Radiation Analyzing Apparatus

Patent metadata

Field	Value
Publication number	US-2018275079-A1
Application number	US-201815928807-A
Country	US
Kind code	A1
Filing date	Mar 22, 2018
Priority date	Mar 24, 2017
Publication date	Sep 27, 2018
Grant date	—

Abstract

The radiation analyzing apparatus irradiates an object including a plurality of elements with a first radiation, detects a plurality of rays of a second radiation emitted from the object irradiated with the first radiation, derives an energy spectrum based on a signal of each of the plurality of rays of the second radiation, detects detection energy, which is energy absorbed in a reference element that is an element used as a reference or is energy emitted from the reference element, based on the energy spectrum, and corrects the energy spectrum based on reference energy information, which is previously stored in a storage unit and indicates reference energy that is energy absorbed in the reference element or is energy emitted from the reference element, and the detection energy.

First claim

What is claimed is:

1 . A radiation analyzing apparatus comprising:
an excitation source unit configured to irradiate an object including a plurality of elements with a first radiation; a radiation detection unit configured to detect a plurality of rays of a second radiation emitted from the object irradiated with the first radiation; a derivation unit configured to derive an energy spectrum based on a signal of each of the plurality of rays of the second radiation detected by the radiation detection unit; a detection unit configured to detect detection energy, which is energy absorbed in a reference element that is an element used as a reference or is energy emitted from the reference element, based on the energy spectrum derived by the derivation unit; and a correction unit configured to correct the energy spectrum derived by the derivation unit based on reference energy information, which is previously stored in a storage unit and indicates reference energy that is energy absorbed in the reference element or is energy emitted from the reference element, and the detection energy detected by the detection unit.

2 . The radiation analyzing apparatus according to claim 1 ,
wherein the derivation unit derives, as the energy spectrum, each of a first energy spectrum within a first energy range designated by a user of the radiation analyzing apparatus, and a second energy spectrum within a second energy range including the reference energy, and the detection unit detects the detection energy based on the second energy spectrum.

3 . The radiation analyzing apparatus according to claim 2 ,
wherein the second energy range is included in the first energy range and is identical to the first energy range, and the derivation unit uses a part of the first energy spectrum as the second energy spectrum.

4 . The radiation analyzing apparatus according to claim 2 ,
wherein the derivation unit derives the first energy spectrum at a moment during a measurement period that a measurement time designated by the user elapses since a user operation of starting an analysis of the object is received, and derives the second energy spectrum at a moment out of the measurement period.

5 . The radiation analyzing apparatus according to claim 2 ,
wherein the derivation unit derives the first energy spectrum and the second energy spectrum at a moment during a period that a measurement time designated by the user elapses since a user operation of starting an analysis of the object is received.

6 . The radiation analyzing apparatus according to claim 2 ,
wherein the detection unit detects the detection energy whenever the derivation unit derives the second energy spectrum, and the correction unit corrects the first energy spectrum derived by the derivation unit whenever the detection unit detects the detection energy.

7 . The radiation analyzing apparatus according to claim 2 ,
wherein the detection unit detects the detection energy based on the second energy spectrum derived by the derivation unit at one or both of a moment before the derivation unit derives the first energy spectrum and a moment after the derivation unit derives the first energy spectrum.

8 . The radiation analyzing apparatus according to claim 5 ,
wherein the detection unit detects the detection energy based on the second energy spectrum derived by the derivation unit at a moment during a period that the derivation unit derives the first energy spectrum.

9 . The radiation analyzing apparatus according to claim 1 ,
wherein the correction unit corrects the energy spectrum derived by the derivation unit based on a ratio between the detection energy detected by the detection unit and the reference energy indicated by the reference energy information stored in the storage unit.

10 . The radiation analyzing apparatus according to claim 9 ,
wherein the correction unit multiplies the energy spectrum derived by the derivation unit by the ratio to correct the energy spectrum derived by the derivation unit.

11 . The radiation analyzing apparatus according to claim 1 ,
wherein the correction unit corrects the energy spectrum derived by the derivation unit based on one or more of the detection energies detected previously by the detection unit and the reference energy.

12 . The radiation analyzing apparatus according to claim 1 ,
wherein the energy absorbed in the reference element is energy absorbed in electrons of the reference element when the electrons are excited, and the energy emitted from the reference element is energy of K-rays emitted from the reference element.

13 . The radiation analyzing apparatus according to claim 1 ,
wherein the reference element is any of elements in which K-shell electrons are excited to emit K-rays.

14 . The radiation analyzing apparatus according to claim 1 ,
wherein the excitation source unit emits an electron beam as the first radiation, and the radiation detection unit has a superconductive transition edge sensor that detects X-rays, as the second radiation, generated from the object irradiated with the electron beam.

Assignees

• Hitachi High Tech Science Corp

Inventors

• Tanaka Keiichi
• Chinone Kazuo

Classifications

• G01N2223/079

  incident electron beam and measuring excited X-rays · CPC title

• H01J37/285

  Emission microscopes, e.g. field-emission microscopes · CPC title

• G01N23/2252 Primary

  Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA] · CPC title

• H01J2237/2445

  Photon detectors for X-rays, light, e.g. photomultipliers · CPC title

• H01J37/252

  Tubes for spot-analysing by electron or ion beams; Microanalysers · CPC title