Polishing table and polishing apparatus having the same

Patent metadata

Field	Value
Publication number	US-2018345447-A1
Application number	US-201815996988-A
Country	US
Kind code	A1
Filing date	Jun 4, 2018
Priority date	Jun 6, 2017
Publication date	Dec 6, 2018
Grant date	—

Abstract

An object of the present invention is to provide a polishing table capable of preventing peeling or detachment of a coating of the polishing table, thereby to enable an operation for replacement of a polishing pad to be easily conducted. One embodiment of the present invention provides a polishing table having a support surface configured to support a polishing pad, the polishing pad being adapted to be used for polishing a substrate, the polishing table comprising: a stacked body comprising a stack of a porous layer and a non-porous layer, the porous layer including open pores formed in a surface thereof disposed to face a polishing pad; and a resin-based coating material disposed in the open pores so as to form at least a part of the support surface of the polishing table.

First claim

What is claimed is:

1 . A polishing table for a polishing apparatus configured to polish a substrate, having a support surface configured to support a polishing pad, said polishing pad being adapted to be used for polishing a substrate,
said polishing table comprising: a stacked body comprising a stack of a porous layer and a non-porous layer, said porous layer including open pores formed in a surface thereof disposed to face a polishing pad; and a resin-based coating material disposed in said open pores so as to form at least a part of said support surface of said polishing table.

2 . A polishing table according to claim 1 , wherein said resin-based coating material is disposed such that said surface of the porous layer disposed to face the polishing pad is entirely covered by said resin-based coating material.

3 . A polishing table according to claim 1 , wherein said surface of the porous layer disposed to face the polishing pad is exposed outside said open pores, and said support surface of the polishing table is formed by said exposed surface of the porous layer and said resin-based coating material in said open pores.

4 . A polishing table according to claim 1 , wherein said porous layer comprises a ceramic material.

5 . A polishing table according to claim 2 , wherein said porous layer comprises a ceramic material.

6 . A polishing table according to claim 3 , wherein said porous layer comprises a ceramic material.

7 . A polishing table according to claim 1 , wherein said non-porous layer includes a flow passage formed therein, which allows a cooling fluid to flow through the polishing table, said flow passage being formed in a position remote from a connection between said porous layer and said non-porous layer.

8 . A polishing table according to claim 2 , wherein said non-porous layer includes a flow passage formed therein, which allows a cooling fluid to flow through the polishing table, said flow passage being formed in a position remote from a connection between said porous layer and said non-porous layer.

9 . A polishing table according to claim 3 , wherein said non-porous layer includes a flow passage formed therein, which allows a cooling fluid to flow through the polishing table, said flow passage being formed in a position remote from a connection between said porous layer and said non-porous layer.

10 . A polishing table according to claim 4 , wherein said non-porous layer includes a flow passage formed therein, which allows a cooling fluid to flow through the polishing table, said flow passage being formed in a position remote from a connection between said porous layer and said non-porous layer.

11 . A polishing table according to claim 5 , wherein said non-porous layer includes a flow passage formed therein, which allows a cooling fluid to flow through the polishing table, said flow passage being formed in a position remote from a connection between said porous layer and said non-porous layer.

12 . A polishing table according to claim 6 , wherein said non-porous layer includes a flow passage formed therein, which allows a cooling fluid to flow through the polishing table, said flow passage being formed in a position remote from a connection between said porous layer and said non-porous layer.

Assignees

• Ebara Corp

Inventors

• Saito Kenichiro
• Kosuge Ryuichi

Classifications

• B24D3/32

  for porous or cellular structure · CPC title

• B24B37/22 Primary

  characterised by a multi-layered structure · CPC title

• B24B37/24

  characterised by the composition or properties of the pad materials · CPC title

• B24B37/16

  characterised by the shape of the lapping plate surface, e.g. grooved · CPC title

• B24B55/02

  Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant (cooling or lubricating during dressing operation B24B53/095; incorporated in grinding wheels B24D) · CPC title