Heating apparatus, heating method, and substrate processing apparatus
US-2020411340-A1 · Dec 31, 2020 · US
US2018014366A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2018014366-A1 |
| Application number | US-201715714864-A |
| Country | US |
| Kind code | A1 |
| Filing date | Sep 25, 2017 |
| Priority date | Mar 26, 2015 |
| Publication date | Jan 11, 2018 |
| Grant date | — |
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A split-type microwave oven comprises a first housing assembly, a second housing assembly, a microwave source module, a microwave shielding and choking member, and a detection device that is used for detecting whether a wave leakage occurs in a microwave heating resonant cavity. The second housing assembly is detachably disposed on the first housing assembly. The first housing assembly is provided with a first microwave shielding member, the second housing assembly is provided with a second microwave shielding member, and the first microwave shielding member is suitable for defining, together with the second microwave shielding member, the microwave heating resonant cavity. The microwave source module is installed on one of the first housing assembly and the second housing assembly. The microwave shielding and choking member is located outside the microwave heating resonant cavity. The split-type microwave oven occupies a small space and is convenient to use.
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What is claimed is: 1 . A split-type microwave oven, comprising: a first housing assembly and a second housing assembly, wherein the second housing assembly is detachably disposed on the first housing assembly, the first housing assembly is provided with a first microwave shielding member, the second housing assembly is provided with a second microwave shielding member, and the first microwave shielding member is configured to define a microwave-heating resonant cavity together with the second microwave shielding member; a microwave source component mounted to one of the first housing assembly and the second housing assembly, wherein the microwave source component comprises a control unit, a power source, an electric power supply and an electromagnetic waveguide, the electromagnetic waveguide is configured to guide a microwave into the microwave-heating resonant cavity, the control unit, the electric power supply and the electromagnetic waveguide are connected to the power source respectively; a microwave shielding and choking member located outside the microwave-heating resonant cavity and configured to prevent a microwave leakage when the first microwave shielding member defines the microwave-heating resonant cavity together with the second microwave shielding member; and a detection device connected to the control unit and configured to detect whether the microwave leakage occurs at the microwave-heating resonant cavity. 2 . The split-type microwave oven according to claim 1 , wherein the microwave source component is mounted in the first housing assembly, and the first housing assembly is configured to be embedded in a supporting member or movably disposed on a supporting member. 3 . The split-type microwave oven according to claim 2 , wherein a portion of the first microwave shielding member is recessed towards an interior of the first housing assembly to define a groove, and the split-type microwave oven further comprises a carrying plate disposed at an opening of the groove and fitted with a side wall of the groove to define an enclosed cavity, and a portion of the electromagnetic waveguide extending outside a housing is located in the cavity. 4 . The split-type microwave oven according to claim 1 , wherein the second housing assembly is disposed on a closet, and the microwave source component is mounted to the second housing assembly, and the microwave source component further comprises a coaxial cable, the coaxial cable is retractably connected between the power source and the electromagnetic waveguide, and the second microwave shielding member is disposed on an end of the coaxial cable adjacent to the electromagnetic waveguide, and the second housing assembly further comprises a wave-transmitting material member, the wave-transmitting material member is disposed on a lower surface of the second microwave shielding member to define an accommodating cavity together with the second microwave shielding member, and the electromagnetic waveguide is located in the accommodating cavity. 5 . The split-type microwave oven according to claim 4 , wherein the first microwave shielding member is configured to be embedded in a supporting member or disposed on a surface of a supporting member. 6 . The split-type microwave oven according to claim 1 , wherein the first microwave shielding member is provided with a first clip member, and the second microwave shielding member is provided with a second clip member configured to be fitted with the first clip member. 7 . The split-type microwave oven according to claim 1 , wherein at least one of the first microwave shielding member and the second microwave shielding member is a metal member. 8 . The split-type microwave oven according to claim 1 , wherein the second microwave shielding member is configured to have a hemispherical or cuboid shape which is hollow and has an open bottom. 9 . The split-type microwave oven according to claim 1 , wherein the microwave shielding and choking member is disposed in a remaining portion of an upper surface of the first housing assembly, the microwave shielding and choking member is formed as an annular member which is hollow and has an opening in a top thereof, when the second microwave shielding member is fitted with the first microwave shielding member, a lower surface of the second microwave shielding member encloses the opening. 10 . The split-type microwave oven according to claim 1 , wherein the microwave shielding and choking member is disposed on a lower end of the second microwave shielding member, the microwave shielding and choking member is formed as an annular member which is hollow and has an opening in a bottom thereof, when the second microwave shielding member is fitted with the first microwave shielding member, the first microwave shielding member encloses the opening. 11 . The split-type microwave oven according to claim 1 , wherein the power source is configured as a magnetron power source or a semiconductor power source. 12 . The split-type microwave oven according to claim 1 , wherein the detection device is configured as a sensor for detecting an amount of microwaves outside the microwave-heating resonant cavity. 13 . The split-type microwave oven according to claim 1 , wherein the detection device comprises an emitter for emitting a microwave signal and a receiver for receiving a standing wave, when the second microwave shielding member is disposed on the first microwave shielding member to define the microwave-heating resonant cavity, the emitter is configured to emit the microwave signal into the microwave-heating resonant cavity, and the receiver is configured to receive the reflected standing wave.
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