Circuit device, physical quantity detection device, electronic apparatus, and vehicle

Patent metadata

Field	Value
Publication number	US-2018052012-A1
Application number	US-201715672776-A
Country	US
Kind code	A1
Filing date	Aug 9, 2017
Priority date	Aug 18, 2016
Publication date	Feb 22, 2018
Grant date	—

Abstract

A circuit device adapted to perform detection of angular velocity observed by a capacitance type angular velocity transducer includes a drive device, a detection device, a vibration frequency controller adapted to variably control at least one of a detection frequency and a drive frequency of the capacitance type angular velocity transducer, and a storage adapted to store a correction parameter group adapted to correct a sensor characteristic of the capacitance type angular velocity transducer due to a variation of at least one of the detection frequency and the drive frequency.

First claim

What is claimed is:

1 . A circuit device adapted to perform detection of angular velocity observed by a capacitance type angular velocity transducer, the circuit device comprising:
a vibration frequency controller adapted to variably control at least one of a detection frequency and a drive frequency of the capacitance type angular velocity transducer; a detection circuit adapted to detect angular velocity based on a detection signal from the capacitance type angular velocity transducer; a drive circuit adapted to perform drive of vibrating the capacitance type angular velocity transducer; and a storage adapted to store a correction parameter group adapted to correct a sensor characteristic of the capacitance type angular velocity transducer due to a variation of at least one of the detection frequency and the drive frequency.

2 . The circuit device according to claim 1 , wherein
the correction parameter group includes
a first correction parameter for a case in which a mistuned frequency as a difference between the drive frequency and the detection frequency is set to a first setting value, and
a second correction parameter for a case in which the mistuned frequency is set to a second setting value different from the first setting value.

3 . The circuit device according to claim 2 , wherein
each of the first correction parameter and the second correction parameter includes at least one of a drive amplitude setting value, an offset correction value, a gain setting value, and a temperature characteristic correction value.

4 . The circuit device according to claim 1 , wherein
the vibration frequency controller varies an effective spring constant of the capacitance type angular velocity transducer to thereby vary at least one of the drive frequency and the detection frequency.

5 . The circuit device according to claim 4 , wherein
the vibration frequency controller varies an electrostatic spring constant of the capacitance type angular velocity transducer to thereby vary at least one of the drive frequency and the detection frequency.

6 . The circuit device according to claim 1 , wherein
the storage is a nonvolatile memory.

7 . The circuit device according to claim 1 , wherein
the detection circuit performs a detection operation based on either of correction parameters in the correction parameter group stored in the storage.

8 . The circuit device according to claim 7 , further comprising:
a saturated state detection circuit adapted to detect a saturated state of a detection signal in the detection circuit, wherein the detection circuit performs the detection operation based on the correction parameter selected based on a detection result in the saturated state detection circuit.

9 . The circuit device according to claim 1 , wherein
the drive circuit performs a drive operation based on either of correction parameters in the correction parameter group stored in the storage.

10 . The circuit device according to claim 9 , further comprising:
a saturated state detection circuit adapted to detect a saturated state of a detection signal in the detection circuit, wherein the drive circuit performs the drive operation based on the correction parameter selected based on a detection result in the saturated state detection circuit.

11 . A physical quantity detection device comprising:
the circuit device according to claim 1 ; and the capacitance type angular velocity transducer.

12 . A physical quantity detection device comprising:
the circuit device according to claim 2 ; and the capacitance type angular velocity transducer.

13 . A physical quantity detection device comprising:
the circuit device according to claim 3 ; and the capacitance type angular velocity transducer.

14 . A physical quantity detection device comprising:
the circuit device according to claim 4 ; and the capacitance type angular velocity transducer.

15 . An electronic apparatus, comprising:
the circuit device according to claim 1 .

16 . An electronic apparatus, comprising:
the circuit device according to claim 2 .

17 . An electronic apparatus, comprising:
the circuit device according to claim 3 .

18 . A vehicle comprising:
the circuit device according to claim 1 .

19 . A vehicle comprising:
the circuit device according to claim 2 .

20 . A vehicle comprising:
the circuit device according to claim 3 .

Assignees

• Seiko Epson Corp

Inventors

• Nishizawa Ryuta
• Kanemoto Kei
• Kikuchi Takayuki

Classifications

• G01D3/028

  mitigating undesired influences, e.g. temperature, pressure · CPC title

• G01D5/241 Primary

  by relative movement of capacitor electrodes · CPC title

• G01C19/5726

  Signal processing · CPC title

• G01C19/5776

  Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719 · CPC title