Physical quantity sensor, vibratory device, electronic apparatus, and moving object

Patent metadata

Field	Value
Publication number	US-9739643-B2
Application number	US-201414479868-A
Country	US
Kind code	B2
Filing date	Sep 8, 2014
Priority date	Sep 10, 2013
Publication date	Aug 22, 2017
Grant date	Aug 22, 2017

Abstract

A physical quantity sensor includes a substrate, a fixation section and a wiring line provided to the substrate, a contact section adapted to electrically connect the fixation section and the wiring line to each other, and a movable electrode electrically connected to the wiring line via the fixation section. The contact section is disposed in the fixation section in a second area outside a first area obtained by imaginarily extending a fixed support area in a displacement direction of the movable electrode in a plan view. The fixed support area is sandwiched by edge portions of an area where the movable electrode and the fixation section are connected to each other.

First claim

What is claimed is:

1. A device comprising:
a substrate;
a wiring line provided on the substrate;
a movable electrode electrically connected to the wiring line, the movable electrode being configured with:
a movable electrode base that is in a longitudinal shape extending in an longitudinal direction; and
a plurality of movable electrode fingers that are provided at both sides of the movable electrode base and that extend from the movable electrode base in a first direction perpendicular to the longitudinal direction;

a fixation section that fixes an end of the movable electrode base to the substrate at a first position so that the movable electrode is movably connected to the substrate, the fixation section extending in the first direction from the end of the movable electrode base;
a contact section where the fixation section located at a second position and the wiring line are physically and electrically connected to each other,
wherein the fixation section located at the first position is on a center line of the movable electrode base in the longitudinal direction, and
the fixation section located at the second position is laterally shifted from the center line in the first direction.

2. The device according to claim 1 , wherein
the fixation section and the wiring line are electrically connected to each other by the contact section so that the fixation section covers a part of the wiring line in a plan view.

3. The device according to claim 1 , wherein
the movable electrode includes a connection portion, and
the connection portion is located directly adjacent to the end of the movable electrode base so as to make the movable electrode easily displace.

4. The device according to claim 1 , wherein
the substrate is a glass substrate, and
the fixation section and the movable electrode are formed of a silicon substrate stacked on the glass substrate.

5. The device according to claim 1 , wherein
the device is a physical quantity sensor.

6. A device comprising:
a substrate;
a wiring line provided on the substrate;
a movable electrode electrically connected to the wiring line, the movable electrode being configured with:
a movable electrode base that is in a longitudinal shape extending in an longitudinal direction; and
a plurality of movable electrode fingers that are provided at both sides of the movable electrode base and that extend from the movable electrode base along first and second directions perpendicular to the longitudinal direction;

a fixation section that fixes an end of the movable electrode base to the substrate at a first position so that the movable electrode is movably connected to the substrate, the fixation section being U-shaped so that the fixation section extends in the first direction from the end of the movable electrode base to a second position, further continuously extends in the longitudinal direction away from the movable electrode base to a third position, and further continuously extends in the second direction to a fourth position;
a contact section where the fixation section located at the fourth position and the wiring line are physically and electrically connected to each other,
wherein the fixation section located at the first position and the fourth position is on a center line of the movable electrode base in the longitudinal direction,
the fixation section located at the second position is laterally shifted from the center line in the first direction,
the fixation section located at the fourth position is spaced apart from the fixation section located at the first position via an air gap in a plan view in the longitudinal direction.

7. The device according to claim 6 , wherein
the fixation section and the wiring line are electrically connected to each other by the contact section so that the fixation section covers a part of the wiring line in the plan view.

8. The device according to claim 6 , wherein
the movable electrode includes a connection portion, and
the connection portion is located directly adjacent to the end of the movable electrode base so as to make the movable electrode easily displace.

9. The device according to claim 6 , wherein
the substrate is a glass substrate, and
the fixation section and the movable electrode are formed of a silicon substrate stacked on the glass substrate.

10. The device according to claim 6 , wherein
the device is a vibratory device.

Assignees

• Seiko Epson Corp

Inventors

• Tanaka Satoru

Classifications

• G01D5/241 Primary

  by relative movement of capacitor electrodes · CPC title

• G01D5/2403 Primary

  by moving plates, not forming part of the capacitor itself, e.g. shields · CPC title