Front Opening Ring Pod

Patent metadata

Field	Value
Publication number	US-2018019142-A1
Application number	US-201715673030-A
Country	US
Kind code	A1
Filing date	Aug 9, 2017
Priority date	Oct 22, 2015
Publication date	Jan 18, 2018
Grant date	—

Abstract

A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.

First claim

1 . A front opening ring pod (FORP), comprising:
a base plate having a first lateral side, a second lateral side, a front side and a back side, wherein the first lateral side, the second lateral side are parallel to one another and extend between the front side and the back side; a support structure disposed over the base plate, the support structure includes a plurality of support columns disposed over the first and second lateral sides of the base plate, each of the plurality of support columns includes a plurality of support fingers distributed lengthwise, such that the plurality of support fingers extend toward an inner region of the FORP; a top plate oriented opposite to the base plate, wherein each of the plurality of support columns is attached to the top plate; a shell enclosure having sidewalls and a top surface is disposed over the base plate, such that the top surface of the shell enclosure is disposed over the top plate and the sidewalls surround the support structure, a front of the shell enclosure and the front side of the base plate defining a part of a door frame to receive a door; and the door having a plurality of slots distributed lengthwise along an inside sidewall of the door, such that each of the plurality of slots is substantially aligned with corresponding ones of the plurality of support fingers of the support structure, wherein the plurality of support fingers of the support structure are configured to support one or more consumable parts when present inside the FORP and the plurality of slots on the inside sidewall of the door are configured to secure present consumable parts in position when the door is engaged.

2 . The FORP of claim 1 , where the shell enclosure does not have a bottom.

3 . The FORP of claim 1 , wherein the base plate includes a lip defined along an outer perimeter, the shell enclosure being coupled to the lip of the base plate.

4 . The FORP of claim 1 , wherein the plurality of support columns in the support structure includes,
a first support column oriented along the first lateral side wall of the shell enclosure and disposed proximal to the front side of the base plate; a second support column oriented along the first lateral side wall of the shell enclosure and disposed proximal to the back side of the base plate; a third support column oriented along the second lateral side wall of the shell enclosure and disposed proximal to the front side of the base plate; and a fourth support column oriented along the second lateral side wall of the shell enclosure and disposed proximal to the back side of the base plate.

5 . The FORP of claim 4 , wherein the support structure further includes a pair of stop columns disposed over the back side of the baseplate and oriented along a back sidewall of the shell enclosure, each of the pair of stop columns oriented parallel to the plurality of support columns.

6 . The FORP of claim 5 , wherein each of the pair of stop columns is coupled to the top plate, the top plate attached to an underside of the top surface of the shell enclosure.

7 . The FORP of claim 5 , wherein the pair of stop columns includes,
a first stop column disposed proximate to the first lateral side wall and oriented toward the inner region of the shell enclosure; and a second stop column disposed proximate to the second lateral side wall and oriented toward the inner region of the shell enclosure, wherein the first and the second stop columns are defined parallel to the support structure.

8 . The FORP of claim 7 , wherein each of the first and second stop columns is spaced apart from the plurality of support columns.

9 . The FORP of claim 7 , wherein the first stop column is attached to the second support column of the support structure and the second stop column is attached to fourth support column of the support structure.

10 . The FORP of claim 1 , wherein each of the plurality of support fingers includes a support pad defined on a top surface, the support pad providing a distinct contact surface for a consumable part, when received on respective one of the plurality of support fingers.

11 . The FORP of claim 1 , wherein each of the plurality of support fingers includes a groove defined on a top surface, a support pad is formed in the groove and extends above the top surface.

12 . The FORP of claim 1 , wherein the plurality of fingers is made of carbon filled PolyEtherEtherKetone material.

13 . The FORP of claim 1 , wherein the base plate includes a vent assembly to provide a path for gases out of the FORP.

14 . The FORP of claim 1 , further includes a pair of handles, wherein a first handle in the pair is disposed on an outside of the first lateral side wall of the shell enclosure and is attached to corresponding first ones of the plurality of support columns through the first lateral side wall, and a second handle in the pair is disposed on an outside of the second lateral side wall of the shell enclosure and is attached to corresponding second ones of the plurality of support columns through the second lateral side wall.

15 . The FORP of claim 1 , wherein the back side of the base plate is contoured and a back side wall of the shell enclosure is contoured to match the contour of the base plate.

16 . A front opening ring pod (FORP), comprising:
a base plate having a front side, a back side and a pair of lateral sides extending between the front side and the back side, and a lip defined along an outer perimeter of the base plate; a support structure received over the base plate, the support structure includes a plurality of support columns disposed over the pair of lateral sides of the base plate, each of the plurality of support columns includes a plurality of support fingers distributed lengthwise, such that the plurality of support fingers extend toward an inner region of the FORP; a top plate oriented opposite to the base plate, each of the plurality of support columns of the support structure is attached to the top plate; a shell enclosure having sidewalls and a top surface, the top surface of the shell enclosure is disposed to cover the top plate and the sidewalls of the shell enclosure surround the support structure, a front of the shell enclosure and the front side of the base plate defining a part of a door frame to receive a door, the shell enclosure being coupled to the lip of the base plate; the door having a plurality of slots distributed in a vertical orientation along an inside sidewall of the door, such that each of the plurality of slots is substantially aligned with corresponding ones of the plurality of support fingers of the support structure; and a pair of stop columns disposed over a back side of the base plate and are oriented along a back sidewall of the shell enclosure; wherein the plurality of support fingers of the support structure are configured to support one or more consumable parts when present inside the FORP and the plurality of slots on the inside sidewall of the door are configured to secure the one or more consumable parts present inside the FORP in position when the door is engaged.

17 . The FORP of claim 16 , wherein each of the pair of stop columns is coupled to the top plate, wherein the top plate is attached to an underside of the top surface of the shell enclosure.

18 . The FORP of claim 16 , wherein the shell enclosure does not have a base.

19 . The FORP of claim 16 , wherein each of the pair of stop columns is separate and spaced apart from the plurality of support columns.

20 . T

Assignees

• Lam Res Corp

Inventors

• Wong Scott
• Genetti Damon Tyrone
• Witkowicki Derek John
• Paterson Alex
• Gould Richard H
• Ngo Austin
• Estoque Marc

Classifications

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• H10P72/1924

  characterised by atmosphere control · CPC title

• H10P72/1922

  characterised by the construction of the closed carrier · CPC title

• H10P72/1921

  characterised by substrate supports · CPC title