Substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-2018090322-A1
Application number	US-201615566695-A
Country	US
Kind code	A1
Filing date	Apr 12, 2016
Priority date	Apr 14, 2015
Publication date	Mar 29, 2018
Grant date	—

Abstract

Provided is a substrate processing apparatus. The substrate processing apparatus includes a first tube defining an inner space, a substrate holder in which a plurality of substrates are vertically stacked in the inner space of the first tube, the substrate holder defining a plurality of processing spaces in which the substrates are individually processed, a gas supply unit having a plurality of main injection holes each of which is vertically defined to correspond to each of the processing spaces to supply a gas into the first tube, and an exhaust unit configured to exhaust the gas supplied into the plurality of processing spaces in the first tube to the outside. The exhaust unit includes a plurality of exhaust holes facing the main injection holes and vertically arranged in a line to correspond to the processing spaces. Therefore, the gas may smoothly flow on the substrate.

First claim

What is claimed is:

1 . A substrate processing apparatus comprising:
a first tube defining an inner space; a substrate holder in which a plurality of substrates are vertically stacked in the inner space of the first tube, the substrate holder separately defining a plurality of processing spaces in which the substrates are individually processed; a gas supply unit having a plurality of main injection holes each of which is vertically defined to correspond to each of the processing spaces to supply a gas into the first tube; and an exhaust unit configured to exhaust the gas supplied into the plurality of processing spaces in the first tube to the outside, wherein the exhaust unit comprises a plurality of exhaust holes facing the main injection holes and vertically arranged in a line to correspond to the processing spaces.

2 . The substrate processing apparatus of claim 1 , wherein the exhaust holes are provided as one hole having a slit shape extending in a direction that crosses a stacking direction of the substrates, or
the exhaust holes comprise a plurality of holes arranged in the direction that crosses the stacking direction of the substrates.

3 . The substrate processing apparatus of claim 1 , wherein the exhaust holes have widths in the direction that crosses the stacking direction of the substrates at an angle of equal to 35° or less with respect to a vertical central axis of the first tube, and
the exhaust holes are arranged symmetrical to the main injection holes with respect to the central axis.

4 . The substrate processing apparatus of claim 1 , wherein the exhaust unit further comprises an exhaust duct disposed outside the first tube, and the exhaust duct comprises:
a body part that vertically extends to define a passage through which the gas moves therein, the body part being disposed at a position corresponding to the exhaust holes; and a connection part connected to a lower portion of the body part to communicate with the body part, the connection part having an opened lower portion.

5 . The substrate processing apparatus of claim 4 , wherein the exhaust unit further comprises an exhaust line connected to the exhaust duct to suction the gas, and
the plurality of exhaust holes are arranged in widths gradually increasing in a direction that crosses the stacking direction of the substrate as the exhaust holes are away from a portion at which the exhaust duct is connected to the exhaust line.

6 . The substrate processing apparatus of claim 5 , wherein the exhaust line comprises:
a flange connected to a lower portion of each of the first tube and the exhaust duct; an exhaust port disposed on the flange, the exhaust port having one side that communicates with the connection part of the exhaust duct; an exhaust tube having one end that is connected to the other side of the exhaust port; a control valve disposed in the exhaust tube to control a flow rate of the gas in the exhaust tube; and an exhaust pump connected to the other end of the exhaust tube to suction the gas.

7 . The substrate processing apparatus of claim 6 , wherein the exhaust line further comprises:
a path switching tube having one end that is connected to the exhaust tube between the control valve and the exhaust pump and the other end that is connected to the gas supply unit; and a path switching valve disposed between the path switching tube and the exhaust tube to switch paths through which the gas moves therebetween.

8 . The substrate processing apparatus of claim 6 , further comprising a position determining unit formed on a bottom surface of the connection part and a top surface of the flange.

9 . The substrate processing apparatus of claim 1 , wherein the gas supply unit further comprises a plurality of auxiliary injection holes spirally defined to correspond to the processing spaces along a circumference of the first tube.

10 . The substrate processing apparatus of claim 9 , wherein an amount of gas injected through each of the auxiliary injection holes is equal to 30% or less of that of gas injected through the main injection hole.

11 . The substrate processing apparatus of claim 9 , wherein the exhaust unit further comprises an auxiliary hole defined in a side surface of the exhaust hole to correspond to the auxiliary injection hole.

12 . The substrate processing apparatus of claim 4 , further comprising a second tube having an inner space to accommodate the first tube,
wherein the exhaust duct is disposed between the first tube and the second tube.

13 . The substrate processing apparatus of claim 4 , wherein the exhaust duct is formed of quartz and is integrated with the first tube.

Assignees

• Eugene Technology Co Ltd

Inventors

• Jung Woo Duck
• Je Sung Tae
• Choi Kyu Jin
• Han Seong Min

Classifications

• H10P70/00

  Cleaning of wafers, substrates or parts of devices · CPC title

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P72/10

  using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] · CPC title

• H10P72/04 Primary

  Apparatus for manufacture or treatment · CPC title

• C23C16/4412 Primary

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title