at least a first portion of a working gas of a microelectromechanical systems (MEMS) refrigerator into a MEMS expander assembly of the MEMS refrigerator, wherein the MEMS expander assembly comprises a plurality of expander cells each comprising a MEMS displacer, a cell regenerator, and an expansion volume disposed between the MEMS displacer and the cell regenerator, and wherein the plurality of cell regenerators are configured to combine to form a contiguous shared regenerator for the MEMS expander assembly; and expanding the w

Assignees

• Flir Systems

Inventors

• Fiedler Andreas

Classifications

• B81B7/0038

  using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters · CPC title

• B81B7/0093

  by cooling · CPC title

• F25B9/14 Primary

  characterised by the cycle used, e.g. Stirling cycle · CPC title

• F25B2400/15

  Microelectro-mechanical devices · CPC title

• B81B7/0061 Primary

  suitable for fluid transfer from the MEMS out of the package or vice versa, e.g. transfer of liquid, gas, sound · CPC title