Apparatus for transferring substrate and apparatus for processing substrate including the same
US-10103043-B2 · Oct 16, 2018 · US
US2020054979A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2020054979-A1 |
| Application number | US-201816609005-A |
| Country | US |
| Kind code | A1 |
| Filing date | Apr 19, 2018 |
| Priority date | Apr 28, 2017 |
| Publication date | Feb 20, 2020 |
| Grant date | — |
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Systems and methods for monitoring the status of air filters are provided. One or more thermoelectric sensors are provided to have an upstream sensing surface positioned adjacent the inlet surface of the air filter, and a downstream sensing surface positioned adjacent the outlet surface of the air filter. Sensing circuitry are connected to the thermoelectric sensors, configured to receive signals from the thermoelectric sensors and process the signals to obtain status information of the air filter.
Opening claim text (preview).
1 . An air filtration apparatus comprising: an air filter having an inlet surface and an outlet surface, the air filter configured to filter air flowing therethrough from the inlet surface to the outlet surface; one or more thermoelectric sensors having an upstream sensing surface and a downstream sensing surface, the upstream sensing surface being positioned adjacent the inlet surface of the air filter, and the downstream sensing surface being positioned adjacent the outlet surface of the air filter; and sensing circuitry connected to the thermoelectric sensors, configured to receive signals from the thermoelectric sensors and process the signals to obtain status information of the air filter. 2 . The apparatus of claim 1 , wherein the one or more thermoelectric sensors comprises a first thermoelectric sensor having the upstream sensing surface and a second thermoelectric sensor having the downstream sensing surface. 3 . The apparatus of claim 2 , wherein the first thermoelectric sensor has the upstream sensing surface facing away from the inlet surface of the air filter. 4 . The apparatus of claim 2 , wherein the second thermoelectric sensor has the downstream sensing surface facing to the outlet surface of the air filter. 5 . (canceled) 6 . The apparatus of claim 2 , further comprising a flexible substrate to support the first and second thermoelectric sensors and the sensing circuitry. 7 . (canceled) 8 . The apparatus of claim 6 , wherein the sensing circuitry is disposed between the first and second thermoelectric sensors. 9 . The apparatus of claim 6 , wherein the flexible substrate has a first portion connecting the first thermoelectric sensor and the sensing circuitry, and the first portion is bendable. 10 . The apparatus of claim 6 , wherein the flexible substrate has a second portion connecting the second thermoelectric sensor and the sensing circuitry, and the second portion is bendable. 11 . The apparatus of claim 6 , wherein the flexible substrate has an off-center portion to support the sensing circuitry, the off-center portion is attached to a periphery of the air filter, and the first and second thermoelectric sensors are positioned to be offset. 12 . (canceled) 13 . The apparatus of claim 1 , wherein the one or more thermoelectric sensors comprises a thermoelectric sensor having the upstream sensing surface, the downstream sensing surface, and an array of thermoelectric elements connecting the upstream and downstream sensing surfaces. 14 . (canceled) 15 . The apparatus of claim 13 , wherein the thermoelectric elements comprise a plurality of thermocouples connected in series. 16 . The apparatus of claim 15 , wherein the thermocouples comprise conductor wires at least partially extending through the air filter. 17 . The apparatus of claim 1 , wherein at least one of the thermoelectric sensors includes a heating element disposed on a hot side thereof, opposite to an exposed cool side. 18 - 24 . (canceled) 25 . A method of obtaining status information of an air filter, the method comprising: providing one or more thermoelectric sensors having an upstream sensing surface and a downstream sensing surface, the upstream sensing surface being positioned at an upstream position of the air filter, and the downstream sensing surface being positioned at a downstream position of the air filter; obtaining, via the thermoelectric sensors, temperature-related information representative of the difference between an upstream air flow property at the upstream position and a downstream air flow property at the downstream position; and processing, via sensing circuitry, the temperature-related information to obtain the status information of the air filter. 26 . The method of claim 25 , wherein providing one or more thermoelectric sensors comprises providing a first thermoelectric sensor having the upstream sensing surface and a second thermoelectric sensor having the downstream sensing surface. 27 . The method of claim 26 , wherein obtaining the temperature-related information further comprises obtaining the difference of electric signal outputs from the first thermoelectric sensor and from the second thermoelectric sensor. 28 . The method of claim 26 , further comprising simultaneously obtaining a first electric signal from the first thermoelectric sensor and a second electric signal from the second thermoelectric sensor. 29 . The method of claim 28 , further comprising obtaining the difference between the first and second electric signals, and comparing the difference to a preset threshold. 30 . The method of claim 25 , wherein providing one or more thermoelectric sensors comprises providing a thermoelectric sensor having the upstream sensing surface, the downstream sensing surface, and an array of thermoelectric elements connecting the upstream and downstream sensing surfaces. 31 . The method of claim 30 , wherein obtaining the temperature-related information further comprises obtaining the voltage difference between the upstream and downstream sensing surface.
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