Pressure sensor

Patent metadata

Field	Value
Publication number	US-2018259409-A1
Application number	US-201815915367-A
Country	US
Kind code	A1
Filing date	Mar 8, 2018
Priority date	Mar 9, 2017
Publication date	Sep 13, 2018
Grant date	—

Abstract

A temperature difference calculation unit determines a temperature difference between a temperature measured by a first temperature measurement mechanism and a temperature measured by a second temperature measurement mechanism. The first temperature measurement mechanism is disposed on an outer wall surface of an inner container at a position corresponding to an element-arrangement-side space in the inner container. The second temperature measurement mechanism is disposed on an outer peripheral surface of a heater. The heater is disposed outside an outer container that accommodates the inner container and positioned on a wall surface of the outer container.

First claim

What is claimed is:

1 . A pressure sensor comprising:
a detection device including a diaphragm displaceable upon receipt of pressure from a measurement target, the detection device being configured to convert a displacement of the diaphragm into a change in another physical quantity; a pressure value output unit configured to convert the change in the other physical quantity obtained from the displacement of the diaphragm into a pressure value and output the pressure value; an inner container that accommodates the detection device; an outer container that accommodates the inner container; a pressure introduction pipe connected to the inner container and configured to introduce the pressure of the measurement target into the inner container; a partition wall disposed in the inner container, the partition wall separating an internal space of the inner container into a pressure-detection-side space and an element-arrangement-side space opposite the pressure-detection-side space,
the pressure-detection-side space being a space into which the pressure of the measurement target is introduced through the pressure introduction pipe,
the element-arrangement-side space being a space in which the detection device is disposed,
the partition wall having the detection device joined to a surface thereof in the element-arrangement-side space,
the partition wall having a pressure introduction hole through which pressure in the pressure-detection-side space is introduced to the diaphragm of the detection device;
a first temperature measurement mechanism disposed on an outer wall surface of the inner container at a position corresponding to the element-arrangement-side space; a heating mechanism disposed outside the outer container and positioned on a wall surface of the outer container, the heating mechanism being configured to heat an inside of the outer container; a temperature control unit configured to control an operation of the heating mechanism such that a first temperature value measured by the first temperature measurement mechanism is close to a set temperature; a second temperature measurement mechanism configured to measure a temperature of the heating mechanism; a temperature difference calculation unit configured to determine a temperature difference between the first temperature value measured by the first temperature measurement mechanism and a second temperature value measured by the second temperature measurement mechanism; and an alert output unit configured to issue an alert when the temperature difference calculated by the temperature difference calculation unit falls outside a set range.

2 . The pressure sensor according to claim 1 , wherein the detection device further includes
a base that supports the diaphragm with a space therebetween, a first electrode disposed on the diaphragm, and a second electrode disposed on the base and facing the first electrode, and wherein the pressure value output unit converts a capacitance change between the first electrode and the second electrode due to a displacement of the diaphragm into a pressure value and outputs the pressure value.

3 . The pressure sensor according to claim 1 , wherein the diaphragm includes a capacitance chamber opposite a pressure-receiving portion that receives the pressure from the measurement target, the capacitance chamber being in a vacuum.

Assignees

• Azbil Corp

Inventors

• Sekine Masashi
• Ishihara Takuya
• Soeda Masaru
• Tochigi Hidenobu

Classifications

• G01L9/125 Primary

  with temperature compensating means (non electric temperature compensating means G01L19/04) · CPC title

• G01L9/0072

  using variations in capacitance · CPC title

• G01L1/2281

  for temperature variations · CPC title

• G01L9/0016

  of a diaphragm · CPC title

• G01L9/045 Primary

  with electric temperature compensating means (non electric temperature compensating means G01L19/04) · CPC title