High precision edge ring centering for substrate processing systems
US-2023369025-A1 · Nov 16, 2023 · US
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Estoque Marc patents
Estoque Marc is listed as an inventor on 10 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Estoque Marc |
| Total patents | 10 |
| First publication | Apr 27, 2017 |
| Latest publication | Nov 16, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Edge ring centering method using ring dynamic alignment data
US-10541168-B2 · Jan 21, 2020 · US
Front opening ring pod
US-10062589-B2 · Aug 28, 2018 · US
Front opening ring pod
US-10062590-B2 · Aug 28, 2018 · US
Edge ring centering method using ring dynamic alignment data
US-2018138069-A1 · May 17, 2018 · US
Front Opening Ring Pod
US-2018068879-A1 · Mar 8, 2018 · US
Front Opening Ring Pod
US-2018040492-A1 · Feb 8, 2018 · US
Front opening ring pod
US-9881820-B2 · Jan 30, 2018 · US
Front Opening Ring Pod
US-2018019142-A1 · Jan 18, 2018 · US
Front Opening Ring Pod
US-2017117170-A1 · Apr 27, 2017 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 10 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/3302 | 9 |
| H10P72/7602 | 7 |
| H10P72/1924 | 7 |
| H10P72/1922 | 7 |
| H10P72/1921 | 7 |