Apparatus with multistaged cooling

Patent metadata

Field	Value
Publication number	US-2020041211-A1
Application number	US-201916508598-A
Country	US
Kind code	A1
Filing date	Jul 11, 2019
Priority date	Jul 31, 2018
Publication date	Feb 6, 2020
Grant date	—

Abstract

Embodiments described herein relate to a heat exchanger for abating compounds produced in semiconductor processes. When hot effluent flows into the heat exchanger, a coolant can be flowed to walls of a heat exchanging surface within the heat exchanger. The heat exchanging surface can be a curved shaped which creates a multi stage cross flow path for the hot effluent to flow down the heat exchanger. This flow path forces the hot effluent to hit the cold walls of the heat exchanging surface, significantly cooling the effluent and preventing it from flowing directly into the vacuum pumps and causing heat damage. Embodiments described herein also relate to methods of forming a heat exchanger. The heat exchanger can be created by sequentially depositing layers of thermally conductive material on surfaces using 3-D printing, creating a much smaller foot print and reducing costs.

First claim

We claim:

1 . A heat exchanger configured to exchange heat with a flowing fluid, comprising:
a first mounting flange having a central opening that extends through a connection surface of the first mounting flange, wherein the connection surface is parallel to a first plane; a second mounting flange having a central opening that extends through a connection surface of the second mounting flange, wherein the second mounting flange is disposed a distance in a first direction from the first mounting flange; an outer wall that is configured to enclose an internal region of the heat exchanger, wherein the outer wall and internal region are disposed between the first mounting flange and the second mounting flange; an inner wall that is disposed within the internal region, wherein the inner wall is positioned to isolate a heat exchanging region of the internal region from an outer region of the internal region, the outer region defined by a space formed between the inner wall and the outer wall; a heat exchanging fluid inlet port and a heat exchanging fluid outlet port, wherein the heat exchanging fluid inlet port and the heat exchanging outlet port are each in fluid communication with the outer region; and a cone tray that is disposed within the inner wall, wherein the cone tray is configured to collect particles passing through the central opening of the first mounting flange.

2 . The heat exchanger of claim 1 , wherein the heat exchanging fluid inlet port has an opening that is in fluid communication with the outer region, and is disposed at a position closer to the first mounting flange than the second mounting flange.

3 . The heat exchanger of claim 1 , wherein the heat exchanging fluid outlet port has an opening that is in fluid communication with the outer region, and is disposed at a position closer to the first mounting flange than the second mounting flange.

4 . The heat exchanger of claim 1 , wherein an area of the opening of the heat exchanging fluid inlet port is substantially equal to an area of a water inlet.

5 . The heat exchanger of claim 1 , further comprising a view port having an opening that extends through the outer wall, wherein the opening is oriented to allow a user positioned outside of the outer wall to see at least a portion of the cone tray therethrough.

6 . The heat exchanger of claim 1 , further comprising a deflector configured to deflect gases passing through the central opening.

7 . The heat exchanger of claim 6 , wherein the deflector comprises an integrated lip.

8 . A heat exchanger configured to exchange heat with a flowing fluid, comprising:
a first mounting flange having a connection surface that is parallel to a first plane; a second mounting flange having a connection surface, wherein the second mounting flange is disposed a distance in a first direction from the first mounting flange; and a heat exchanging body disposed between and coupled to the first mounting flange and the second mounting flange, wherein the heat exchanging body comprises: an outer wall that is configured to enclose an internal region of the heat exchanging body, wherein the internal region has a central axis that is substantially perpendicular to the first plane; an inner wall that is disposed within the internal region, wherein the inner wall is positioned to isolate a heat exchanging region of the internal region from an outer region of the internal region, wherein the inner wall has a heat exchanging surface that is adjacent to the heat exchanging region, at least a portion of the heat exchanging surface has a curvature that varies in a direction parallel to the central axis, and a tangent of the curvature at any point on the heat exchanging surface has an angle relative to a central axis that is less than or equal to 60 degrees.

9 . The heat exchanger of claim 8 , further comprising a heat exchanging fluid inlet port that has an opening that is in fluid communication with the outer region, and is disposed at a position closer to the second mounting flange than the first mounting flange.

10 . The heat exchanger of claim 9 , further comprising a heat exchanging fluid outlet port that has an opening that is in fluid communication with the outer region, and is disposed at a position closer to the first mounting flange than the second mounting flange.

11 . The heat exchanger of claim 8 , wherein the heat exchanging body has a diameter between 150 and 200 mm.

12 . The heat exchanger of claim 11 , wherein a distance between the first mounting flange and the second mounting flange is between 200 and 250 mm.

13 . The heat exchanger of claim 8 , wherein the tangent of the curvature at any point on the heat exchanging surface has an angle relative to the central axis that is less than or equal to 45 degrees.

14 . The heat exchanger of claim 8 , wherein the tangent of the curvature at any point on the heat exchanging surface has an angle relative to the central axis that is less than or equal to 30 degrees.

15 . A method of forming a heat exchanger that is configured to exchange heat with a flowing fluid, comprising:
forming a first mounting flange having a central opening, wherein forming the first mounting flange comprises sequentially depositing layers of a thermally conductive material on a first surface; forming a heat exchanging body on the first mounting flange, wherein the heat exchanging body has a heat exchanging section that encloses a heat exchanging region that extends in a direction that is perpendicular to the first surface, and forming the heat exchanging body comprises sequentially depositing layers of the thermally conductive material on a surface of the formed first mounting flange, the sequentially deposited layers disposed within the heat exchanging section each include at least a portion of an outer wall and at least a portion of an inner wall, the outer wall is configured to enclose an internal region of the heat exchanging body, and the internal region has a central axis that is substantially perpendicular to the first surface, the inner wall is disposed within the internal region, and is positioned to isolate the heat exchanging region from an outer region of the internal region, wherein the outer region is defined by a space formed between the inner wall and the outer wall, the inner wall having a heat exchanging surface that is adjacent to the heat exchanging region, and the heat exchanging surface having a curvature that varies in a direction parallel to the central axis, and a tangent of the curvature at any point on the heat exchanging surface has an angle relative to central axis that is less than or equal to 45 degrees; and forming a second mounting flange on the heat exchanging body, wherein the second mounting flange comprises sequentially depositing layers of a thermally conductive material on the heat exchanging body.

16 . The method of claim 15 , wherein the heat exchanging body has a diameter between 150 and 200 mm.

17 . The method of claim 15 , wherein a distance between the first mounting flange and the second mounting flange is between 200 and 250 mm.

18 . The method of claim 17 , further comprising a heat exchanging fluid inlet port located toward the second mounting flange and a heat exchanging fluid outlet port located toward the first mounting flange.

19 . The method of claim 18 , wherein an opening area of the heat exchanging fluid inlet port is substantially equal to an area of a water inlet.

20 . The method of

Assignees

• Applied Materials Inc

Inventors

• Gajendra Manoj A
• Subramanian Arul Vasanth

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H01J37/32862

  In situ cleaning of vessels and/or internal parts · CPC title

• F28D7/08 Primary

  the conduits being otherwise bent, e.g. in a serpentine or zig-zag (F28D7/10 takes precedence){(F28D7/0016 and F28D7/0033 take precedence)} · CPC title

• F28F21/083

  from stainless steel · CPC title

• H01J37/32357 Primary

  Generation remote from the workpiece, e.g. down-stream · CPC title