Processing system, method for processing a flexible substrate, and deposition apparatus

Patent metadata

Field	Value
Publication number	US-2019242011-A1
Application number	US-201616312122-A
Country	US
Kind code	A1
Filing date	Jul 1, 2016
Priority date	Jul 1, 2016
Publication date	Aug 8, 2019
Grant date	—

Abstract

According to one aspect of the present disclosure, a processing system for processing a flexible substrate is provided. The processing system includes: a vacuum chamber; a transport system configured to guide the flexible substrate through the vacuum chamber along a substrate transportation path (P), wherein the transport system comprises a first substrate support and a second substrate support arranged at a distance from the first substrate support; and an inspection system for inspecting the flexible substrate. The inspection system includes: a light source configured to direct a light beam through a portion of the flexible substrate between the first substrate support and the second substrate support; and a light detector for detecting the light beam for conducting a transmission measurement of the flexible substrate, wherein at least one of the light source and the light detector is arranged in an environment configured for a second pressure level different from a first pressure level in the vacuum chamber. According to a further aspect, a deposition apparatus is provided. According to a further aspect, a method processing a flexible substrate is provided.

First claim

1 . A processing system for processing a flexible substrate, comprising:
a vacuum chamber; a transport system configured to guide a flexible substrate through the vacuum chamber along a substrate transportation path, wherein the transport system comprises a first substrate support and a second substrate support arranged at a distance from the first substrate support; and an inspection system for inspecting the flexible substrate, comprising:
a light source arranged inside the vacuum chamber and configured to direct a light beam through a portion of the flexible substrate between the first substrate support and the second substrate support, wherein a cooling device is provided for cooling the light source; and
a light detector for detecting the light beam for conducting a transmission measurement of the flexible substrate, wherein the light detector is arranged in an environment configured for a second pressure level different from a first pressure level in the vacuum chamber.

2 . The processing system of claim 1 , wherein the light detector is arranged outside the vacuum chamber.

3 . The processing system of claim 1 , wherein the transport system is a roller assembly, the first substrate support is a first roller, and the second substrate support is a second roller.

4 . The processing system of claim 1 , wherein the light source is arranged on a first side of the substrate transportation path and the light detector is arranged on a second side of the substrate transportation path opposite the first side.

5 . The processing system of claim 1 , wherein the light detector is arranged outside the vacuum chamber behind one or more windows provided in a wall of the vacuum chamber.

6 . The processing system of claim 1 , wherein the cooling device comprises a cooling circuit for a cooling medium.

7 . The processing system of claim 1 , wherein the light source is configured for generating a light beam having a width of 20 cm or more.

8 . The processing system of claim 1 , wherein the light detector comprises two, three or more detector units arranged next to each other in a width direction of the flexible substrate.

9 . The processing system of claim 1 , wherein the light detector is movably held on a detector support.

10 . The processing system of claim 1 , further comprising one or more deposition units configured for coating the flexible substrate with one or more layers, wherein the inspection system is arranged downstream from the one or more deposition units and configured for inspecting the one or more layers.

11 . The processing system of claim 1 , wherein the transport system is configured to guide the flexible substrate at a speed of 1 m/s or more.

12 . A deposition apparatus for coating a flexible substrate with one or more layers, comprising:
a vacuum chamber comprising a coating drum configured for guiding the flexible substrate past one or more deposition units and a wind-up spool for winding the flexible substrate thereon; a roller assembly configured to guide the flexible substrate along a substrate transportation path from the coating drum to the wind-up spool, wherein the roller assembly comprises a first roller and a second roller arranged at a distance from the first roller; and an inspection system for inspecting the flexible substrate, comprising:
a light source arranged inside the vacuum chamber and configured to direct a light beam through a portion of the flexible substrate between the first roller and the second roller, wherein a cooling device is provided for cooling the light source; and
a light detector for detecting the light beam for conducting a transmission measurement of the flexible substrate,
wherein at least one of the light source and the light detector is arranged in an environment configured for a second pressure level different from a first pressure level in the vacuum chamber.

13 . A method of processing a flexible substrate, comprising:
guiding the flexible substrate through a vacuum chamber along a substrate transportation path, wherein the vacuum chamber is evacuated to a first pressure level and wherein the flexible substrate is supported by a first substrate support and by a second substrate support arranged at a distance from the first substrate support; directing a light beam from a light source arranged inside the vacuum chamber through a portion of the flexible substrate between the first substrate support and the second substrate support wherein a cooling device is provided for cooling the light source; and detecting the light beam having passed through the flexible substrate for conducting a transmission measurement of the flexible substrate, wherein at least a portion of the light beam propagates through an environment with a second pressure level different from the first pressure level.

14 . The method of claim 13 , wherein the light beam is generated inside the vacuum chamber, and wherein the light beam is detected outside the vacuum chamber or inside a vacuum-tight enclosure arranged in the vacuum chamber.

15 . The method of claim 13 , wherein detecting the light beam comprises detecting a transmittivity of said portion of the flexible substrate for detecting defects of the flexible substrate.

16 . The processing system of claim 1 , wherein the light detector is arranged in a vacuum-tight enclosure, arranged inside the vacuum chamber.

17 . The processing system of claim 1 , wherein the light detector is arranged in an atmosphere box arranged inside the vacuum chamber.

18 . The processing system of claim 1 , wherein the light source is configured for generating a light beam having a width of 50 cm or more.

19 . The processing system of claim 1 , wherein the light source comprises a lighting strip having a width of 20 cm or more.

20 . The processing system of claim 8 , wherein the two, three or more detector units are arranged behind one or more windows in a wall of the vacuum chamber or behind one or more enclosure windows in a wall of a vacuum-tight enclosure.

Assignees

• Gertmann Reiner
• Lotz Hans Georg
• Applied Materials Inc

Inventors

• Gertmann Reiner
• Lotz Hans-Georg

Classifications

• C23C14/562

  for coating elongated substrates · CPC title

• C23C14/547 Primary

  using optical methods · CPC title

• G01N21/89

  in moving material, e.g. running paper or textiles (G01N21/90, G01N21/91, G01N21/94 take precedence) · CPC title