Systems and Methods of EUV Mask Cleaning

Patent metadata

Field	Value
Publication number	US-2018157168-A1
Application number	US-201815888421-A
Country	US
Kind code	A1
Filing date	Feb 5, 2018
Priority date	Jul 29, 2015
Publication date	Jun 7, 2018
Grant date	—

Abstract

A method includes directing an acoustically agitated fluid stream at a first surface of a substrate to cause the substrate to vibrate mechanically thereby dislodging contaminant particles on the substrate. The first surface of the substrate is opposite a second surface of the substrate. The second surface of the substrate includes a pattern. An amplitude of the acoustically agitated fluid stream is configured to produce an acoustic response along an entirety of the second surface.

First claim

What is claimed is:

1 . A method, comprising:
directing an acoustically agitated fluid stream at a first surface of a substrate to cause the substrate to vibrate mechanically thereby dislodging contaminant particles on the substrate, wherein the first surface of the substrate is opposite a second surface of the substrate, wherein the second surface of the substrate includes a pattern, wherein an amplitude of the acoustically agitated fluid stream is configured to produce an acoustic response along an entirety of the second surface.

2 . The method of claim 1 , wherein the acoustically agitated fluid stream includes at least one of: ozone water, tetramethylammonium hydroxide (TMAH), carbon dioxide (CO 2 ) dissolved in water, hydrogen (H 2 ) dissolved in water, and standard clean 1 (SC1).

3 . The method of claim 1 , further comprising:
while directing the acoustically agitated fluid stream at the first surface of the substrate, simultaneously applying a chemical solution onto the second surface of the substrate.

4 . The method of claim 3 , wherein the chemical solution is different from the acoustically agitated fluid stream.

5 . The method of claim 3 , wherein the chemical solution is also acoustically agitated.

6 . The method of claim 1 , further comprising:
while directing the acoustically agitated fluid stream at the first surface of the substrate, simultaneously rotating the substrate.

7 . The method of claim 1 , wherein the acoustically agitated fluid stream is not retained against the first surface of the substrate.

8 . The method of claim 1 , wherein the directing causes the substrate to vibrate mechanically at a frequency ranging between about 1 megahertz (MHz) and about 3 MHz.

9 . The method of claim 1 , wherein the substrate includes an extreme ultraviolet (EUV) photolithography mask.

10 . The method of claim 1 , wherein the directing the acoustically agitated fluid stream at the first surface of the substrate includes directing the acoustically agitated fluid stream at an angle between about 60 degrees and about 90 degrees relative to the first surface of the substrate.

11 . A method, comprising:
supporting a substrate; directing an acoustically agitated fluid stream at a first side of the substrate to cause the substrate to vibrate mechanically at a megasonic frequency to dislodge contaminant particles on the first side of the substrate; and rotating the substrate while directing the acoustically agitated fluid stream at the first side of the substrate, wherein the first side of the substrate is opposite a second side of the substrate, wherein the second side of the substrate includes a pattern associated with a semiconductor device, wherein an amplitude of vibration in the acoustically agitated fluid stream is greater than or equal to a saturation threshold with respect to vibration of the second side, and wherein the acoustically agitated fluid stream is not retained against the first side of the substrate.

12 . The method of claim 11 , wherein the acoustically agitated fluid stream includes microbubbles mechanically vibrating at the megasonic frequency.

13 . The method of claim 11 , further comprising:
while directing the acoustically agitated fluid stream at the first side of the substrate, simultaneously applying a chemical solution onto the second side of the substrate.

14 . The method of claim 11 , wherein the directing of the acoustically agitated fluid stream produces an acoustic response at a periphery of the second side.

15 . The method of claim 11 , wherein the acoustically agitated fluid stream includes one of: ozone water, tetramethylammonium hydroxide (TMAH), carbon dioxide (CO 2 ) dissolved in water, hydrogen (H 2 ) dissolved in water, and standard clean 1 (SC1).

16 . The method of claim 11 , wherein the acoustically agitated fluid stream is directed at the first side of the substrate at an angle between about 60 degrees and about 90 degrees relative to the first side of the substrate.

17 . A method, comprising:
directing an acoustically agitated fluid stream at a first side of a substrate to cause the substrate to vibrate mechanically to dislodge contaminant particles on the substrate; and rotating the substrate while directing the acoustically agitated fluid stream at the first side of the substrate, wherein the first side of the substrate is opposite a second side of the substrate, wherein the second side of the substrate includes a pattern associated with a semiconductor device, wherein the directing of the acoustically agitated fluid stream produces an acoustic response at a periphery of the second side of the substrate.

18 . The method of claim 17 , wherein the acoustically agitated fluid stream includes microbubbles mechanically vibrating at a megasonic frequency.

19 . The method of claim 17 , further comprising:
while directing the acoustically agitated fluid stream at the first side of the substrate, simultaneously applying a chemical solution onto the second side of the substrate, wherein the chemical solution is different from the acoustically agitated fluid stream.

20 . The method of claim 17 , wherein the acoustically agitated fluid stream is not retained against the first side of the substrate.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Shen Ching-Wei
• Lu Chi-Lun
• Lin Kuan-Wen

Classifications

• B08B2203/0288

  Ultra or megasonic jets · CPC title

• B08B3/02 Primary

  Cleaning by the force of jets or sprays · CPC title

• B08B2230/01

  Cleaning with steam · CPC title

• G03F1/82 Primary

  Auxiliary processes, e.g. cleaning or inspecting · CPC title

• B08B3/12

  by sonic or ultrasonic vibrations · CPC title