Force detector and robot

Patent metadata

Field	Value
Publication number	US-2018186007-A1
Application number	US-201815903630-A
Country	US
Kind code	A1
Filing date	Feb 23, 2018
Priority date	Feb 27, 2014
Publication date	Jul 5, 2018
Grant date	—

Abstract

A force detector includes a first base part, a second base part, and a pressure detection unit provided between the first base part and the second base part and including a piezoelectric element that outputs a signal in response to an external force, wherein the pressure detection unit has a first member having a portion in contact with the first base part, a second member having a portion in contact with the second base part, and a third member connecting the first member and the second member, a first longitudinal elastic modulus of at least a part of the first member is lower than a third longitudinal elastic modulus of the third member, and a second longitudinal elastic modulus of at least a part of the second member is lower than the third longitudinal elastic modulus of the third member.

First claim

1 - 20 . (canceled)

21 . A force detector comprising:
a first base; a second base facing the first base; and a sensor that is disposed between the first base and the second base, the sensor being configured with:
a side wall having a terminal;
a sensor plate that is connected to one end of the side wall;
a lid that is connected to the other end of the side wall so that an inner space is configured by the side wall, the sensor plate, and the lid;
a charge output element that is disposed in the inner space and that outputs a signal in response to an external force; and
a conductive material that electrically connects the charge output element to the terminal,
wherein the sensor plate is sandwiched between the first base and the charge output element, and the lid is sandwiched between the second base and the charge output element, a first elastic modulus of the sensor plate is lower than a second elastic modulus of the side wall, and the charge output element includes crystal, and the sensor plate includes a metal material selected from stainless steel, Kovar, copper, iron, carbon steel, and titanium.

22 . The force detector according to claim 21 ,
wherein the sensor plate includes Kovar.

23 . The force detector according to claim 21 ,
wherein a difference between the first elastic modulus and the second elastic modulus is a tenth part or less of the first elastic modulus.

24 . The force detector according to claim 21 ,
wherein a constituent material of the sensor plate and a constituent material of the lid are the same.

25 . The force detector according to claim 21 ,
wherein a constituent material of the side wall is ceramic.

26 . The force detector according to claim 21 ,
wherein the charge output element is a piezoelectric element.

27 . A robot comprising:
an arm; an end effector provided on the arm; and a force detector provided between the arm and the end effector and detecting an external force applied to the end effector, the force detector including:
a first base;
a second base; and
a sensor that is disposed between the first base and the second base, the sensor being configured with:
a side wall having a terminal;
a sensor plate that is connected to one end of the side wall;
a lid that is connected to the other end of the side wall so that an inner space is configured by the side wall, the sensor plate, and the lid;
a charge output element that is disposed in the inner space and that outputs a signal in response to the external force; and
a conductive material that electrically connects the charge output element to the terminal,

wherein the sensor plate is sandwiched between the first base and the charge output element, and the lid is sandwiched between the second base and the charge output element, a first elastic modulus of the sensor plate is lower than a second elastic modulus of the side wall, and the charge output element include crystal, and the sensor plate includes a metal material selected from stainless steel, Kovar, copper, iron, carbon steel, and titanium.

28 . The robot according to claim 27 ,
wherein the sensor plate includes Kovar.

29 . The robot according to claim 27 ,
wherein a difference between the first elastic modulus and the second elastic modulus is a tenth part or less of the first elastic modulus.

30 . The robot according to claim 27 ,
wherein a constituent material of the sensor plate and a constituent material of the lid are the same.

31 . The robot according to claim 27 ,
wherein a constituent material of the side wall is a ceramic.

32 . The robot according to claim 27 ,
wherein the charge output element is a piezoelectric element.

Assignees

• Seiko Epson Corp

Inventors

• Matsuzawa Akira
• Kamiya Toshiyuki

Classifications

• B25J13/085

  Force or torque sensors (B25J13/082, B25J13/084 take precedence) · CPC title

• B25J9/1694 Primary

  characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion · CPC title

• G01L5/009

  Force sensors associated with material gripping devices · CPC title

• G01L5/167

  using piezoelectric means · CPC title

• G01L1/16 Primary

  using properties of piezoelectric devices · CPC title