Point-of-use mixing systems and methods for controlling temperatures of liquids dispensed at a substrate

Patent metadata

Field	Value
Publication number	US-2018166300-A1
Application number	US-201615377399-A
Country	US
Kind code	A1
Filing date	Dec 13, 2016
Priority date	Dec 13, 2016
Publication date	Jun 14, 2018
Grant date	—

Abstract

A liquid dispensing system for treating a substrate is provided and includes a flow controller, pressure regulator, mixing node, liquid mixer, temperature sensor, N dispensers, and system controller. The flow controller receives and controls a flow rate of a first liquid. The pressure regulator receives and controls a pressure of a second liquid. The mixing node mixes the first and second liquid output by the flow controller and pressure regulator to provide a first mixture. The liquid mixer mixes the first mixture and a third liquid to provide a second mixture. The temperature sensor measures a temperature of the second mixture. The N dispensers dispense the second mixture at the substrate. The system controller controls the measured temperature to be between the first and second temperatures by adjusting the flow rate based on the measured temperature and independent of a measurement of a flow rate of the second liquid.

First claim

What is claimed is:

1 . A liquid dispensing system for treating a substrate, comprising:
a first flow controller to receive a first liquid at a first temperature and control a flow rate of the first liquid; a pressure regulator to receive a second liquid at a second temperature and to control a pressure of the second liquid to a predetermined pressure, wherein the second temperature is different than the first temperature; a first mixing node that mixes the first liquid output by the first flow controller and the second liquid output by the pressure regulator to provide a first mixture; a liquid mixer that mixes the first mixture and a third liquid to provide a second mixture; a temperature sensor to generate a temperature signal based on a measured temperature of the second mixture; N dispensers each including a liquid flow controller to dispense the second mixture at the substrate, where N is an integer greater than or equal to 1; and a system controller to control the measured temperature to a predetermined temperature between the first temperature and the second temperature by adjusting the flow rate of the first flow controller based on the measured temperature and independent of a measurement of a flow rate of the second liquid.

2 . The liquid dispensing system of claim 1 , wherein the system controller further controls the measured temperature based on flow rates of the N dispensing flow controllers.

3 . The liquid dispensing system of claim 1 , wherein the liquid mixer comprises:
M flow controllers to receive M liquids and control M flow rates of the M liquids, where M is an integer greater than or equal to 1, and wherein one of the M liquids includes the third liquid; and a second mixing node to mix the first mixture and one or more of the M outputs of the M flow controllers to provide the second mixture.

4 . The liquid dispensing system of claim 3 , wherein the system controller is configured to control the M flow rates of the M flow controllers based on a predetermined concentration value corresponding to the M liquids and a sum of flow rates of the N dispensing flow controllers of the N dispensers.

5 . The liquid dispensing system of claim 3 , further comprising M valves arranged between the M flow controllers and the liquid mixer.

6 . The liquid dispensing system of claim 1 , wherein the system controller is configured to control the measured temperature independent of measurements of the first temperature and the second temperature.

7 . The liquid dispensing system of claim 1 , further comprising a valve arranged between the first flow controller and the first mixing node.

8 . The liquid dispensing system of claim 1 , further comprising a valve arranged between the pressure regulator and the first mixing node.

9 . The liquid dispensing system of claim 1 , further comprising a valve arranged between the liquid mixer and a second one of the N dispensers, wherein N is greater than one.

10 . The liquid dispensing system of claim 1 , wherein the first flow controller comprises:
a valve; and a flow meter configured to (i) detect the flow rate of the first liquid, and (ii) based on the flow rate of the first liquid, control the valve to adjust the flow rate of the first liquid.

11 . The liquid dispensing system of claim 1 , wherein:
the first liquid includes water; the second liquid includes water; and the third liquid includes a concentrated acid.

12 . A system comprising:
the liquid dispensing system of claim 1 ; and a spin chuck configured to engage with the substrate, wherein the substrate is rotated while being supported by the spin chuck and while the substrate is treated by the second mixture from at least one of the N dispensers.

13 . A liquid dispensing method for treating a substrate, comprising:
receiving a first liquid at a first temperature at a first flow controller and controlling a flow rate of the first liquid; supplying a second liquid at a second temperature and at a predetermined pressure, wherein the second temperature is different than the first temperature; mixing the first liquid output by the first flow controller and the second liquid at a first mixing node to provide a first mixture; mixing the first mixture and a third liquid to provide a second mixture; generating a temperature signal based on a measured temperature of the second mixture; dispensing the second mixture at the substrate via N dispensers, where N is an integer greater than or equal to 1, and wherein the N dispensers each include a liquid flow controller to dispense the second mixture; and controlling the measured temperature to a predetermined temperature between the first temperature and the second temperature by adjusting the flow rate of the first flow controller based on the measured temperature and independent of a measurement of a flow rate of the second liquid.

14 . The liquid dispensing method of claim 13 , further comprising controlling the measured temperature based on flow rates of the N dispensing flow controllers.

15 . The liquid dispensing method of claim 13 , further comprising:
receiving M liquids at M flow controllers and controlling M flow rates of the M liquids, where M is an integer greater than or equal to 1, and wherein one of the M liquids includes the third liquid; and mixing, via a second mixing node, the first mixture and one or more of the M outputs of the M flow controllers to provide the second mixture.

16 . The liquid dispensing method of claim 15 , further comprising controlling the M flow rates of the M flow controllers based on predetermined concentration value corresponding to the M liquids and a sum of flow rates of the N dispensing flow controllers of the N dispensers.

17 . The liquid dispensing method of claim 13 , further comprising controlling the measured temperature independent of measurements of the first temperature and the second temperature.

18 . The liquid dispensing method of claim 13 , further comprising:
detecting the flow rate of the first liquid via a flow meter; and based on the flow rate of the first liquid, controlling a valve to adjust the flow rate of the first liquid, wherein the first flow controller comprises the flow meter and the valve.

19 . The liquid dispensing method of claim 13 , wherein:
the first liquid includes water; the second liquid includes water; and the third liquid includes a concentrated acid.

20 . The method of claim 13 , further comprising:
engaging with the substrate via a spin chuck; and rotating the substrate while the substrate is treated by the second mixture from at least one of the N dispensers.

Assignees

• Lam Res Ag

Inventors

• Zagorz Philipp

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• H10P14/6508

  by exposure to a liquid · CPC title

• H10P72/0448 Primary

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title