Non-local scanning probes for scanning probe microscopy

Patent metadata

Field	Value
Publication number	US-2019324055-A1
Application number	US-201916393367-A
Country	US
Kind code	A1
Filing date	Apr 24, 2019
Priority date	Apr 24, 2018
Publication date	Oct 24, 2019
Grant date	—

Abstract

The system is configured for performing scanning electrochemical microscopy via non-local continuous line probes. The continuous line probes include an insulating probe substrate, an insulating layer, and a conductive band electrode. The system includes a sample stage for positioning a sample substrate to be imaged so as to enable contact with the insulting probe substrate at an angle Θ CLP . The continuous line probe is translated across the sample substrate and changes in the signal generated at the continuous line probe are identified to indicate the presence of features on the sample substrate. A plurality of scans are performed at different angles via rotating the sample stage or the continuous line probe, the results of which are combined and analyzed to produce an image of the sample substrate via compressed sensing reconstruction. The resulting image has comparable resolution to those produced via conventional scanning electrochemical microscopy processes, but in less scan time and with less complex scanning hardware.

First claim

What is claimed is:

1 . A system for performing scanning electrochemical microscopy comprising:
a continuous line probe including:
an insulating probe substrate;
an insulating layer; and
a conductive band electrode disposed between the insulating probe substrate and the insulating layer;
and a sample stage positioned to enable contact with the insulating probe substrate; wherein the continuous line probe is positioned at an angle Θ CLP to the sample stage.

2 . The system according to claim 1 , wherein Θ CLP is about 450°.

3 . The system according to claim 1 , wherein the conductive band electrode has a thickness between about 10 μm and about 100 μm.

4 . The system according to claim 3 , wherein the conductive band electrode has a thickness less than about 50 μm.

5 . The system according to claim 1 , wherein the insulating probe substrate has a thickness between about 50 μm to about 70 μm.

6 . The system according to claim 1 , wherein the insulating probe substrate and the electrode layer have substantially the same thickness.

7 . The system according to claim 1 , further comprising an additional point probe.

8 . The system according to claim 1 , wherein the sample stage includes a rotational module configured to rotate the sample stage about one or more rotational axis and an XYZ module configured to translate the sample stage along one or more planar axis.

9 . A method for performing scanning electrochemical microscopy comprising:
providing a scanning electrochemical microscopy system including:
a continuous line probe including:
a conductive band electrode; and
at least one insulating sheet on the conductive band electrode;

positioning the continuous line probe at an angle to a substrate to be imaged and at an initial position relative the substrate, wherein the at least one insulating sheet is in contact with the substrate; applying an electrical potential to the continuous line probe; applying an electrical potential to the substrate; translating the continuous line probe across the substrate along an initial axis; measuring continuous line probe current during translation along the initial axis; repositioning the continuous line probe at a subsequent position relative to the substrate; translating the continuous line probe across the substrate along a subsequent axis, wherein the subsequent axis is at an angle to the initial axis; measuring continuous line probe current during translation along the subsequent axis; and identifying changes in continuous line probe current along the initial axis and subsequent axis indicating the presence of a feature on the substrate.

10 . The method according to claim 9 , further comprising reconstructing an image of the substrate corresponding to at least the changes in continuous line probe current along the initial axis and subsequent axis via compressed sensing reconstruction.

11 . The method according to claim 9 , further comprising repeating the following steps one or more times to provide a plurality of subsequent continuous line probe current measurements:
repositioning the continuous line probe at a subsequent position relative to the substrate; translating the continuous line probe across the substrate along a subsequent axis, wherein the subsequent axis is at an angle to the initial axis; and measuring continuous line probe current during translation along the subsequent axis.

12 . The method according to claim 9 , further comprising preconditioning the probe to clear reactant species from and oxidize organic matter on the probe.

13 . The method according to claim 9 , wherein the average separation distance d m between the conductive band electrode and the substrate to be imaged is defined by:

d
m

=

(

t
E

2

+

t
I

)



sin


(

90

°

-

Θ
CLP

)

wherein t E is the thickness of the conductive band electrode, t I is the thickness of the at least one insulating sheet, and Θ CLP is the angle of the continuous line probe to the substrate, wherein d m is about 50 μm to about 70 μm.

14 . The method according to claim 9 , further comprising:
holding the continuous line probe in contact with the substrate prior to translating the continuous line probe across the substrate along the initial axis, wherein the hold has a duration greater than about 3 minutes.

15 . A method for performing scanning electrochemical microscopy comprising:
providing a scanning electrochemical microscopy system including:
a continuous line probe including:
an insulating probe substrate;
an insulating layer; and
a conductive band electrode disposed between the insulating probe substrate and the insulating layer;

and
a sample stage positioned to enable contact with the insulating probe substrate, the sample stage including a rotational module configured to rotate the sample sage about one or more rotational axis and an XYZ module configured to translate the sample stage along one or more planar axis;
positioning a sample substrate to be imaged on the sample stage; positioning the continuous line probe at an angle to the sample substrate and at an initial position relative to the sample substrate, wherein the at least one insulating sheet is in contact with the sample substrate; applying an electrical potential to the continuous line probe; applying an electrical potential to the sample substrate; translating the continuous line probe across a first portion of the sample substrate along an initial axis; repositioning the continuous line probe via at least one of the rotational module and the XYZ module at one or more additional positions relative to the sample substrate; translating the continuous line probe across an additional portion of the sample substrate along one or more additional axis, wherein the one or more additional axis are at an angle to the initial axis; identifying changes in continuous line probe current along the initial axis and the one or more additional axis indicating the presence of a feature on the sample substrate; and reconstructing an image of the sample substrate corresponding to at least the changes in continuous line probe current along the initial axis and the one or more additional axis via compressed sensing reconstruction.

Assignees

• Univ Columbia

Inventors

• Esposito Daniel Vincent
• O'Neil Glen
• Wright John
• Kuo Han-Wen
• Dorfi Anna E

Classifications

• G01Q60/60 Primary

  SECM [Scanning Electro-Chemical Microscopy] or apparatus therefor, e.g. SECM probes · CPC title

• G01Q30/20

  Sample handling devices or methods · CPC title