Methods of forming thin film resistors with high power handling capability
US-9842674-B2 · Dec 12, 2017 · US
US2018366803A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2018366803-A1 |
| Application number | US-201715627913-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jun 20, 2017 |
| Priority date | Jun 20, 2017 |
| Publication date | Dec 20, 2018 |
| Grant date | — |
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A frequency selective limiter (FSL) is provided having a transmission line structure with a tapered width. The FSL includes a substrate having a magnetic material, a signal (or center) conductor disposed on the substrate and first and second ground plane conductors disposed on the substrate. The signal conductor having a first end with a first width and a second end with a second different width such that the signal conductor is provided having a taper between the first and second ends of the signal conductor. First and second ground plane conductors are spaced apart from first and second edges of signal conductor, respectively, by a distance that changes from the first end of signal conductor to the second end of signal conductor such that signal conductor, and first and second ground plane conductors form a co-planar waveguide transmission line.
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What is claimed is: 1 . A frequency selective limiter comprising: a magnetic material having first and second opposing surfaces; and a plurality of conductors disposed on the first surface of the magnetic material to form a coplanar waveguide transmission line, wherein a first one of said plurality of conductors corresponding to a first signal conductor having a width which decreases from a first end of the coplanar waveguide transmission line to a second, different end of the coplanar waveguide transmission line. 2 . The frequency selective limiter of claim 1 , wherein the width of said signal conductor decreases linearly along a length of the coplanar waveguide transmission line. 3 . The frequency selective limiter of claim 1 , wherein the width of said signal conductor decreases exponentially along a length of the coplanar waveguide transmission line. 4 . The frequency selective limiter of claim 1 , wherein the second ones of plurality of conductors correspond to ground plane conductors for the first signal conductor and are disposed on opposite sides of the first signal conductor. 5 . The frequency selective limiter of claim 4 , wherein the first signal conductor and two ground plane conductors are spaced apart such that a gap exists between respective sides of the first signal conductor and respective ones of the ground plane conductors, wherein a width of the gap decreases along a length of the coplanar waveguide transmission line. 6 . The frequency selective limiter of claim 1 , wherein the coplanar waveguide transmission line further comprises multiple segments having one or more different widths, and a width of each of the segments corresponds to an attenuation factor of one or more preceding segments in the coplanar waveguide transmission line or a power threshold of the one or more preceding segments in the coplanar waveguide transmission line. 7 . The frequency selective limiter of claim 6 , wherein each of the segments form 50Ω coplanar lines and the frequency selective limiter has a constant characteristic impedance along the length of the coplanar waveguide transmission line. 8 . The frequency selective limiter of claim 6 , wherein in a power threshold of each segment decreases along a length of the coplanar waveguide transmission line. 9 . The frequency selective limiter of claim 6 , wherein each segment of the coplanar waveguide transmission line provides the same level of attenuation to a signal incident on the frequency selective limiter. 10 . A cascaded frequency selective limiter system comprising: a first frequency selective limiter comprising; a first magnetic material having first and second opposing surfaces; and a first plurality of conductors disposed on the first surface of the first magnetic material to form a first coplanar waveguide transmission line, wherein a first one of said first plurality of conductors corresponding to a first signal conductor having a first width which decreases from a first end of the first coplanar waveguide transmission line to a second, different end of the first coplanar waveguide transmission line; a second frequency selective limiter comprising; a second magnetic material having first and second opposing surfaces; and a second plurality of conductors disposed on the first surface of the second magnetic material to form a second coplanar waveguide transmission line, wherein a first one of said second plurality of conductors corresponding to a first signal conductor having a second width which decreases from a first end of the second coplanar waveguide transmission line to a second, different end of the second coplanar waveguide transmission line; and wherein an output of the first frequency selective limiter is coupled to an input of the second frequency selective limiter. 11 . The cascaded frequency selective limiter system of claim 10 , wherein the first width of said first signal conductor decreases linearly along a length of the first coplanar waveguide transmission line and the second width of said second signal conductor decreases linearly along a length of the second coplanar waveguide transmission line. 12 . The cascaded frequency selective limiter system of claim 10 , wherein the first and second magnetic materials comprise the same material. 13 . The cascaded frequency selective limiter system of claim 10 , wherein the first and second magnetic materials comprise different material. 14 . The cascaded frequency selective limiter system of claim 10 , wherein the second width of said second signal conductor at the first end of the second coplanar waveguide transmission line corresponds to at least one of the first width of said first signal conductor at the second end of the first coplanar waveguide transmission line, a material of the first magnetic material or a material of the second magnetic material. 15 . A method for forming a frequency selective limiter, the method comprising: providing a magnetic material having first and second opposing surfaces; disposing first and second ground plane conductors on the first surface of the magnetic material; and disposing a signal conductor on the first surface of the magnetic material such that the signal conductor is disposed between the first and second ground plane conductors to form a coplanar waveguide transmission line, wherein a width of the signal conductor decreases from a first end to a second, different end of the coplanar waveguide transmission line. 16 . The method of claim 15 , further comprising decreasing the width of the signal conductor linearly along a length of the coplanar waveguide transmission line. 17 . The method of claim 15 , further comprising decreasing the width of the signal conductor exponentially along a length of the coplanar waveguide transmission line. 18 . The method of claim 15 , further comprising forming a gap between the signal conductor and each of the first and second ground plane conductors, wherein the gap between the signal conductor and each of the first and second ground plane conductors decreases along a length of the coplanar waveguide transmission line. 19 . The method of claim 15 , further comprising forming multiple segments having one or more different widths within the coplanar waveguide transmission line, wherein a width of each of the segments corresponds to at least one of an attenuation factor of one or more preceding segments in the coplanar waveguide transmission line or a power threshold of the one or more preceding segments in the coplanar waveguide transmission line. 20 . The method of claim 19 , wherein each of the segments form 50Ω coplanar lines and the frequency selective limiter has a constant characteristic impedance along the length of the coplanar waveguide transmission line. 21 . The method of claim 15 , further comprising; forming multiple frequency selective limiters such that an output of a first frequency selective limiter is coupled to an input of a second frequency selective limiter; wherein a width of the input of the second coplanar waveguide transmission line corresponds to at least one of a width of the output of the first coplanar waveguide transmission line, a material of the first magnetic material and a material of the second magnetic material. 22 . A frequency selective limiter comprising: a substrate comprising a magnetic material, said substrate having first and second opposing surfaces; a center conductor disposed on the first s
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