Method For Transferring Graphene Pieces Onto A Substrate

Patent metadata

Field	Value
Publication number	US-2018342586-A1
Application number	US-201615771423-A
Country	US
Kind code	A1
Filing date	Nov 16, 2016
Priority date	Dec 12, 2015
Publication date	Nov 29, 2018
Grant date	—

Abstract

Transferring graphene pieces onto a substrate, by the following steps: a) selecting a substrate comprising a plurality of placeholders for the graphene pieces; b) disposing and aligning the substrate on a substrate holder in a chamber; c) selecting a transfer layer having openings as placeholders for the graphene pieces; d) disposing and aligning the transfer layer on the substrate holder over the substrate so that the openings of the transfer layer are aligned over the placeholders on the substrate; e) adding liquid to the chamber to above the transfer layer, and raising the transfer layer on the liquid column; introducing graphene pieces onto the liquid film in the openings of the transfer layer; and g) reducing the distance between the substrate and the graphene pieces until the graphene pieces are disposed on the placeholders of the substrate. A substrate and a device for carrying out the method.

First claim

1 . A method for transferring graphene pieces onto a substrate, comprising:
a) selecting a substrate comprising a plurality of placeholders for the graphene pieces; b) disposing and aligning the substrate on a substrate holder in a chamber; c) selecting a transfer layer having openings as placeholders for the graphene pieces; d) disposing and aligning the transfer layer on the substrate holder over the substrate so that the openings in the transfer layer are aligned over the placeholders on the substrate; e) adding a liquid to the chamber to above the transfer layer, and raising the transfer layer on the liquid column: f) introducing graphene pieces onto the liquid film in the openings of the transfer layer; and g) reducing the distance between the substrate and the graphene pieces in the openings until the graphene pieces are disposed on the placeholders of the substrate.

2 . The method according to claim 1 , wherein the placeholders of the substrate and the openings of the transfer layer for the graphene pieces are aligned with respect to one another by way of at least one fixing pin, and in particular by at least 2 to 6 fixing pins.

3 . The method of claim 1 , wherein the transfer layer is fixed in the X-Y plane thereof during steps d) to g).

4 . The method of claim 1 , wherein the transfer layer comprises cut-outs at the edge of the transfer layer which are guided over the fixing pins.

5 . The method of claim 1 , wherein in step g), the liquid is removed from the chamber, so that the transfer layer is lowered on the liquid column and/or the substrate is raised, so that the graphene pieces in the openings of the transfer layer are transferred onto the placeholders of the substrate.

6 . The method of claim 1 , wherein residual liquid is removed.

7 . A substrate, produced by the method of claim 1 , comprising a plurality of graphene pieces on a substrate for forming G-FETs.

8 . A device for carrying out the method according to claim 1 comprising:
a holder which can be loaded with liquid, comprising a substrate holder for a substrate; and
means for aligning the substrate and a transfer layer disposed thereon on the substrate holder, wherein the means fix the transfer layer in the X-Y plane thereof and allow the movement of the transfer layer in the Z-plane, which is to say vertically with respect to the substrate surface.

9 . The device according to claim 8 , further comprising an intake valve and/or discharge valve for the liquid, and at least one fixing pin, and preferably up to 6 fixing pins.

10 . The device according to claim 8 , further comprising a lifting mechanism for raising the substrate holder.

Assignees

• Forschungszentrum Juelich Gmbh

Inventors

• Kireev Dmitry
• Sarik Dario
• Wolfrum Bernhard
• Offenhausser Andreas

Classifications

• B32B37/18

  involving the assembly of discrete sheets or panels only · CPC title

• B32B9/007

  comprising carbon, e.g. graphite, composite carbon · CPC title

• B32B3/14

  characterised by a face layer formed of separate pieces of material {which are juxtaposed side-by-side (B32B5/02 takes precedence)} · CPC title

• C01B32/194 Primary

  After-treatment · CPC title

• B32B2313/04

  Carbon · CPC title